CA2078940A1 - Compound semiconductor device - Google Patents
Compound semiconductor deviceInfo
- Publication number
- CA2078940A1 CA2078940A1 CA 2078940 CA2078940A CA2078940A1 CA 2078940 A1 CA2078940 A1 CA 2078940A1 CA 2078940 CA2078940 CA 2078940 CA 2078940 A CA2078940 A CA 2078940A CA 2078940 A1 CA2078940 A1 CA 2078940A1
- Authority
- CA
- Canada
- Prior art keywords
- semiconductor layer
- layer
- doped semiconductor
- undoped
- cap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Junction Field-Effect Transistors (AREA)
Abstract
A compound semiconductor device includes an undoped semiconductor layer; a doped semiconductor layer formed on the undoped semiconductor layer and having smaller electron affinity than the undoped semiconductor layer; a gate electrode formed on the doped semiconductor layer; a cap layer formed on the doped semiconductor layer; and a source electrode and a drain electrode respectively formed on the cap layer. In the device, an undoped-material layer having greater electron affinity than the doped semiconductor layer and the cap layer, is formed between the doped semiconductor layer and the cap layer. A layer which has the same composition and impurities as those of the doped semiconductor layer and whose impurity concentration is sufficiently higher than an impurity concentration of the doped semiconductor layer may, be provided between the doped semiconductor layer and the cap layer.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31182891A JPH05121455A (en) | 1991-10-29 | 1991-10-29 | Compound semiconductor device |
JPHEI3-311828 | 1991-10-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2078940A1 true CA2078940A1 (en) | 1993-04-30 |
CA2078940C CA2078940C (en) | 1996-11-12 |
Family
ID=18021893
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA 2078940 Expired - Fee Related CA2078940C (en) | 1991-10-29 | 1992-09-23 | Compound semiconductor device |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH05121455A (en) |
CA (1) | CA2078940C (en) |
-
1991
- 1991-10-29 JP JP31182891A patent/JPH05121455A/en active Pending
-
1992
- 1992-09-23 CA CA 2078940 patent/CA2078940C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH05121455A (en) | 1993-05-18 |
CA2078940C (en) | 1996-11-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |