DE60002044T2 - Sensorgehäuse - Google Patents

Sensorgehäuse

Info

Publication number
DE60002044T2
DE60002044T2 DE60002044T DE60002044T DE60002044T2 DE 60002044 T2 DE60002044 T2 DE 60002044T2 DE 60002044 T DE60002044 T DE 60002044T DE 60002044 T DE60002044 T DE 60002044T DE 60002044 T2 DE60002044 T2 DE 60002044T2
Authority
DE
Germany
Prior art keywords
sensor
fluid
housing according
baffle plate
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60002044T
Other languages
German (de)
English (en)
Other versions
DE60002044D1 (de
Inventor
Ulrich Bonne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of DE60002044D1 publication Critical patent/DE60002044D1/de
Application granted granted Critical
Publication of DE60002044T2 publication Critical patent/DE60002044T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011—Sample conditioning
    • G01N33/0014—Sample conditioning by eliminating a gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2247—Sampling from a flowing stream of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
    • G01N25/4873—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation for a flowing, e.g. gas sample
    • G01N25/488—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N2001/2285—Details of probe structures

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Combustion & Propulsion (AREA)
  • Fluid Mechanics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Measuring Volume Flow (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
DE60002044T 1999-01-28 2000-01-27 Sensorgehäuse Expired - Lifetime DE60002044T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/239,125 US6361206B1 (en) 1999-01-28 1999-01-28 Microsensor housing
PCT/US2000/001987 WO2000045163A2 (en) 1999-01-28 2000-01-27 Microsensor housing

Publications (2)

Publication Number Publication Date
DE60002044D1 DE60002044D1 (de) 2003-05-15
DE60002044T2 true DE60002044T2 (de) 2003-12-04

Family

ID=22900721

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60002044T Expired - Lifetime DE60002044T2 (de) 1999-01-28 2000-01-27 Sensorgehäuse

Country Status (6)

Country Link
US (1) US6361206B1 (enExample)
EP (1) EP1149287B1 (enExample)
JP (1) JP2002535675A (enExample)
CA (1) CA2359657C (enExample)
DE (1) DE60002044T2 (enExample)
WO (1) WO2000045163A2 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005007872B3 (de) * 2005-02-21 2006-06-22 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren zur Temperaturmessung in einem mikrofluidik Kanal einer Mikrofluidikvorrichtung
DE102013015218A1 (de) * 2013-09-13 2015-03-19 Hella Kgaa Hueck & Co. Gassensor und Kraftfahrzeug mit einem Gassensor
DE102018200171A1 (de) * 2018-01-08 2019-07-11 Audi Ag Messanordnung zur Bestimmung eines Parameters eines durch einen Fluidströmungskanal strömenden fluiden Mediums sowie Fluidströmungskanal mit einer solchen Messanordnung
WO2023078716A1 (de) * 2021-11-04 2023-05-11 Robert Bosch Gmbh Sensor zur erfassung mindestens einer eigenschaft eines fluiden mediums in einem messraum

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US6322247B1 (en) * 1999-01-28 2001-11-27 Honeywell International Inc. Microsensor housing
US6911894B2 (en) * 1998-12-07 2005-06-28 Honeywell International Inc. Sensor package for harsh environments
US7168334B1 (en) * 2000-05-30 2007-01-30 Gambro Lundia Ab Arrangement for measuring a property of a fluid present in a tube
EP1412722A2 (en) * 2001-03-23 2004-04-28 Services Petroliers Schlumberger Fluid property sensors
US6838287B2 (en) * 2001-12-20 2005-01-04 Honeywell International Inc. Fluid mixture composition sensor
US6845664B1 (en) 2002-10-03 2005-01-25 The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration MEMS direct chip attach packaging methodologies and apparatuses for harsh environments
DE10314705B3 (de) * 2003-03-31 2004-07-01 Heraeus Sensor Technology Gmbh Vorrichtung zur Bestimmung der Temperatur eines strömenden Mediums in einer Rohr- oder Schlauchleitung
US7131766B2 (en) * 2003-07-16 2006-11-07 Delphi Technologies, Inc. Temperature sensor apparatus and method
US7003418B2 (en) * 2003-08-28 2006-02-21 Honeywell International Inc. Methods and systems for temperature compensation of physical property sensors
US7229669B2 (en) * 2003-11-13 2007-06-12 Honeywell International Inc. Thin-film deposition methods and apparatuses
US7021821B2 (en) * 2004-05-28 2006-04-04 Honeywell International Inc. Differential thermal sensors
GB0605683D0 (en) * 2006-03-21 2006-05-03 Servomex Group Ltd Thermal conductivity sensor
FR2908515B1 (fr) * 2006-11-09 2008-12-26 Actaris Sas Soc Par Actions Si Cellule de mesure de la conductivite thermique d'un gaz
WO2008113015A1 (en) * 2007-03-14 2008-09-18 Entegris, Inc. System and method for non-intrusive thermal monitor
US20080250854A1 (en) * 2007-04-12 2008-10-16 Junhua Ding Mass flow device using a flow equalizer for improving the output response
GB0720905D0 (en) * 2007-10-25 2007-12-05 Cambridge Entpr Ltd Shear stress sensors
DE102008029793A1 (de) * 2008-03-19 2009-10-01 Epcos Ag Messvorrichtung
US7748268B2 (en) * 2008-07-13 2010-07-06 Brooks Instrument, Llc Thermal flow meter
DE102009056331B4 (de) * 2009-12-01 2014-10-16 Continental Automotive Gmbh Wasserstoffsensor sowie Erfassungsverfahren einer Wasserstoffkonzentration
US9146143B2 (en) * 2010-08-17 2015-09-29 Sensirion Ag Flow sensor arrangement
EP2527799B1 (en) * 2011-05-25 2020-03-18 Sensirion AG Flow sensor arrangement
EP2645091B1 (en) * 2012-03-30 2018-10-17 ams international AG Integrated circuit comprising a gas sensor
DE102013101203A1 (de) * 2013-02-07 2014-08-07 Sick Ag Sensor
US9176089B2 (en) 2013-03-29 2015-11-03 Stmicroelectronics Pte Ltd. Integrated multi-sensor module
US9618653B2 (en) * 2013-03-29 2017-04-11 Stmicroelectronics Pte Ltd. Microelectronic environmental sensing module
JP6099094B2 (ja) * 2013-06-21 2017-03-22 日立オートモティブシステムズ株式会社 ガスセンサ装置およびガスセンサ装置の取付け構造
US9347307B2 (en) * 2013-10-08 2016-05-24 Halliburton Energy Services, Inc. Assembly for measuring temperature of materials flowing through tubing in a well system
US9976409B2 (en) 2013-10-08 2018-05-22 Halliburton Energy Services, Inc. Assembly for measuring temperature of materials flowing through tubing in a well system
US9770196B2 (en) * 2013-11-27 2017-09-26 Universiteit Gent Sensing of components in liquids
GB201421102D0 (en) * 2014-11-27 2015-01-14 Cambridge Entpr Ltd Thermal conductivity sensing device, methods for operation and uses of the same
US9945800B2 (en) * 2015-07-23 2018-04-17 Caterpillar Inc. Fuel gas composition sensing system
DE102017002308A1 (de) * 2016-03-25 2017-09-28 Ngk Insulators, Ltd. Sensorelement, herstellungsverfahren dafür und gassensor
CN109073582B (zh) * 2016-05-23 2020-10-27 日立汽车系统株式会社 湿度测量装置
US10429330B2 (en) 2016-07-18 2019-10-01 Stmicroelectronics Pte Ltd Gas analyzer that detects gases, humidity, and temperature
US10254261B2 (en) 2016-07-18 2019-04-09 Stmicroelectronics Pte Ltd Integrated air quality sensor that detects multiple gas species
US10557812B2 (en) 2016-12-01 2020-02-11 Stmicroelectronics Pte Ltd Gas sensors
EP3899445B1 (en) * 2018-12-20 2024-12-25 Becton, Dickinson And Company Thermal mass fluid flow sensor
US10982985B2 (en) 2019-03-04 2021-04-20 Hitachi Metals, Ltd. High flow tubular bypass
US11280651B2 (en) * 2019-03-25 2022-03-22 Flo Technologies, Inc. Thin film thermal mass flow sensor in fluid applications
CN115803617A (zh) * 2020-07-16 2023-03-14 松下知识产权经营株式会社 物理量测量装置

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005007872B3 (de) * 2005-02-21 2006-06-22 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren zur Temperaturmessung in einem mikrofluidik Kanal einer Mikrofluidikvorrichtung
DE102013015218A1 (de) * 2013-09-13 2015-03-19 Hella Kgaa Hueck & Co. Gassensor und Kraftfahrzeug mit einem Gassensor
US9372102B2 (en) 2013-09-13 2016-06-21 Hella Kgaa Hueck & Co. Gas sensor and motor vehicle with a gas sensor
DE102018200171A1 (de) * 2018-01-08 2019-07-11 Audi Ag Messanordnung zur Bestimmung eines Parameters eines durch einen Fluidströmungskanal strömenden fluiden Mediums sowie Fluidströmungskanal mit einer solchen Messanordnung
DE102018200171B4 (de) * 2018-01-08 2020-04-02 Audi Ag Messanordnung zur Bestimmung eines Parameters eines durch einen Fluidströmungskanal strömenden fluiden Mediums sowie Fluidströmungskanal mit einer solchen Messanordnung
US11385142B2 (en) 2018-01-08 2022-07-12 Audi Ag Measuring arrangement for determining a parameter of a fluid medium flowing through a fluid flow channel and fluid flow channel having such a measuring arrangement
WO2023078716A1 (de) * 2021-11-04 2023-05-11 Robert Bosch Gmbh Sensor zur erfassung mindestens einer eigenschaft eines fluiden mediums in einem messraum

Also Published As

Publication number Publication date
EP1149287B1 (en) 2003-04-09
EP1149287A1 (en) 2001-10-31
JP2002535675A (ja) 2002-10-22
US6361206B1 (en) 2002-03-26
DE60002044D1 (de) 2003-05-15
CA2359657A1 (en) 2000-08-03
CA2359657C (en) 2008-12-02
WO2000045163A3 (en) 2000-12-14
WO2000045163A2 (en) 2000-08-03

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