CA2525881A1 - Assemblage a simple effet pour microstructures mems hors plan - Google Patents

Assemblage a simple effet pour microstructures mems hors plan Download PDF

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Publication number
CA2525881A1
CA2525881A1 CA 2525881 CA2525881A CA2525881A1 CA 2525881 A1 CA2525881 A1 CA 2525881A1 CA 2525881 CA2525881 CA 2525881 CA 2525881 A CA2525881 A CA 2525881A CA 2525881 A1 CA2525881 A1 CA 2525881A1
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CA
Canada
Prior art keywords
plane
friction
microstructure
held
place
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA 2525881
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English (en)
Inventor
See-Ho Tsang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CA 2525881 priority Critical patent/CA2525881A1/fr
Publication of CA2525881A1 publication Critical patent/CA2525881A1/fr
Abandoned legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0003—MEMS mechanisms for assembling automatically hinged components, self-assembly devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
CA 2525881 2005-11-10 2005-11-10 Assemblage a simple effet pour microstructures mems hors plan Abandoned CA2525881A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA 2525881 CA2525881A1 (fr) 2005-11-10 2005-11-10 Assemblage a simple effet pour microstructures mems hors plan

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA 2525881 CA2525881A1 (fr) 2005-11-10 2005-11-10 Assemblage a simple effet pour microstructures mems hors plan

Publications (1)

Publication Number Publication Date
CA2525881A1 true CA2525881A1 (fr) 2007-05-10

Family

ID=38024461

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2525881 Abandoned CA2525881A1 (fr) 2005-11-10 2005-11-10 Assemblage a simple effet pour microstructures mems hors plan

Country Status (1)

Country Link
CA (1) CA2525881A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009127273A2 (fr) * 2008-04-18 2009-10-22 Robert Bosch Gmbh Procédé de fabrication d'un composant micromécanique et composant micromécanique

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009127273A2 (fr) * 2008-04-18 2009-10-22 Robert Bosch Gmbh Procédé de fabrication d'un composant micromécanique et composant micromécanique
WO2009127273A3 (fr) * 2008-04-18 2010-05-06 Robert Bosch Gmbh Procédé de fabrication d'un composant micromécanique et composant micromécanique

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