CA2695506A1 - Current feedthrough for a vacuum pump - Google Patents
Current feedthrough for a vacuum pump Download PDFInfo
- Publication number
- CA2695506A1 CA2695506A1 CA2695506A CA2695506A CA2695506A1 CA 2695506 A1 CA2695506 A1 CA 2695506A1 CA 2695506 A CA2695506 A CA 2695506A CA 2695506 A CA2695506 A CA 2695506A CA 2695506 A1 CA2695506 A1 CA 2695506A1
- Authority
- CA
- Canada
- Prior art keywords
- circuit board
- vacuum
- vacuum pump
- casing
- pump according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0693—Details or arrangements of the wiring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
The vacuum pump comprises a casing (10) closed by a vacuum cover (20).
Between an end wall (14) of the casing (10) and the vacuum cover (20), a circuit board (16) is arranged for current feedthrough. The circuit board (16) is sealed by two sealing means (15,21) of different diameters so that an annular partial region (22) is on its outer side subjected to the atmospheric pressure and is on its inner side subjected to the vacuum. It is avoided that the circuit board (16) laterally projects beyond the contour of the casing (10).
Between an end wall (14) of the casing (10) and the vacuum cover (20), a circuit board (16) is arranged for current feedthrough. The circuit board (16) is sealed by two sealing means (15,21) of different diameters so that an annular partial region (22) is on its outer side subjected to the atmospheric pressure and is on its inner side subjected to the vacuum. It is avoided that the circuit board (16) laterally projects beyond the contour of the casing (10).
Description
Oerlikon Leybold Vacuum GmbH
Sg/Dt Current feedthrough for a vacuum pump The present invention relates to a vacuum pump comprising a vacuum-tight casing accommociating a motor and a pump rotor, and further comprising a current feedthrough including a circuit board.
Vacuum pumps iri the form of turbomolecular pumps comprise a rotor which is configured to rotate at very high rotational numbers and thus is adapted to generate a high vacuum. In many pumps of this type, the rotor and the motor for driving the rotor are supported in magnetic bearings. Within the casing, a vacuum prevails, usually in the range below 10 mbar. The current feedthrough devices for the motor and for the vacuum bearings are pro-vided in a vacuunn-tight arrangement on the casing.
EP 1 757 825 Al describes a vacuum pump wherein the current feed-through into the casing comprises a circuit board. An inner side of the cir-cuit board is arranged in abutment on the casing with interposition of a sealing means, and an outer side is arranged in abutment on an outer vac-uum cover with interposition of a further sealing means, said vacuum cover closing the casing in a vacuum-tight manner. The traces of the circuit board are guided throuqh the gap between the two sealing means. The circuit board comprises a projecting portion arranged externally of the casing and provided with a connector. A further connector is arranged in contact with the traces within tihe casing.
It is an object of the invention to provide a vacuum pump wherein the cur-rent feedthrough device does not comprise circuit board portions projecting beyond the casing, thus avoiding the risk of damage to the circuit board and to exposed plug devices.
The vacuum pump according to the present invention is defined by claim 1.
Said vacuum purnp is provided with a circuit board having a first sealing means and a second sealing means arranged thereon, the first sealing means and the second sealing means being positioned with a lateral dis-placement relative to each other so that a partial region of the circuit board is on its outer side subjected to the atmospheric pressure and is on its inner side subjected to the generated vacuum.
An advantage herein resides in that said partial region which is exposed to a pressure difference and does not laterally extend beyond the wall of the casing, can be used to connect electric conductors to the board. Due to the lateral displacement of the sealing means relative to each other, a space is created within the wall contour which will be available for connection of ex-ternal lines. Consequently, this obviates the need for the circuit board to extend beyond the outer contour of the casing. In that wall portion of the circuit board where the pressure difference is effective, it is the circuit board itself that forms the wall of the pump. Deflection in this partial region is prevented because the circuit board is given support by abutment on the front-side end of the wall of the casing.
According to a preferred embodiment of the invention, the vacuum cover forming the vacuum closure of the casing is arranged within a protective cover and is movable relative thereto. The possibility of movement vertically to the plane of the cover will allow for the sealing means to be pressed into position. The vacuum cover is held in place by the pressure difference act-ing on it and is only loosely positioned by the protective cover. The protec-tive cover serves for avoiding damage to the vacuum cover and the circuit board. Apart from this function, the protective cover is useful as a support for a plug connection of the external electric lines leading to the circuit board. The protective cover includes a positioning means for positioning the vacuum cover but, on the other hand, does permit the vacuum cover to un-dergo reactions to the existing pressure difference. Alternatively, it is possi-ble to form the vacuum cover integrally with the protective cover.
Embodiments of the invention will be explained in greater detail hereunder with reference to the accompanying drawings.
Fig. 1 is a partly sectional longitudinal view of the casing of a vacuum pump, illustrating a first embodiment of the current feedthrough, and Fig. 2 is a view of a second embodiment of the current feedthrough whereiri the circuit board is additionally provided with electric comporients.
In Fig. 1, the casing 10 of a turbomolecular pump is illustrated. Located within casing 10 are a motor and a pump rotor. Casing 10 is provided with a pump inlet 11 on one of its ends and with a pump outlet 12 on its circum-ference. At said pump inlet 11, the vacuum is generated. Said pump outlet 12 can lead to the atmosphere or to a pre-vacuum pump.
At the rear end of an annular wall 13 of the casing, a planar end face 14 is arranged. End face 14 is formed with a groove accommodating an annular first sealing means 15 shaped as an 0-ring. Arranged in abutment on end face 14 is a circuit board 16 consisting of a body of insulating material pro-vided with traces (not shown) on one or both of its sides. Such circuit boards are also referred to as "printed circuits". Circuit board 16 is arranged in sealing abutment on sealing means 15. In the central area of the circuit board, which is surrounded by end face 14, an opening 17 is formed in the board for pressure compensation. Circuit board 16 has an inner side 18 fac-ing towards the interior chamber of the pump, and an outer side 19 facing away from the interior chamber. Said inner side 18 is arranged in abutment with the first sealirig means 15.
Sg/Dt Current feedthrough for a vacuum pump The present invention relates to a vacuum pump comprising a vacuum-tight casing accommociating a motor and a pump rotor, and further comprising a current feedthrough including a circuit board.
Vacuum pumps iri the form of turbomolecular pumps comprise a rotor which is configured to rotate at very high rotational numbers and thus is adapted to generate a high vacuum. In many pumps of this type, the rotor and the motor for driving the rotor are supported in magnetic bearings. Within the casing, a vacuum prevails, usually in the range below 10 mbar. The current feedthrough devices for the motor and for the vacuum bearings are pro-vided in a vacuunn-tight arrangement on the casing.
EP 1 757 825 Al describes a vacuum pump wherein the current feed-through into the casing comprises a circuit board. An inner side of the cir-cuit board is arranged in abutment on the casing with interposition of a sealing means, and an outer side is arranged in abutment on an outer vac-uum cover with interposition of a further sealing means, said vacuum cover closing the casing in a vacuum-tight manner. The traces of the circuit board are guided throuqh the gap between the two sealing means. The circuit board comprises a projecting portion arranged externally of the casing and provided with a connector. A further connector is arranged in contact with the traces within tihe casing.
It is an object of the invention to provide a vacuum pump wherein the cur-rent feedthrough device does not comprise circuit board portions projecting beyond the casing, thus avoiding the risk of damage to the circuit board and to exposed plug devices.
The vacuum pump according to the present invention is defined by claim 1.
Said vacuum purnp is provided with a circuit board having a first sealing means and a second sealing means arranged thereon, the first sealing means and the second sealing means being positioned with a lateral dis-placement relative to each other so that a partial region of the circuit board is on its outer side subjected to the atmospheric pressure and is on its inner side subjected to the generated vacuum.
An advantage herein resides in that said partial region which is exposed to a pressure difference and does not laterally extend beyond the wall of the casing, can be used to connect electric conductors to the board. Due to the lateral displacement of the sealing means relative to each other, a space is created within the wall contour which will be available for connection of ex-ternal lines. Consequently, this obviates the need for the circuit board to extend beyond the outer contour of the casing. In that wall portion of the circuit board where the pressure difference is effective, it is the circuit board itself that forms the wall of the pump. Deflection in this partial region is prevented because the circuit board is given support by abutment on the front-side end of the wall of the casing.
According to a preferred embodiment of the invention, the vacuum cover forming the vacuum closure of the casing is arranged within a protective cover and is movable relative thereto. The possibility of movement vertically to the plane of the cover will allow for the sealing means to be pressed into position. The vacuum cover is held in place by the pressure difference act-ing on it and is only loosely positioned by the protective cover. The protec-tive cover serves for avoiding damage to the vacuum cover and the circuit board. Apart from this function, the protective cover is useful as a support for a plug connection of the external electric lines leading to the circuit board. The protective cover includes a positioning means for positioning the vacuum cover but, on the other hand, does permit the vacuum cover to un-dergo reactions to the existing pressure difference. Alternatively, it is possi-ble to form the vacuum cover integrally with the protective cover.
Embodiments of the invention will be explained in greater detail hereunder with reference to the accompanying drawings.
Fig. 1 is a partly sectional longitudinal view of the casing of a vacuum pump, illustrating a first embodiment of the current feedthrough, and Fig. 2 is a view of a second embodiment of the current feedthrough whereiri the circuit board is additionally provided with electric comporients.
In Fig. 1, the casing 10 of a turbomolecular pump is illustrated. Located within casing 10 are a motor and a pump rotor. Casing 10 is provided with a pump inlet 11 on one of its ends and with a pump outlet 12 on its circum-ference. At said pump inlet 11, the vacuum is generated. Said pump outlet 12 can lead to the atmosphere or to a pre-vacuum pump.
At the rear end of an annular wall 13 of the casing, a planar end face 14 is arranged. End face 14 is formed with a groove accommodating an annular first sealing means 15 shaped as an 0-ring. Arranged in abutment on end face 14 is a circuit board 16 consisting of a body of insulating material pro-vided with traces (not shown) on one or both of its sides. Such circuit boards are also referred to as "printed circuits". Circuit board 16 is arranged in sealing abutment on sealing means 15. In the central area of the circuit board, which is surrounded by end face 14, an opening 17 is formed in the board for pressure compensation. Circuit board 16 has an inner side 18 fac-ing towards the interior chamber of the pump, and an outer side 19 facing away from the interior chamber. Said inner side 18 is arranged in abutment with the first sealirig means 15.
A vacuum cover 20 is set against the outer side 19 of the circuit board. The vacuum cover comprises an annular groove with a second sealing means 21 held therein. Also this sealing means is an annular sealing in the form of an 0-ring. The second sealing means 21 has a smaller opening diameter than the first sealing means 15. Between the two sealing means 15,21, there is thus generated an annular partial region 22 which is exposed to the existing pressure difference since its outer side is subjected to the atmospheric pressure and its inner side is subjected to the vacuum. Because of the pro-vision of opening 17, a balanced pressure prevails in the region enclosed by the second sealing means 21, i.e. the vacuum in the interior of the casing will in this regiori act on the vacuum cover 20. Thus, vacuum cover 20 is pressed in the dir-ection toward wall 13 under the effect of the atmospheric pressure.
On its front-side end, casing 10 is closed by a protective cover 23 which has no sealing function. Protective cover 23 includes a hollow space 24 for ac-commodating the vacuum cover 20, and a positioning means 25, formed as a stepped shoulder, for positioning the vacuum cover 20. The protective cover serves for protection of the vacuum cover as well as the circuit board and the elements connected thereto.
From the inner side 18 of circuit board 16, electric lines 26 extend into the interior of the casing. These lines can be power supply lines or also control or signal lines. The lines are connected to the conductor lines of the circuit board by solderinci or plug attachment.
External electric conductors 27 are soldered or plugged to the outer side 19 of circuit board 1.6. Said conductors 27 are guided through the interior space 24 to a pluq device 28 configured as an electrical multiple plug. Plug device 28 serves for connection of an external cable. The device is located on a side wall of protective cover 23 but could also be located on the rear surface.
Circuit board 16 does not laterally project beyond side wall 13. The partial region 22 between the sealing means 15 and 21 is provided as a connection region for the electric conductors 27.
The embodiment according to Fig. 2 is different from the embodiment ac-cording to Fig. 1 only in that the circuit board 16 is additionally provided with electrical components 30, such as e.g. resistors, capacitors, processors or memory devices. The components 30 can be passive and active compo-nents alike.
As in the first embodiment, vacuum cover 20 includes a recess which is en-closed by the edqe supporting the sealing means 21. In Fig. 2, said recess 31 serves for accommodation of the components 30 fastened to the outer side 19 of the circuit board.
On its front-side end, casing 10 is closed by a protective cover 23 which has no sealing function. Protective cover 23 includes a hollow space 24 for ac-commodating the vacuum cover 20, and a positioning means 25, formed as a stepped shoulder, for positioning the vacuum cover 20. The protective cover serves for protection of the vacuum cover as well as the circuit board and the elements connected thereto.
From the inner side 18 of circuit board 16, electric lines 26 extend into the interior of the casing. These lines can be power supply lines or also control or signal lines. The lines are connected to the conductor lines of the circuit board by solderinci or plug attachment.
External electric conductors 27 are soldered or plugged to the outer side 19 of circuit board 1.6. Said conductors 27 are guided through the interior space 24 to a pluq device 28 configured as an electrical multiple plug. Plug device 28 serves for connection of an external cable. The device is located on a side wall of protective cover 23 but could also be located on the rear surface.
Circuit board 16 does not laterally project beyond side wall 13. The partial region 22 between the sealing means 15 and 21 is provided as a connection region for the electric conductors 27.
The embodiment according to Fig. 2 is different from the embodiment ac-cording to Fig. 1 only in that the circuit board 16 is additionally provided with electrical components 30, such as e.g. resistors, capacitors, processors or memory devices. The components 30 can be passive and active compo-nents alike.
As in the first embodiment, vacuum cover 20 includes a recess which is en-closed by the edqe supporting the sealing means 21. In Fig. 2, said recess 31 serves for accommodation of the components 30 fastened to the outer side 19 of the circuit board.
Claims (10)
1. A vacuum pump comprising a vacuum-tight casing (10), said casing accommodating a motor and a pump rotor and being provided with a pump inlet (11) and a pump outlet (12), said pump further comprising a current feedthrough, said current feedthrough including a circuit board (16), an inner side (18) of said circuit board being arranged in abutment on an end face (14) of the wall of the casing with interposi-tion of a first sealing means (15), and an outer side (19) of said circuit board being arranged in abutment on a vacuum cover (20) of the cas-ing with interposition of a second sealing means (21), characterized in that said first and second sealing means (15,21) are arranged with a lateral displacement relative to each other so that a partial region (22) of the circuit board (16) is on its outer side subjected to the atmos-pheric pressure and is on its inner side subjected to the generated va-cuum.
2. The vacuum pump according to claim 1, characterized in that external electric conductors (27) extending from said partial region (22) are connected to traces of the circuit board (16).
3. The vacuum pump according to claim 2, characterized in that said ex-ternal conductors (27) are connected to a plug device (28) fastened to the casing (10).
4. The vacuum pump according to any one of claims 1 - 3, characterized in that the vacuum cover (20) is arranged in a protective cover (23) and is movable relative thereto.
5. The vacuum pump according to claim 4, characterized in that the pro-tective cover (23) is provided with a positioning means (25) for posi-tioning the vacuum cover (20).
6. The vacuum pump according to any one of claims 1 - 5, characterized in that the circuit board (16) is formed with an opening (17) for pres-sure compensation.
7. The vacuum pump according to any one of claims 1 - 6, characterized in that the circuit board (16) carries electrical components (30) on its inner side (18) and/or its outer side (19).
8. The vacuum pump according to any one of claims 1 - 7, characterized in that the circuit board (16) is provided with pump detection electron-ics.
9. The vacuum pump according to any one of claims 1 - 8, characterized in that the first and second sealing means (15,21) are annular sealing means with different opening diameters.
10. The vacuum pump according to claim 3, characterized in that the plug device (28) is mounted to a protective cover (23) of the casing (10).
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE202007012070.2 | 2007-08-30 | ||
| DE202007012070U DE202007012070U1 (en) | 2007-08-30 | 2007-08-30 | Electric feedthrough of a vacuum pump |
| PCT/EP2008/061335 WO2009027485A1 (en) | 2007-08-30 | 2008-08-28 | Current leadthrough for a vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2695506A1 true CA2695506A1 (en) | 2009-03-05 |
Family
ID=40091786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2695506A Abandoned CA2695506A1 (en) | 2007-08-30 | 2008-08-28 | Current feedthrough for a vacuum pump |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US20100303650A1 (en) |
| EP (1) | EP2183486A1 (en) |
| JP (1) | JP5456674B2 (en) |
| KR (1) | KR101497901B1 (en) |
| CN (1) | CN101796302B (en) |
| CA (1) | CA2695506A1 (en) |
| DE (1) | DE202007012070U1 (en) |
| RU (1) | RU2010111847A (en) |
| TW (1) | TW200909688A (en) |
| WO (1) | WO2009027485A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012053270A1 (en) * | 2010-10-19 | 2012-04-26 | エドワーズ株式会社 | Vacuum pump |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009031983A1 (en) * | 2009-07-06 | 2011-01-13 | Lti Drives Gmbh | Electrical connection unit connectable to a vacuum pump |
| EP2472120B1 (en) * | 2009-08-28 | 2022-11-30 | Edwards Japan Limited | Vacuum pump and member used for vacuum pump |
| JP5353838B2 (en) * | 2010-07-07 | 2013-11-27 | 株式会社島津製作所 | Vacuum pump |
| FR2962602B1 (en) * | 2010-07-08 | 2013-08-30 | Mecanique Magnetique Sa | METHOD AND DEVICE FOR ELECTRICAL CONNECTION WITH SEALED CROSSWAY BETWEEN TWO DIFFERENT MEDIA |
| KR101848529B1 (en) * | 2010-10-19 | 2018-04-12 | 에드워즈 가부시키가이샤 | Vacuum pump |
| DE202013009657U1 (en) * | 2013-10-31 | 2015-02-03 | Oerlikon Leybold Vacuum Gmbh | vacuum pump |
| JP6753759B2 (en) * | 2016-10-21 | 2020-09-09 | エドワーズ株式会社 | Vacuum pump and waterproof structure and control device applied to the vacuum pump |
| JP6912196B2 (en) * | 2016-12-28 | 2021-08-04 | エドワーズ株式会社 | Vacuum pumps and connectors and control devices applied to the vacuum pumps |
| DE102017105248A1 (en) | 2017-03-13 | 2018-09-13 | Pfeiffer Vacuum Gmbh | Vacuum pump with circuit board as vacuum feedthrough |
| IT201700040835A1 (en) * | 2017-04-12 | 2017-07-12 | Agilent Tech Inc A Delaware Corporation | Vacuum pump equipped with an improved vacuum electrical pass |
| EP3431769B1 (en) * | 2017-07-21 | 2022-05-04 | Pfeiffer Vacuum Gmbh | Vacuum pump |
| CN107887721B (en) | 2017-11-03 | 2019-12-13 | 珠海格力电器股份有限公司 | wiring structure of magnetic suspension bearing, compressor and air conditioner |
| EP3626971B1 (en) * | 2019-08-30 | 2022-05-11 | Pfeiffer Vacuum Gmbh | Vacuum pump |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB8830057D0 (en) * | 1988-12-23 | 1989-02-22 | Lucas Ind Plc | An electrical connection arrangement and a method of providing an electrical connection |
| DE4038394A1 (en) * | 1990-12-01 | 1992-06-04 | Bosch Gmbh Robert | ARRANGEMENT FOR SEALING A LADDER THROUGH THE WALL OF A HOUSING |
| IT1288737B1 (en) * | 1996-10-08 | 1998-09-24 | Varian Spa | VACUUM PUMPING DEVICE. |
| US6793466B2 (en) * | 2000-10-03 | 2004-09-21 | Ebara Corporation | Vacuum pump |
| JP2003269367A (en) * | 2002-03-13 | 2003-09-25 | Boc Edwards Technologies Ltd | Vacuum pump |
| FR2861142B1 (en) * | 2003-10-16 | 2006-02-03 | Mecanique Magnetique Sa | MOLECULAR TURBO VACUUM PUMP |
| JP4661278B2 (en) * | 2005-03-10 | 2011-03-30 | 株式会社島津製作所 | Turbo molecular pump |
| DE602005023866D1 (en) * | 2005-08-24 | 2010-11-11 | Mecos Traxler Ag | Magnetic bearing device with improved housing feedthrough under vacuum |
| US7588444B2 (en) * | 2006-02-01 | 2009-09-15 | Nidec Corporation | Busbar unit, electric motor and electrohydraulic power steering system furnished with the busbar unit, and method of manufacturing the busbar unit |
| DE102006016405A1 (en) * | 2006-04-07 | 2007-10-11 | Pfeiffer Vacuum Gmbh | Vacuum pump with drive unit |
| DE102006036493A1 (en) * | 2006-08-04 | 2008-02-21 | Oerlikon Leybold Vacuum Gmbh | vacuum pump |
-
2007
- 2007-08-30 DE DE202007012070U patent/DE202007012070U1/en not_active Expired - Lifetime
-
2008
- 2008-08-22 TW TW097132018A patent/TW200909688A/en unknown
- 2008-08-28 US US12/675,219 patent/US20100303650A1/en not_active Abandoned
- 2008-08-28 JP JP2010522377A patent/JP5456674B2/en not_active Expired - Fee Related
- 2008-08-28 CN CN200880104979XA patent/CN101796302B/en not_active Expired - Fee Related
- 2008-08-28 WO PCT/EP2008/061335 patent/WO2009027485A1/en active Application Filing
- 2008-08-28 CA CA2695506A patent/CA2695506A1/en not_active Abandoned
- 2008-08-28 KR KR1020107004593A patent/KR101497901B1/en not_active IP Right Cessation
- 2008-08-28 EP EP08803341A patent/EP2183486A1/en not_active Withdrawn
- 2008-08-28 RU RU2010111847/06A patent/RU2010111847A/en unknown
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012053270A1 (en) * | 2010-10-19 | 2012-04-26 | エドワーズ株式会社 | Vacuum pump |
| JPWO2012053270A1 (en) * | 2010-10-19 | 2014-02-24 | エドワーズ株式会社 | Vacuum pump |
| JP5778166B2 (en) * | 2010-10-19 | 2015-09-16 | エドワーズ株式会社 | Vacuum pump |
| US9267392B2 (en) | 2010-10-19 | 2016-02-23 | Edwards Japan Limited | Vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010537122A (en) | 2010-12-02 |
| JP5456674B2 (en) | 2014-04-02 |
| CN101796302B (en) | 2012-06-27 |
| KR101497901B1 (en) | 2015-03-03 |
| DE202007012070U1 (en) | 2009-01-08 |
| TW200909688A (en) | 2009-03-01 |
| EP2183486A1 (en) | 2010-05-12 |
| WO2009027485A1 (en) | 2009-03-05 |
| CN101796302A (en) | 2010-08-04 |
| RU2010111847A (en) | 2011-10-10 |
| KR20100058524A (en) | 2010-06-03 |
| US20100303650A1 (en) | 2010-12-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Discontinued |
Effective date: 20130828 |