CA2600524C - Thin film production method and apparatus - Google Patents
Thin film production method and apparatus Download PDFInfo
- Publication number
- CA2600524C CA2600524C CA2600524A CA2600524A CA2600524C CA 2600524 C CA2600524 C CA 2600524C CA 2600524 A CA2600524 A CA 2600524A CA 2600524 A CA2600524 A CA 2600524A CA 2600524 C CA2600524 C CA 2600524C
- Authority
- CA
- Canada
- Prior art keywords
- particles
- substrate
- deposited
- filter substrate
- nanotube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003852 thin film production method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 claims abstract description 58
- 238000000034 method Methods 0.000 claims abstract description 55
- 239000000463 material Substances 0.000 claims abstract description 45
- 239000000443 aerosol Substances 0.000 claims abstract description 29
- 239000002245 particle Substances 0.000 claims abstract description 28
- 230000001070 adhesive effect Effects 0.000 claims abstract description 19
- 239000000853 adhesive Substances 0.000 claims abstract description 18
- 239000000725 suspension Substances 0.000 claims abstract description 17
- 239000010409 thin film Substances 0.000 claims abstract description 10
- 238000000151 deposition Methods 0.000 claims abstract description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 39
- 239000010408 film Substances 0.000 claims description 38
- 239000002041 carbon nanotube Substances 0.000 claims description 31
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 30
- 239000002071 nanotube Substances 0.000 claims description 28
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 239000012188 paraffin wax Substances 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- 239000002002 slurry Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000010924 continuous production Methods 0.000 claims description 2
- 239000001993 wax Substances 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims 1
- 239000011368 organic material Substances 0.000 claims 1
- 239000007787 solid Substances 0.000 abstract 2
- 239000002238 carbon nanotube film Substances 0.000 description 40
- 238000004519 manufacturing process Methods 0.000 description 21
- 239000012530 fluid Substances 0.000 description 15
- 239000002109 single walled nanotube Substances 0.000 description 12
- 239000002079 double walled nanotube Substances 0.000 description 10
- 238000001914 filtration Methods 0.000 description 9
- 239000003054 catalyst Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 230000001464 adherent effect Effects 0.000 description 6
- 239000011888 foil Substances 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000002131 composite material Substances 0.000 description 5
- 239000002390 adhesive tape Substances 0.000 description 4
- 238000012769 bulk production Methods 0.000 description 4
- 239000012018 catalyst precursor Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000011065 in-situ storage Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 229910003472 fullerene Inorganic materials 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000001311 chemical methods and process Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000002048 multi walled nanotube Substances 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 238000010744 Boudouard reaction Methods 0.000 description 1
- -1 Buckyballs Chemical class 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000981 high-pressure carbon monoxide method Methods 0.000 description 1
- 238000005984 hydrogenation reaction Methods 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000001883 metal evaporation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000002407 reforming Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000013341 scale-up Methods 0.000 description 1
- 238000004621 scanning probe microscopy Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 238000000527 sonication Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/168—After-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/24—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Composite Materials (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Filtering Materials (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US66041205P | 2005-03-10 | 2005-03-10 | |
| US60/660,412 | 2005-03-10 | ||
| PCT/US2006/008622 WO2006099156A2 (en) | 2005-03-10 | 2006-03-10 | Thin film production method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2600524A1 CA2600524A1 (en) | 2006-09-21 |
| CA2600524C true CA2600524C (en) | 2013-12-03 |
Family
ID=36992275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2600524A Expired - Fee Related CA2600524C (en) | 2005-03-10 | 2006-03-10 | Thin film production method and apparatus |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7771784B2 (OSRAM) |
| EP (1) | EP1877255A4 (OSRAM) |
| JP (1) | JP4993642B2 (OSRAM) |
| KR (1) | KR20070116866A (OSRAM) |
| CA (1) | CA2600524C (OSRAM) |
| WO (1) | WO2006099156A2 (OSRAM) |
Families Citing this family (47)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2860153B1 (en) | 2005-07-28 | 2018-05-16 | Nanocomp Technologies, Inc. | Apparatus and method for formation and collection of nanofibrous non-woven sheet |
| US8951632B2 (en) | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused carbon fiber materials and process therefor |
| US8951631B2 (en) | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused metal fiber materials and process therefor |
| US9005755B2 (en) | 2007-01-03 | 2015-04-14 | Applied Nanostructured Solutions, Llc | CNS-infused carbon nanomaterials and process therefor |
| AU2008219693B2 (en) * | 2007-02-27 | 2012-04-12 | Nanocomp Technologies, Inc. | Materials for thermal protection and methods of manufacturing same |
| GB0708294D0 (en) * | 2007-04-28 | 2007-06-06 | Q Flo Ltd | A continuous process for preparing and collecting nanotube films that are supporated by a substrate |
| CN101315974B (zh) * | 2007-06-01 | 2010-05-26 | 清华大学 | 锂离子电池负极及其制备方法 |
| US9061913B2 (en) | 2007-06-15 | 2015-06-23 | Nanocomp Technologies, Inc. | Injector apparatus and methods for production of nanostructures |
| FI20075482L (fi) * | 2007-06-25 | 2008-12-26 | Canatu Oy | Kuituverkostot sekä menetelmä ja laite kuituverkostojen jatkuvasti tai erinä tapahtuvaan tuotantoon |
| CN101707904B (zh) * | 2007-07-06 | 2013-03-20 | 独立行政法人产业技术总合研究所 | 碳纳米管成膜方法、成膜装置及碳纳米管薄膜 |
| CA2695853A1 (en) | 2007-08-07 | 2009-02-12 | Nanocomp Technologies, Inc. | Electrically and thermally non-metallic conductive nanostructure-based adapters |
| JP5205672B2 (ja) * | 2007-08-29 | 2013-06-05 | 独立行政法人物質・材料研究機構 | フラーレン細線付き基盤とその製造方法 |
| CN101450288B (zh) * | 2007-11-30 | 2012-08-29 | 清华大学 | 过滤膜及其制备方法 |
| FI20085085A0 (fi) * | 2008-01-31 | 2008-01-31 | Jyrki Maekelae | Rullalta rullalle -menetelmä ja pinnoituslaite |
| KR100922399B1 (ko) | 2008-02-29 | 2009-10-19 | 고려대학교 산학협력단 | 전자방출원, 이를 적용한 전자장치 및 전자방출원의제조방법 |
| GB0805837D0 (en) * | 2008-03-31 | 2008-06-04 | Qinetiq Ltd | Chemical Vapour Deposition Process |
| US10358535B2 (en) * | 2008-04-25 | 2019-07-23 | The University Of Kentucky Research Foundation | Thermal interface material |
| US20120177926A1 (en) | 2008-05-07 | 2012-07-12 | Nanocomp Technologies, Inc. | Nanostructure composite sheets and methods of use |
| EP2279522B1 (en) | 2008-05-07 | 2017-01-25 | Nanocomp Technologies, Inc. | Nanostructure-based heating devices and method of use |
| US8261368B2 (en) * | 2008-05-13 | 2012-09-04 | Nanoink, Inc. | Nanomanufacturing devices and methods |
| US7993524B2 (en) * | 2008-06-30 | 2011-08-09 | Nanoasis Technologies, Inc. | Membranes with embedded nanotubes for selective permeability |
| KR100904218B1 (ko) | 2008-09-16 | 2009-06-25 | 주식회사 나노베이스 | 탄소 나노튜브 코팅 장치 및 그 방법 |
| KR101082831B1 (ko) * | 2008-11-25 | 2011-11-11 | 금호석유화학 주식회사 | 탄소나노튜브 합성장치 |
| KR101162686B1 (ko) | 2008-12-01 | 2012-07-05 | 주식회사 나노베이스 | 탄소 나노튜브 코팅 장치 및 그 방법 |
| FI124440B (fi) * | 2009-01-28 | 2014-08-29 | Canatu Oy | Rakenteita, jotka käsittävät korkean aspektisuhteen omaavia molekyylirakenteita, ja valmistusmenetelmiä |
| US20100224129A1 (en) | 2009-03-03 | 2010-09-09 | Lockheed Martin Corporation | System and method for surface treatment and barrier coating of fibers for in situ cnt growth |
| CN102388172B (zh) * | 2009-04-10 | 2015-02-11 | 应用纳米结构方案公司 | 使用立式加热炉将碳纳米管并入纤维的方法和设备 |
| JP2010254494A (ja) * | 2009-04-22 | 2010-11-11 | Nec Corp | ナノチューブ状物質の分離方法、製造方法及び分離装置 |
| CN101920955B (zh) * | 2009-06-09 | 2012-09-19 | 清华大学 | 碳纳米管膜保护结构及其制备方法 |
| TWI462838B (zh) * | 2009-06-18 | 2014-12-01 | Hon Hai Prec Ind Co Ltd | 奈米碳管膜保護結構及其製備方法 |
| WO2010148322A1 (en) * | 2009-06-19 | 2010-12-23 | Under Armour, Inc. | Nanoadhesion structures for sporting gear |
| BR112012002216A2 (pt) | 2009-08-03 | 2016-05-31 | Applied Nanostructured Sols | método de incorporação de nanopartículas em fibras compósitas, fibra de vidro e tapete de fibra picada ou compósito |
| AU2011302314A1 (en) | 2010-09-14 | 2013-02-28 | Applied Nanostructured Solutions, Llc | Glass substrates having carbon nanotubes grown thereon and methods for production thereof |
| CN103118975A (zh) | 2010-09-22 | 2013-05-22 | 应用奈米结构公司 | 具有碳纳米管成长于其上的碳纤维基板及其制造方法 |
| US8722171B2 (en) | 2011-01-04 | 2014-05-13 | Nanocomp Technologies, Inc. | Nanotube-based insulators |
| TWI441940B (zh) * | 2011-06-09 | 2014-06-21 | Shih Hua Technology Ltd | 圖案化導電元件的製備方法 |
| CN102994980B (zh) * | 2012-12-13 | 2015-01-14 | 苏州汉纳材料科技有限公司 | 高导电碳纳米管薄膜的制备方法及装置 |
| ES2943257T3 (es) | 2013-06-17 | 2023-06-12 | Nanocomp Technologies Inc | Agentes exfoliantes-dispersantes para nanotubos, haces y fibras |
| WO2016019143A1 (en) * | 2014-07-30 | 2016-02-04 | General Nano Llc | Carbon nanotube sheet structure and method for its making |
| WO2016025532A1 (en) | 2014-08-11 | 2016-02-18 | The Arizona Board Of Regents On Behalf Of The University Of Arizona | Aligned graphene-carbon nanotube porous carbon composite |
| JP6821575B2 (ja) | 2015-02-03 | 2021-01-27 | ナノコンプ テクノロジーズ，インク． | カーボンナノチューブ構造体およびその生成のための方法 |
| US10758936B2 (en) | 2015-12-08 | 2020-09-01 | The Boeing Company | Carbon nanomaterial composite sheet and method for making the same |
| US11021369B2 (en) | 2016-02-04 | 2021-06-01 | General Nano Llc | Carbon nanotube sheet structure and method for its making |
| US10581082B2 (en) | 2016-11-15 | 2020-03-03 | Nanocomp Technologies, Inc. | Systems and methods for making structures defined by CNT pulp networks |
| US11279836B2 (en) | 2017-01-09 | 2022-03-22 | Nanocomp Technologies, Inc. | Intumescent nanostructured materials and methods of manufacturing same |
| CN109295451B (zh) * | 2018-10-12 | 2021-04-09 | 哈尔滨工业大学 | 等离子体辅助气溶胶沉积成膜方法及气溶胶沉积装置 |
| FI129565B (en) | 2019-04-24 | 2022-04-29 | Canatu Oy | Apparatuses and method for oriented deposition |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6630772B1 (en) * | 1998-09-21 | 2003-10-07 | Agere Systems Inc. | Device comprising carbon nanotube field emitter structure and process for forming device |
| AUPQ304199A0 (en) * | 1999-09-23 | 1999-10-21 | Commonwealth Scientific And Industrial Research Organisation | Patterned carbon nanotubes |
| JP2005097003A (ja) * | 2000-05-31 | 2005-04-14 | Nec Corp | カーボンナノチューブの固着方法 |
| AU2002247579B2 (en) * | 2001-03-26 | 2006-09-28 | National Research Council Of Canada | Process and apparatus for synthesis of nanotubes |
| JP2002361599A (ja) * | 2001-06-07 | 2002-12-18 | Sony Corp | カーボン・ナノチューブ構造体及びその製造方法、冷陰極電界電子放出素子及びその製造方法、並びに、冷陰極電界電子放出表示装置及びその製造方法 |
| US6835591B2 (en) * | 2001-07-25 | 2004-12-28 | Nantero, Inc. | Methods of nanotube films and articles |
| US6749862B2 (en) * | 2001-08-06 | 2004-06-15 | Phillip G. Landers | Method and composition of disrupting feeding patterns of woodpeckers |
| US7138100B2 (en) | 2001-11-21 | 2006-11-21 | William Marsh Rice Univesity | Process for making single-wall carbon nanotubes utilizing refractory particles |
| US6902658B2 (en) | 2001-12-18 | 2005-06-07 | Motorola, Inc. | FED cathode structure using electrophoretic deposition and method of fabrication |
| US6713519B2 (en) | 2001-12-21 | 2004-03-30 | Battelle Memorial Institute | Carbon nanotube-containing catalysts, methods of making, and reactions catalyzed over nanotube catalysts |
| GB2385864A (en) * | 2002-02-28 | 2003-09-03 | Qinetiq Ltd | Production of nanocarbons |
| US7261852B2 (en) | 2002-07-19 | 2007-08-28 | University Of Florida Research Foundation, Inc. | Transparent electrodes from single wall carbon nanotubes |
| JP3998241B2 (ja) * | 2002-10-18 | 2007-10-24 | キヤノン株式会社 | カーボンファイバーが固定された基体の製造方法 |
| US7150801B2 (en) * | 2003-02-26 | 2006-12-19 | Mitsubishi Gas Chemical Company, Inc. | Process for producing cold field-emission cathodes |
| JP3869394B2 (ja) * | 2003-06-30 | 2007-01-17 | 富士通株式会社 | 微粒子の堆積方法及びカーボンナノチューブの形成方法 |
| US7611579B2 (en) | 2004-01-15 | 2009-11-03 | Nanocomp Technologies, Inc. | Systems and methods for synthesis of extended length nanostructures |
| EP2860153B1 (en) | 2005-07-28 | 2018-05-16 | Nanocomp Technologies, Inc. | Apparatus and method for formation and collection of nanofibrous non-woven sheet |
-
2006
- 2006-03-10 EP EP06737767A patent/EP1877255A4/en not_active Withdrawn
- 2006-03-10 KR KR1020077022903A patent/KR20070116866A/ko not_active Abandoned
- 2006-03-10 WO PCT/US2006/008622 patent/WO2006099156A2/en not_active Ceased
- 2006-03-10 US US11/885,659 patent/US7771784B2/en not_active Expired - Fee Related
- 2006-03-10 JP JP2008500973A patent/JP4993642B2/ja not_active Expired - Fee Related
- 2006-03-10 CA CA2600524A patent/CA2600524C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| WO2006099156A3 (en) | 2007-02-15 |
| EP1877255A4 (en) | 2011-03-30 |
| JP4993642B2 (ja) | 2012-08-08 |
| JP2008535752A (ja) | 2008-09-04 |
| KR20070116866A (ko) | 2007-12-11 |
| WO2006099156A2 (en) | 2006-09-21 |
| US7771784B2 (en) | 2010-08-10 |
| EP1877255A2 (en) | 2008-01-16 |
| US20080308209A1 (en) | 2008-12-18 |
| CA2600524A1 (en) | 2006-09-21 |
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