CA2064324A1 - Pompe cryogenique - Google Patents
Pompe cryogeniqueInfo
- Publication number
- CA2064324A1 CA2064324A1 CA 2064324 CA2064324A CA2064324A1 CA 2064324 A1 CA2064324 A1 CA 2064324A1 CA 2064324 CA2064324 CA 2064324 CA 2064324 A CA2064324 A CA 2064324A CA 2064324 A1 CA2064324 A1 CA 2064324A1
- Authority
- CA
- Canada
- Prior art keywords
- refrigerator
- pump section
- heat transfer
- cryopanel
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000012546 transfer Methods 0.000 claims abstract description 91
- 238000001816 cooling Methods 0.000 claims abstract description 20
- 239000000463 material Substances 0.000 claims abstract description 17
- 238000007789 sealing Methods 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 229910010272 inorganic material Inorganic materials 0.000 claims description 3
- 239000011147 inorganic material Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 49
- 239000001307 helium Substances 0.000 description 32
- 229910052734 helium Inorganic materials 0.000 description 32
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 32
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 25
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 12
- 229910052802 copper Inorganic materials 0.000 description 12
- 239000010949 copper Substances 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 238000011109 contamination Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 239000011882 ultra-fine particle Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000005219 brazing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
- 238000009941 weaving Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6486291 | 1991-03-28 | ||
| JP3-64862 | 1991-03-28 | ||
| JP4-41092 | 1992-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2064324A1 true CA2064324A1 (fr) | 1992-09-29 |
Family
ID=13270404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA 2064324 Abandoned CA2064324A1 (fr) | 1991-03-28 | 1992-03-27 | Pompe cryogenique |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2795031B2 (fr) |
| CA (1) | CA2064324A1 (fr) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100706818B1 (ko) * | 2005-11-07 | 2007-04-12 | 박병직 | 크라이오 펌프 |
| JP2007309184A (ja) * | 2006-05-17 | 2007-11-29 | Sumitomo Heavy Ind Ltd | クライオポンプ及びその再生方法 |
| US9032741B2 (en) | 2009-11-09 | 2015-05-19 | Sumitomo Heavy Industries, Ltd. | Cryopump and vacuum pumping method |
| JP5553638B2 (ja) | 2010-02-19 | 2014-07-16 | 住友重機械工業株式会社 | コールドトラップ、及び真空排気装置 |
| CN112601889B (zh) * | 2018-09-06 | 2023-02-28 | 住友重机械工业株式会社 | 低温泵 |
-
1992
- 1992-02-27 JP JP4109292A patent/JP2795031B2/ja not_active Expired - Fee Related
- 1992-03-27 CA CA 2064324 patent/CA2064324A1/fr not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0565874A (ja) | 1993-03-19 |
| JP2795031B2 (ja) | 1998-09-10 |
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| Hands | Cryopumping |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Dead |