CA2015524A1 - Fenetre propre pour enceinte de traitement - Google Patents
Fenetre propre pour enceinte de traitementInfo
- Publication number
- CA2015524A1 CA2015524A1 CA002015524A CA2015524A CA2015524A1 CA 2015524 A1 CA2015524 A1 CA 2015524A1 CA 002015524 A CA002015524 A CA 002015524A CA 2015524 A CA2015524 A CA 2015524A CA 2015524 A1 CA2015524 A1 CA 2015524A1
- Authority
- CA
- Canada
- Prior art keywords
- window
- gas
- wall
- enclosure
- porous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000012545 processing Methods 0.000 title abstract description 27
- 238000010926 purge Methods 0.000 claims abstract description 10
- 239000007789 gas Substances 0.000 claims description 99
- 239000000463 material Substances 0.000 claims description 33
- 230000007246 mechanism Effects 0.000 claims description 17
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 12
- 239000001307 helium Substances 0.000 claims description 8
- 229910052734 helium Inorganic materials 0.000 claims description 8
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 3
- 239000010980 sapphire Substances 0.000 claims description 3
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 claims description 2
- 239000005357 flat glass Substances 0.000 claims description 2
- 239000005297 pyrex Substances 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- UKUVVAMSXXBMRX-UHFFFAOYSA-N 2,4,5-trithia-1,3-diarsabicyclo[1.1.1]pentane Chemical compound S1[As]2S[As]1S2 UKUVVAMSXXBMRX-UHFFFAOYSA-N 0.000 claims 1
- 229940052288 arsenic trisulfide Drugs 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 230000002459 sustained effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 18
- 239000000843 powder Substances 0.000 description 15
- 239000002184 metal Substances 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000013618 particulate matter Substances 0.000 description 8
- 239000007921 spray Substances 0.000 description 7
- 239000006227 byproduct Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 239000010419 fine particle Substances 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 238000009689 gas atomisation Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 239000011236 particulate material Substances 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 239000010963 304 stainless steel Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 2
- 229910001338 liquidmetal Inorganic materials 0.000 description 2
- 238000010128 melt processing Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000007712 rapid solidification Methods 0.000 description 2
- 239000000779 smoke Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- XDXHAEQXIBQUEZ-UHFFFAOYSA-N Ropinirole hydrochloride Chemical compound Cl.CCCN(CCC)CCC1=CC=CC2=C1CC(=O)N2 XDXHAEQXIBQUEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000004035 construction material Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 238000003913 materials processing Methods 0.000 description 1
- 239000012768 molten material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000009718 spray deposition Methods 0.000 description 1
- 238000013517 stratification Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B17/00—Methods preventing fouling
- B08B17/02—Preventing deposition of fouling or of dust
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
- F27D21/02—Observation or illuminating devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/16—Introducing a fluid jet or current into the charge
- F27D2003/161—Introducing a fluid jet or current into the charge through a porous element
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D25/00—Devices or methods for removing incrustations, e.g. slag, metal deposits, dust; Devices or methods for preventing the adherence of slag
- F27D25/008—Devices or methods for removing incrustations, e.g. slag, metal deposits, dust; Devices or methods for preventing the adherence of slag using fluids or gases, e.g. blowers, suction units
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Thermally Insulated Containers For Foods (AREA)
- Filling Of Jars Or Cans And Processes For Cleaning And Sealing Jars (AREA)
- Devices For Use In Laboratory Experiments (AREA)
- Aerodynamic Tests, Hydrodynamic Tests, Wind Tunnels, And Water Tanks (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US39005289A | 1989-08-07 | 1989-08-07 | |
| US390,052 | 1989-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2015524A1 true CA2015524A1 (fr) | 1991-02-07 |
Family
ID=23540836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002015524A Abandoned CA2015524A1 (fr) | 1989-08-07 | 1990-04-26 | Fenetre propre pour enceinte de traitement |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPH03100290A (fr) |
| AU (1) | AU5704290A (fr) |
| CA (1) | CA2015524A1 (fr) |
| FR (1) | FR2650516A1 (fr) |
| GB (1) | GB2235548A (fr) |
| IT (1) | IT1246433B (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9417122B2 (en) | 2012-06-15 | 2016-08-16 | Empire Technology Development Llc | Self-cleaning lens |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5821428A (en) * | 1995-08-11 | 1998-10-13 | Koch Enterprises, Inc. | Sealed observation element for sulfur recovery unit |
| CN103913072B (zh) * | 2014-04-09 | 2016-01-20 | 宝钢工程技术集团有限公司 | 一种自清洁观察窗装置 |
| US10269599B2 (en) * | 2014-06-20 | 2019-04-23 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor manufacturing apparatus |
| CN104729311B (zh) * | 2015-04-10 | 2017-02-01 | 核工业理化工程研究院 | 应用于真空系统的吹气保护观察窗 |
| CN105312272A (zh) * | 2015-12-07 | 2016-02-10 | 南通星球石墨设备有限公司 | 一种hcl合成炉视镜自动清洗装置 |
| CN107560447A (zh) * | 2017-09-14 | 2018-01-09 | 宁波鑫利成真空科技有限公司 | 一种快门式真空炉观察窗 |
| CN108444306B (zh) * | 2018-03-16 | 2019-08-09 | 株洲稀美泰材料有限责任公司 | 用于观察金属熔炼过程的观察窗 |
| SE2250434A1 (en) * | 2022-04-05 | 2023-10-06 | Teksic Ab | Viewport protection system |
-
1990
- 1990-04-26 CA CA002015524A patent/CA2015524A1/fr not_active Abandoned
- 1990-06-08 AU AU57042/90A patent/AU5704290A/en not_active Abandoned
- 1990-06-28 FR FR9008154A patent/FR2650516A1/fr not_active Withdrawn
- 1990-07-05 GB GB9014915A patent/GB2235548A/en not_active Withdrawn
- 1990-07-06 JP JP2177640A patent/JPH03100290A/ja active Pending
- 1990-08-07 IT IT02123690A patent/IT1246433B/it active IP Right Grant
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9417122B2 (en) | 2012-06-15 | 2016-08-16 | Empire Technology Development Llc | Self-cleaning lens |
Also Published As
| Publication number | Publication date |
|---|---|
| IT9021236A0 (it) | 1990-08-07 |
| IT9021236A1 (it) | 1992-02-07 |
| GB2235548A (en) | 1991-03-06 |
| JPH03100290A (ja) | 1991-04-25 |
| FR2650516A1 (fr) | 1991-02-08 |
| GB9014915D0 (en) | 1990-08-22 |
| AU5704290A (en) | 1991-02-07 |
| IT1246433B (it) | 1994-11-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Discontinued |