CA2377208A1 - Methode et appareil d'enregistrement de reseaux optiques sur un support photosensible - Google Patents

Methode et appareil d'enregistrement de reseaux optiques sur un support photosensible Download PDF

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Publication number
CA2377208A1
CA2377208A1 CA 2377208 CA2377208A CA2377208A1 CA 2377208 A1 CA2377208 A1 CA 2377208A1 CA 2377208 CA2377208 CA 2377208 CA 2377208 A CA2377208 A CA 2377208A CA 2377208 A1 CA2377208 A1 CA 2377208A1
Authority
CA
Canada
Prior art keywords
light beam
phase mask
moving
photosensitive medium
curvature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA 2377208
Other languages
English (en)
Inventor
Yves Painchaud
Alain Mailloux
Helene Chotard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teraxion Inc
Original Assignee
Teraxion Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CA002358659A external-priority patent/CA2358659A1/fr
Application filed by Teraxion Inc filed Critical Teraxion Inc
Priority to CA 2377208 priority Critical patent/CA2377208A1/fr
Priority to PCT/CA2002/001147 priority patent/WO2003032038A1/fr
Publication of CA2377208A1 publication Critical patent/CA2377208A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02152—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating involving moving the fibre or a manufacturing element, stretching of the fibre
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02133—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference
    • G02B6/02138—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference based on illuminating a phase mask
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12173—Masking

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
CA 2377208 2001-10-09 2002-03-18 Methode et appareil d'enregistrement de reseaux optiques sur un support photosensible Abandoned CA2377208A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CA 2377208 CA2377208A1 (fr) 2001-10-09 2002-03-18 Methode et appareil d'enregistrement de reseaux optiques sur un support photosensible
PCT/CA2002/001147 WO2003032038A1 (fr) 2001-10-09 2002-07-23 Procede et appareil d'enregistrement d'un reseau optique sur un support photosensible

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CA2,358,659 2001-10-09
CA002358659A CA2358659A1 (fr) 2001-10-09 2001-10-09 Technique d'ecriture de reseaux de bragg par controle des franges
CA 2377208 CA2377208A1 (fr) 2001-10-09 2002-03-18 Methode et appareil d'enregistrement de reseaux optiques sur un support photosensible

Publications (1)

Publication Number Publication Date
CA2377208A1 true CA2377208A1 (fr) 2003-04-09

Family

ID=25682750

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2377208 Abandoned CA2377208A1 (fr) 2001-10-09 2002-03-18 Methode et appareil d'enregistrement de reseaux optiques sur un support photosensible

Country Status (2)

Country Link
CA (1) CA2377208A1 (fr)
WO (1) WO2003032038A1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102692829B (zh) * 2011-03-25 2014-08-20 上海微电子装备有限公司 基于双光源多周期标记的对准方法及对准系统
CN103777467B (zh) * 2012-10-19 2016-07-06 上海微电子装备有限公司 一种套刻误差测量装置及方法
EP2948818B1 (fr) 2013-01-22 2020-07-01 ASML Netherlands B.V. Pince électrostatique
CN104345577B (zh) * 2013-08-09 2017-04-05 上海微电子装备有限公司 对准装置
CN104345579B (zh) * 2013-08-09 2017-06-27 上海微电子装备有限公司 无掩模曝光设备及其信号回馈控制方法
CN104777715B (zh) * 2014-01-10 2017-03-29 上海微电子装备有限公司 一种测量光刻机垂向测量系统反射镜面形的方法
US9612531B2 (en) * 2014-03-21 2017-04-04 Taiwan Semiconductor Manufacturing Company, Ltd. Method of fabricating an integrated circuit with enhanced defect repairability
CN104932204B (zh) * 2014-03-19 2017-08-25 北大方正集团有限公司 光刻机曝光参数的获取方法
EP3167316B1 (fr) * 2014-07-11 2021-02-17 National Research Council of Canada Formation d'un réseau optique avec un appareil produisant un motif d'interférence réglable
CN104375389A (zh) * 2014-10-13 2015-02-25 江苏影速光电技术有限公司 一种多工件台协作直写光刻方法
CN104375391B (zh) * 2014-12-10 2016-08-31 志圣科技（广州）有限公司 一种光刻机的控制方法及装置
CN105487345A (zh) * 2016-01-14 2016-04-13 哈尔滨工业大学 基于电制冷片的动磁钢磁浮双工件台矢量圆弧换台方法及装置
CN105739247B (zh) * 2016-02-25 2018-07-03 中国科学技术大学 一种纳米压印设备
CN106527054B (zh) * 2016-11-28 2018-03-13 京东方科技集团股份有限公司 一种曝光设备及曝光方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5363239A (en) * 1992-12-23 1994-11-08 At&T Bell Laboratories Method for forming spatially-varying distributed Bragg reflectors in optical media
GB9722550D0 (en) * 1997-10-24 1997-12-24 Univ Southampton Fabrication of optical waveguide gratings
US6130973A (en) * 1998-03-26 2000-10-10 Institut National D'optique Method and apparatus for spectrally designing all-fiber filters
JP2002523800A (ja) * 1998-08-19 2002-07-30 サムスン エレクトロニクス カンパニー リミテッド 長周期光ファイバ格子製造装置及びこれを用いた二つのバンドの長周期光ファイバ格子製造装置
CA2346475A1 (fr) * 1998-10-30 2000-05-11 Vikram Bhatia Accord en frequence de reseaux de diffraction photo-induits

Also Published As

Publication number Publication date
WO2003032038A1 (fr) 2003-04-17

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