CA2665111A1 - Circuit optique planaire hybride a reseaux reflechissants - Google Patents

Circuit optique planaire hybride a reseaux reflechissants Download PDF

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Publication number
CA2665111A1
CA2665111A1 CA002665111A CA2665111A CA2665111A1 CA 2665111 A1 CA2665111 A1 CA 2665111A1 CA 002665111 A CA002665111 A CA 002665111A CA 2665111 A CA2665111 A CA 2665111A CA 2665111 A1 CA2665111 A1 CA 2665111A1
Authority
CA
Canada
Prior art keywords
diffraction grating
substrate
reflective
core layer
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002665111A
Other languages
English (en)
Inventor
Ashok Balakrishnan
Serge Bidnyk
Matt Pearson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Enablence Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2665111A1 publication Critical patent/CA2665111A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

La présente invention concerne un circuit optique planaire hybride (PLC) comportant une puce de circuit de guide d'ondes (21) et une puce de réseau de diffraction réfléchissant au silicium (29) qui est montée sur la puce de circuit de guide d'ondes (21), via une tranchée (27) formée dans la puce de guide d'ondes (21). La puce de circuit de guide d'ondes (21) comporte une structure de guide d'ondes haute performance en silice sur silicium (22, 23, 24) formée sur un substrat de silicium (26) et la puce de réseau de diffraction réfléchissant au silicium (29) comporte un substrat de réseau à tranches séparé (31) et un réseau de diffraction réfléchissant (28) qui y est formé. Le réseau de diffraction réfléchissant (28) est formé dans le substrat de réseau à tranche (31) au moyen d'un procédé de gravure profonde par ions réactifs (DRIE)de haute précision permettant ainsi la fabrication d'une puce de réseau de diffraction de grande précision (29). Par conséquent, le circuit optique planaire hybride selon la présente invention comporte un réseau de diffraction de grande précision (29) fabriqué séparément et une structure de guide d'ondes (22, 23, 24) de grande qualité sur laquelle la puce de réseau de diffraction (29) est montée, ce qui permet à la fois d'utiliser de nouvelles technologies DRIE dans le traitement de la puce de réseau de diffraction (29) et d'utiliser la connexion par billes lors de la réalisation de l'opération de montage de la puce de réseau de diffraction (29). L'avantage du circuit optique planaire hybride (PLC) selon la présente invention est que, non seulement il est possible de fabriquer le dispositif avec une configuration aussi complexe que celle des circuits optiques planaires hybrides de l'art antérieur mais aussi que la fabrication du dispositif est rendue plus facile, grâce à une technique (procédé DRIE) qui produit une gravure verticale de grande qualité avec une très faible rugosité de surface. En particulier, étant donné que la puce de réseau de diffraction réfléchissant est fabriquée séparément, à partir du silicium ou d'autres matières analogues, il est possible d'utiliser la technique du procédé DRIE, au contraire des procédés de fabrication de circuits optiques planaires hybrides de l'art antérieur qui généralement interdisent l'utilisation du procédé DRIE.
CA002665111A 2006-10-04 2007-10-03 Circuit optique planaire hybride a reseaux reflechissants Abandoned CA2665111A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US82808006P 2006-10-04 2006-10-04
US60/828,080 2006-10-04
PCT/CA2007/001776 WO2008040125A1 (fr) 2006-10-04 2007-10-03 Circuit optique planaire hybride à réseaux réfléchissants

Publications (1)

Publication Number Publication Date
CA2665111A1 true CA2665111A1 (fr) 2008-04-10

Family

ID=39268088

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002665111A Abandoned CA2665111A1 (fr) 2006-10-04 2007-10-03 Circuit optique planaire hybride a reseaux reflechissants

Country Status (7)

Country Link
EP (1) EP2082270A4 (fr)
JP (1) JP2010506201A (fr)
KR (1) KR20090060365A (fr)
CN (1) CN101548212A (fr)
CA (1) CA2665111A1 (fr)
NO (1) NO20091514L (fr)
WO (1) WO2008040125A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8737846B2 (en) * 2012-01-30 2014-05-27 Oracle International Corporation Dynamic-grid comb optical source
US11300728B2 (en) * 2020-02-11 2022-04-12 Cisco Technology, Inc. Solder reflow compatible connections between optical components
WO2023239774A1 (fr) * 2022-06-07 2023-12-14 Marvell Asia Pte., Ltd. Fixation de circuit optique planaire stable et à faible perte avec interposeur en silicium

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL111219A0 (en) * 1993-10-18 1994-12-29 Hughes Aircraft Co Microelement assembly
JPH0943440A (ja) * 1995-07-28 1997-02-14 Toshiba Corp 集積化光合分波器
US6134359A (en) * 1997-11-24 2000-10-17 Jds Uniphase Inc. Optical multiplexing/demultiplexing device having a wavelength dispersive element
JPH11109184A (ja) * 1997-09-30 1999-04-23 Kyocera Corp 光デバイス実装用基板及び光モジュール
US6095697A (en) * 1998-03-31 2000-08-01 Honeywell International Inc. Chip-to-interface alignment
US6959129B2 (en) * 2000-12-22 2005-10-25 Metrophotonics Inc. Bidirectional multiplexer and demultiplexer based on a single echelle waveguide grating
JP3701618B2 (ja) * 2001-08-24 2005-10-05 日本電信電話株式会社 導波路型光素子及びその作製方法
WO2004044634A1 (fr) * 2002-11-13 2004-05-27 Battelle Memorial Institute Multiplexeur/demultiplexeur en longueur d'onde optique avec amplificateur optique integre
DE10333371A1 (de) * 2003-07-23 2005-02-10 Bayer Ag Fungizide Wirkstoffkombinationen
US7151635B2 (en) * 2004-03-24 2006-12-19 Enablence, Inc. Planar waveguide reflective diffraction grating
KR100637929B1 (ko) * 2004-11-03 2006-10-24 한국전자통신연구원 하이브리드형 광소자

Also Published As

Publication number Publication date
EP2082270A1 (fr) 2009-07-29
JP2010506201A (ja) 2010-02-25
EP2082270A4 (fr) 2010-04-14
NO20091514L (no) 2009-04-27
CN101548212A (zh) 2009-09-30
WO2008040125A1 (fr) 2008-04-10
KR20090060365A (ko) 2009-06-11

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Legal Events

Date Code Title Description
EEER Examination request
FZDE Discontinued

Effective date: 20141003

FZDE Discontinued

Effective date: 20141003