CA2481571A1 - Direct bonding methods using lithium - Google Patents
Direct bonding methods using lithium Download PDFInfo
- Publication number
- CA2481571A1 CA2481571A1 CA002481571A CA2481571A CA2481571A1 CA 2481571 A1 CA2481571 A1 CA 2481571A1 CA 002481571 A CA002481571 A CA 002481571A CA 2481571 A CA2481571 A CA 2481571A CA 2481571 A1 CA2481571 A1 CA 2481571A1
- Authority
- CA
- Canada
- Prior art keywords
- lithium
- bonding
- glass
- articles
- further including
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 229910052744 lithium Inorganic materials 0.000 title claims abstract description 97
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 title claims abstract description 91
- 238000000034 method Methods 0.000 title claims abstract description 49
- 239000000203 mixture Substances 0.000 claims abstract description 33
- 238000000576 coating method Methods 0.000 claims abstract description 14
- 239000000853 adhesive Substances 0.000 claims abstract description 11
- 230000001070 adhesive effect Effects 0.000 claims abstract description 11
- 239000011248 coating agent Substances 0.000 claims abstract description 10
- 238000000151 deposition Methods 0.000 claims abstract description 5
- 239000011521 glass Substances 0.000 claims description 65
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 claims description 17
- 229910001416 lithium ion Inorganic materials 0.000 claims description 17
- IIPYXGDZVMZOAP-UHFFFAOYSA-N lithium nitrate Chemical compound [Li+].[O-][N+]([O-])=O IIPYXGDZVMZOAP-UHFFFAOYSA-N 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 12
- 229910052710 silicon Inorganic materials 0.000 claims description 12
- 239000003513 alkali Substances 0.000 claims description 11
- 150000002500 ions Chemical class 0.000 claims description 10
- INHCSSUBVCNVSK-UHFFFAOYSA-L lithium sulfate Inorganic materials [Li+].[Li+].[O-]S([O-])(=O)=O INHCSSUBVCNVSK-UHFFFAOYSA-L 0.000 claims description 8
- RBTVSNLYYIMMKS-UHFFFAOYSA-N tert-butyl 3-aminoazetidine-1-carboxylate;hydrochloride Chemical compound Cl.CC(C)(C)OC(=O)N1CC(N)C1 RBTVSNLYYIMMKS-UHFFFAOYSA-N 0.000 claims description 7
- 239000002253 acid Substances 0.000 claims description 4
- 229910003002 lithium salt Inorganic materials 0.000 claims description 4
- 159000000002 lithium salts Chemical class 0.000 claims description 4
- 229910008051 Si-OH Inorganic materials 0.000 claims description 3
- 229910006358 Si—OH Inorganic materials 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 230000005660 hydrophilic surface Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 abstract description 16
- 238000005342 ion exchange Methods 0.000 abstract description 10
- 230000004927 fusion Effects 0.000 abstract description 7
- 238000005468 ion implantation Methods 0.000 abstract description 5
- 239000013307 optical fiber Substances 0.000 abstract description 5
- 230000008021 deposition Effects 0.000 abstract description 2
- 238000010521 absorption reaction Methods 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 38
- 238000007789 sealing Methods 0.000 description 30
- 239000000463 material Substances 0.000 description 22
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 19
- 239000005297 pyrex Substances 0.000 description 19
- 239000010410 layer Substances 0.000 description 15
- 239000000377 silicon dioxide Substances 0.000 description 15
- 238000010438 heat treatment Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 239000000243 solution Substances 0.000 description 10
- 239000000126 substance Substances 0.000 description 10
- 230000032798 delamination Effects 0.000 description 7
- 239000002241 glass-ceramic Substances 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 6
- 239000000835 fiber Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000000137 annealing Methods 0.000 description 5
- 238000003491 array Methods 0.000 description 5
- 239000005350 fused silica glass Substances 0.000 description 5
- 238000013508 migration Methods 0.000 description 5
- 230000005012 migration Effects 0.000 description 5
- 239000011022 opal Substances 0.000 description 5
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 4
- 239000000908 ammonium hydroxide Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 229910001947 lithium oxide Inorganic materials 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000013590 bulk material Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000003599 detergent Substances 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910017604 nitric acid Inorganic materials 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000006088 Fotoceram Substances 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000002419 bulk glass Substances 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000001627 detrimental effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 239000005368 silicate glass Substances 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 239000006121 base glass Substances 0.000 description 1
- 239000003637 basic solution Substances 0.000 description 1
- 229910001423 beryllium ion Inorganic materials 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- -1 for example Chemical class 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000013383 initial experiment Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000010421 standard material Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 238000009864 tensile test Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 238000000825 ultraviolet detection Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
- C03C27/06—Joining glass to glass by processes other than fusing
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/04—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with articles made from glass
- C04B37/042—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with articles made from glass in a direct manner
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/52—Pre-treatment of the joining surfaces, e.g. cleaning, machining
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Structural Engineering (AREA)
- Joining Of Glass To Other Materials (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Surface Treatment Of Glass (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/118,780 | 2002-04-08 | ||
| US10/118,780 US20030188553A1 (en) | 2002-04-08 | 2002-04-08 | Direct bonding methods using lithium |
| PCT/US2003/009149 WO2003087006A1 (en) | 2002-04-08 | 2003-03-24 | Direct bonding methods using lithium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2481571A1 true CA2481571A1 (en) | 2003-10-23 |
Family
ID=28674498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002481571A Abandoned CA2481571A1 (en) | 2002-04-08 | 2003-03-24 | Direct bonding methods using lithium |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US20030188553A1 (https=) |
| EP (1) | EP1492738A1 (https=) |
| JP (1) | JP2005522400A (https=) |
| KR (1) | KR20040108705A (https=) |
| CN (1) | CN100344567C (https=) |
| AU (1) | AU2003222071A1 (https=) |
| CA (1) | CA2481571A1 (https=) |
| TW (1) | TWI302525B (https=) |
| WO (1) | WO2003087006A1 (https=) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2003300348A1 (en) * | 2002-12-30 | 2004-07-29 | Corning Incorporated | Fast-switching scalable optical interconnection design with fast contention resolution |
| US8161862B1 (en) * | 2007-01-08 | 2012-04-24 | Corning Incorporated | Hybrid laminated transparent armor |
| CN101679131A (zh) * | 2007-05-21 | 2010-03-24 | 康宁股份有限公司 | 热接合的玻璃-陶瓷/玻璃层叠体，它们在装甲应用中的用途及其制造方法 |
| KR100841376B1 (ko) * | 2007-06-12 | 2008-06-26 | 삼성에스디아이 주식회사 | 접합방법 및 그를 이용한 유기전계발광표시장치의 제조방법 |
| KR100889625B1 (ko) | 2007-07-19 | 2009-03-20 | 삼성모바일디스플레이주식회사 | 접합방법 및 그를 이용한 유기전계발광표시장치의 제조방법 |
| US20100285277A1 (en) * | 2009-05-11 | 2010-11-11 | Victoria Ann Edwards | Method for protecting a glass edge using a machinable metal armor |
| WO2014002693A1 (ja) * | 2012-06-29 | 2014-01-03 | コニカミノルタ株式会社 | 情報記録媒体用ガラス基板および情報記録媒体用ガラス基板の製造方法 |
| WO2019119341A1 (en) * | 2017-12-21 | 2019-06-27 | Schott Glass Technologies (Suzhou) Co. Ltd. | Bondable glass and low auto-fluorescence article and method of mak-ing it |
| CN111204985B (zh) * | 2018-11-22 | 2021-04-20 | 比亚迪股份有限公司 | 半成品玻璃结构及其制备方法、玻璃壳体及其制备方法和移动电子设备 |
| TWI872505B (zh) * | 2022-04-15 | 2025-02-11 | 日商安瀚視特控股股份有限公司 | 化學強化鋁硼矽酸鹽玻璃 |
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| DE2130905C3 (de) * | 1971-06-22 | 1974-01-31 | Siemens Ag, 1000 Berlin U. 8000 Muenchen | Verfahren zum Herstellen haftfester vakuumdichter Verbindungen zwischen Keramikkörpern |
| US4186999A (en) * | 1977-10-25 | 1980-02-05 | Amp Incorporated | Connector ferrule for terminating optical fiber cables |
| FR2487811B1 (fr) * | 1980-07-31 | 1985-07-26 | France Etat | Procede et installation de fabrication de fibres optiques en continu |
| US4530452A (en) * | 1982-04-20 | 1985-07-23 | Automation Industries, Inc. | Apparatus for cleaving an optical fiber |
| US4626068A (en) * | 1982-07-29 | 1986-12-02 | The United States Of America As Represented By The Secretary Of The Air Force | Photoactive coating for hardening optical fibers |
| JPH0617243B2 (ja) * | 1986-10-24 | 1994-03-09 | 日本電気硝子株式会社 | 結晶化ガラスの接着方法 |
| US5846638A (en) * | 1988-08-30 | 1998-12-08 | Onyx Optics, Inc. | Composite optical and electro-optical devices |
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| JPH0791091B2 (ja) * | 1989-11-06 | 1995-10-04 | 日本板硝子株式会社 | 低損失埋込み導波路の製造方法 |
| JPH0649618B2 (ja) * | 1990-06-14 | 1994-06-29 | 科学技術庁金属材料技術研究所長 | アルミニウムまたはアルミナセラミックスの拡散接合法 |
| JPH04338916A (ja) * | 1990-08-06 | 1992-11-26 | Kyocera Corp | 光アイソレータ用素子及び該光アイソレータ用素子を用いた光アイソレータ，半導体レーザモジュール |
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| KR0137125B1 (ko) * | 1992-11-16 | 1998-06-15 | 모리시타 요이찌 | 광도파로소자와 그 제조방법 |
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| US6836602B2 (en) * | 2001-10-26 | 2004-12-28 | Corning Incorporated | Direct bonding of optical components |
| US20030081906A1 (en) * | 2001-10-26 | 2003-05-01 | Filhaber John F. | Direct bonding of optical components |
| US20030079503A1 (en) * | 2001-10-26 | 2003-05-01 | Cook Glen B. | Direct bonding of glass articles for drawing |
| US6814833B2 (en) * | 2001-10-26 | 2004-11-09 | Corning Incorporated | Direct bonding of articles containing silicon |
| US6791748B2 (en) * | 2002-05-02 | 2004-09-14 | Corning Incorporated | Optical isolators and methods of manufacture |
| US6950235B2 (en) * | 2002-05-02 | 2005-09-27 | Corning Incorporated | Optical isolators and methods of manufacture |
-
2002
- 2002-04-08 US US10/118,780 patent/US20030188553A1/en not_active Abandoned
-
2003
- 2003-03-24 AU AU2003222071A patent/AU2003222071A1/en not_active Abandoned
- 2003-03-24 CA CA002481571A patent/CA2481571A1/en not_active Abandoned
- 2003-03-24 WO PCT/US2003/009149 patent/WO2003087006A1/en not_active Ceased
- 2003-03-24 CN CNB038106906A patent/CN100344567C/zh not_active Expired - Fee Related
- 2003-03-24 JP JP2003583966A patent/JP2005522400A/ja active Pending
- 2003-03-24 EP EP03718056A patent/EP1492738A1/en not_active Withdrawn
- 2003-03-24 KR KR10-2004-7015985A patent/KR20040108705A/ko not_active Withdrawn
- 2003-04-08 TW TW092108467A patent/TWI302525B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| CN100344567C (zh) | 2007-10-24 |
| TW200406363A (en) | 2004-05-01 |
| JP2005522400A (ja) | 2005-07-28 |
| AU2003222071A1 (en) | 2003-10-27 |
| CN1653014A (zh) | 2005-08-10 |
| KR20040108705A (ko) | 2004-12-24 |
| EP1492738A1 (en) | 2005-01-05 |
| TWI302525B (en) | 2008-11-01 |
| US20030188553A1 (en) | 2003-10-09 |
| WO2003087006A1 (en) | 2003-10-23 |
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| Date | Code | Title | Description |
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| FZDE | Discontinued |