CA2359657C - Microsensor housing - Google Patents
Microsensor housing Download PDFInfo
- Publication number
- CA2359657C CA2359657C CA002359657A CA2359657A CA2359657C CA 2359657 C CA2359657 C CA 2359657C CA 002359657 A CA002359657 A CA 002359657A CA 2359657 A CA2359657 A CA 2359657A CA 2359657 C CA2359657 C CA 2359657C
- Authority
- CA
- Canada
- Prior art keywords
- sensor
- sensing
- fluid
- housing assembly
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012530 fluid Substances 0.000 claims abstract description 41
- 239000012528 membrane Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 4
- 239000000463 material Substances 0.000 claims 1
- 230000004044 response Effects 0.000 description 36
- 230000004888 barrier function Effects 0.000 description 18
- 238000009833 condensation Methods 0.000 description 16
- 230000005494 condensation Effects 0.000 description 16
- 238000013461 design Methods 0.000 description 16
- 239000007789 gas Substances 0.000 description 16
- 239000007788 liquid Substances 0.000 description 14
- 230000035945 sensitivity Effects 0.000 description 14
- 238000012360 testing method Methods 0.000 description 12
- 230000032258 transport Effects 0.000 description 12
- 239000000428 dust Substances 0.000 description 11
- 230000000694 effects Effects 0.000 description 9
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 8
- 239000002245 particle Substances 0.000 description 8
- 238000013459 approach Methods 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 7
- 230000004907 flux Effects 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- 239000004593 Epoxy Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000000443 aerosol Substances 0.000 description 4
- 238000011084 recovery Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000002401 inhibitory effect Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 241000180579 Arca Species 0.000 description 1
- 230000005653 Brownian motion process Effects 0.000 description 1
- 125000000635 L-ornithyl group Chemical group [H]N([H])[C@]([H])(C(=O)[*])C([H])([H])C([H])([H])C(N([H])[H])([H])[H] 0.000 description 1
- 241000283984 Rodentia Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005537 brownian motion Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0014—Sample conditioning by eliminating a gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2247—Sampling from a flowing stream of gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
- G01N25/4873—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation for a flowing, e.g. gas sample
- G01N25/488—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N2001/2285—Details of probe structures
Landscapes
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Combustion & Propulsion (AREA)
- Fluid Mechanics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Measuring Volume Flow (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/239,125 US6361206B1 (en) | 1999-01-28 | 1999-01-28 | Microsensor housing |
| US09/239,125 | 1999-01-28 | ||
| PCT/US2000/001987 WO2000045163A2 (en) | 1999-01-28 | 2000-01-27 | Microsensor housing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2359657A1 CA2359657A1 (en) | 2000-08-03 |
| CA2359657C true CA2359657C (en) | 2008-12-02 |
Family
ID=22900721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002359657A Expired - Fee Related CA2359657C (en) | 1999-01-28 | 2000-01-27 | Microsensor housing |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6361206B1 (enExample) |
| EP (1) | EP1149287B1 (enExample) |
| JP (1) | JP2002535675A (enExample) |
| CA (1) | CA2359657C (enExample) |
| DE (1) | DE60002044T2 (enExample) |
| WO (1) | WO2000045163A2 (enExample) |
Families Citing this family (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7258003B2 (en) * | 1998-12-07 | 2007-08-21 | Honeywell International Inc. | Flow sensor with self-aligned flow channel |
| US6322247B1 (en) * | 1999-01-28 | 2001-11-27 | Honeywell International Inc. | Microsensor housing |
| US6911894B2 (en) * | 1998-12-07 | 2005-06-28 | Honeywell International Inc. | Sensor package for harsh environments |
| US7168334B1 (en) * | 2000-05-30 | 2007-01-30 | Gambro Lundia Ab | Arrangement for measuring a property of a fluid present in a tube |
| EP1412722A2 (en) * | 2001-03-23 | 2004-04-28 | Services Petroliers Schlumberger | Fluid property sensors |
| US6838287B2 (en) * | 2001-12-20 | 2005-01-04 | Honeywell International Inc. | Fluid mixture composition sensor |
| US6845664B1 (en) | 2002-10-03 | 2005-01-25 | The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration | MEMS direct chip attach packaging methodologies and apparatuses for harsh environments |
| DE10314705B3 (de) * | 2003-03-31 | 2004-07-01 | Heraeus Sensor Technology Gmbh | Vorrichtung zur Bestimmung der Temperatur eines strömenden Mediums in einer Rohr- oder Schlauchleitung |
| US7131766B2 (en) * | 2003-07-16 | 2006-11-07 | Delphi Technologies, Inc. | Temperature sensor apparatus and method |
| US7003418B2 (en) * | 2003-08-28 | 2006-02-21 | Honeywell International Inc. | Methods and systems for temperature compensation of physical property sensors |
| US7229669B2 (en) * | 2003-11-13 | 2007-06-12 | Honeywell International Inc. | Thin-film deposition methods and apparatuses |
| US7021821B2 (en) * | 2004-05-28 | 2006-04-04 | Honeywell International Inc. | Differential thermal sensors |
| DE102005007872B3 (de) * | 2005-02-21 | 2006-06-22 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren zur Temperaturmessung in einem mikrofluidik Kanal einer Mikrofluidikvorrichtung |
| GB0605683D0 (en) * | 2006-03-21 | 2006-05-03 | Servomex Group Ltd | Thermal conductivity sensor |
| FR2908515B1 (fr) * | 2006-11-09 | 2008-12-26 | Actaris Sas Soc Par Actions Si | Cellule de mesure de la conductivite thermique d'un gaz |
| WO2008113015A1 (en) * | 2007-03-14 | 2008-09-18 | Entegris, Inc. | System and method for non-intrusive thermal monitor |
| US20080250854A1 (en) * | 2007-04-12 | 2008-10-16 | Junhua Ding | Mass flow device using a flow equalizer for improving the output response |
| GB0720905D0 (en) * | 2007-10-25 | 2007-12-05 | Cambridge Entpr Ltd | Shear stress sensors |
| DE102008029793A1 (de) * | 2008-03-19 | 2009-10-01 | Epcos Ag | Messvorrichtung |
| US7748268B2 (en) * | 2008-07-13 | 2010-07-06 | Brooks Instrument, Llc | Thermal flow meter |
| DE102009056331B4 (de) * | 2009-12-01 | 2014-10-16 | Continental Automotive Gmbh | Wasserstoffsensor sowie Erfassungsverfahren einer Wasserstoffkonzentration |
| US9146143B2 (en) * | 2010-08-17 | 2015-09-29 | Sensirion Ag | Flow sensor arrangement |
| EP2527799B1 (en) * | 2011-05-25 | 2020-03-18 | Sensirion AG | Flow sensor arrangement |
| EP2645091B1 (en) * | 2012-03-30 | 2018-10-17 | ams international AG | Integrated circuit comprising a gas sensor |
| DE102013101203A1 (de) * | 2013-02-07 | 2014-08-07 | Sick Ag | Sensor |
| US9176089B2 (en) | 2013-03-29 | 2015-11-03 | Stmicroelectronics Pte Ltd. | Integrated multi-sensor module |
| US9618653B2 (en) * | 2013-03-29 | 2017-04-11 | Stmicroelectronics Pte Ltd. | Microelectronic environmental sensing module |
| JP6099094B2 (ja) * | 2013-06-21 | 2017-03-22 | 日立オートモティブシステムズ株式会社 | ガスセンサ装置およびガスセンサ装置の取付け構造 |
| DE102013015218A1 (de) * | 2013-09-13 | 2015-03-19 | Hella Kgaa Hueck & Co. | Gassensor und Kraftfahrzeug mit einem Gassensor |
| US9347307B2 (en) * | 2013-10-08 | 2016-05-24 | Halliburton Energy Services, Inc. | Assembly for measuring temperature of materials flowing through tubing in a well system |
| US9976409B2 (en) | 2013-10-08 | 2018-05-22 | Halliburton Energy Services, Inc. | Assembly for measuring temperature of materials flowing through tubing in a well system |
| US9770196B2 (en) * | 2013-11-27 | 2017-09-26 | Universiteit Gent | Sensing of components in liquids |
| GB201421102D0 (en) * | 2014-11-27 | 2015-01-14 | Cambridge Entpr Ltd | Thermal conductivity sensing device, methods for operation and uses of the same |
| US9945800B2 (en) * | 2015-07-23 | 2018-04-17 | Caterpillar Inc. | Fuel gas composition sensing system |
| DE102017002308A1 (de) * | 2016-03-25 | 2017-09-28 | Ngk Insulators, Ltd. | Sensorelement, herstellungsverfahren dafür und gassensor |
| CN109073582B (zh) * | 2016-05-23 | 2020-10-27 | 日立汽车系统株式会社 | 湿度测量装置 |
| US10429330B2 (en) | 2016-07-18 | 2019-10-01 | Stmicroelectronics Pte Ltd | Gas analyzer that detects gases, humidity, and temperature |
| US10254261B2 (en) | 2016-07-18 | 2019-04-09 | Stmicroelectronics Pte Ltd | Integrated air quality sensor that detects multiple gas species |
| US10557812B2 (en) | 2016-12-01 | 2020-02-11 | Stmicroelectronics Pte Ltd | Gas sensors |
| DE102018200171B4 (de) * | 2018-01-08 | 2020-04-02 | Audi Ag | Messanordnung zur Bestimmung eines Parameters eines durch einen Fluidströmungskanal strömenden fluiden Mediums sowie Fluidströmungskanal mit einer solchen Messanordnung |
| EP3899445B1 (en) * | 2018-12-20 | 2024-12-25 | Becton, Dickinson And Company | Thermal mass fluid flow sensor |
| US10982985B2 (en) | 2019-03-04 | 2021-04-20 | Hitachi Metals, Ltd. | High flow tubular bypass |
| US11280651B2 (en) * | 2019-03-25 | 2022-03-22 | Flo Technologies, Inc. | Thin film thermal mass flow sensor in fluid applications |
| CN115803617A (zh) * | 2020-07-16 | 2023-03-14 | 松下知识产权经营株式会社 | 物理量测量装置 |
| DE102021212418A1 (de) * | 2021-11-04 | 2023-05-04 | Robert Bosch Gesellschaft mit beschränkter Haftung | Sensor zur Erfassung mindestens einer Eigenschaft eines fluiden Mediums in einem Messraum |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2496806A (en) * | 1946-11-27 | 1950-02-07 | United Aircraft Corp | Gas temperature probe of the thermocouple type |
| US2928279A (en) * | 1955-09-01 | 1960-03-15 | North American Aviation Inc | Stagnation air temperature measuring device |
| US3675489A (en) | 1970-09-18 | 1972-07-11 | Montedison Spa | Apparatus for the drawing of samples of gaseous mixtures to be analyzed |
| US3720093A (en) | 1970-12-03 | 1973-03-13 | Us Navy | Carbon dioxide indicating meter |
| US3881181A (en) * | 1973-02-22 | 1975-04-29 | Rca Corp | Semiconductor temperature sensor |
| US4488414A (en) | 1983-10-03 | 1984-12-18 | Honeywell Inc. | Disc detector assembly |
| JPS60128318A (ja) * | 1983-12-16 | 1985-07-09 | Mitsubishi Heavy Ind Ltd | ガス温度測定装置 |
| US4682503A (en) | 1986-05-16 | 1987-07-28 | Honeywell Inc. | Microscopic size, thermal conductivity type, air or gas absolute pressure sensor |
| US4914742A (en) * | 1987-12-07 | 1990-04-03 | Honeywell Inc. | Thin film orthogonal microsensor for air flow and method |
| JPH0643907B2 (ja) * | 1988-12-15 | 1994-06-08 | 山武ハネウエル株式会社 | 流量計 |
| WO1991004067A1 (en) | 1989-09-23 | 1991-04-04 | The University Court Of The University Of Dundee | A method of and apparatus for monitoring gas |
| US5060514A (en) * | 1989-11-30 | 1991-10-29 | Puritan-Bennett Corporate | Ultrasonic gas measuring device |
| US5177696A (en) * | 1989-12-28 | 1993-01-05 | Honeywell Inc. | Method of determination of gas properties at reference conditions |
| US5081866A (en) * | 1990-05-30 | 1992-01-21 | Yamatake-Honeywell Co., Ltd. | Respiratory air flowmeter |
| US5056362A (en) * | 1990-07-25 | 1991-10-15 | Siemens Automotive L.P. | Strengthening a silicon micromachined mass air flow sensor in the region of its hot element |
| US5303167A (en) * | 1991-03-08 | 1994-04-12 | Honeywell Inc. | Absolute pressure sensor and method |
| US5220830A (en) * | 1991-07-09 | 1993-06-22 | Honeywell Inc. | Compact gas flow meter using electronic microsensors |
| US5249462A (en) * | 1991-07-09 | 1993-10-05 | Honeywell Inc. | Safe channel design for flow sensor chip microbridges |
| DE4218379C2 (de) | 1992-06-04 | 1995-04-13 | Dirk Tillich | Vorrichtung zur Trennung von Schwebestoffen in strömenden Flüssigkeiten |
| US5279155A (en) * | 1993-02-04 | 1994-01-18 | Honeywell, Inc. | Mass airflow sensor |
| IL109388A0 (en) * | 1993-04-29 | 1994-07-31 | Rosemount Aerospace Inc | Temperature sensor with integral debris guard |
| DE4324659C1 (de) | 1993-07-22 | 1995-04-06 | Siemens Ag | Sensor mit einem in einem Gehäuse angeordneten Sensorelement |
| US5653538A (en) * | 1995-06-07 | 1997-08-05 | Rosemount Aerospace Inc. | Total temperature probe |
| EP0882978A1 (en) | 1997-06-04 | 1998-12-09 | STMicroelectronics S.r.l. | Integrated semi-conductor device comprising a chemoresistive gas microsensor and manufacturing process thereof |
| US6184773B1 (en) * | 1998-12-07 | 2001-02-06 | Honeywell Inc. | Rugged fluid flow and property microsensor |
| US6178811B1 (en) * | 1999-03-11 | 2001-01-30 | Honeywell International Inc. | Quasi-static viscometer |
-
1999
- 1999-01-28 US US09/239,125 patent/US6361206B1/en not_active Expired - Lifetime
-
2000
- 2000-01-27 CA CA002359657A patent/CA2359657C/en not_active Expired - Fee Related
- 2000-01-27 EP EP00908384A patent/EP1149287B1/en not_active Expired - Lifetime
- 2000-01-27 JP JP2000596365A patent/JP2002535675A/ja active Pending
- 2000-01-27 DE DE60002044T patent/DE60002044T2/de not_active Expired - Lifetime
- 2000-01-27 WO PCT/US2000/001987 patent/WO2000045163A2/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP1149287B1 (en) | 2003-04-09 |
| EP1149287A1 (en) | 2001-10-31 |
| JP2002535675A (ja) | 2002-10-22 |
| US6361206B1 (en) | 2002-03-26 |
| DE60002044D1 (de) | 2003-05-15 |
| CA2359657A1 (en) | 2000-08-03 |
| DE60002044T2 (de) | 2003-12-04 |
| WO2000045163A3 (en) | 2000-12-14 |
| WO2000045163A2 (en) | 2000-08-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |
Effective date: 20200127 |