CA1332782C - Reacteur a lit fluidise a zone chauffante annulaire - Google Patents

Reacteur a lit fluidise a zone chauffante annulaire

Info

Publication number
CA1332782C
CA1332782C CA 595278 CA595278A CA1332782C CA 1332782 C CA1332782 C CA 1332782C CA 595278 CA595278 CA 595278 CA 595278 A CA595278 A CA 595278A CA 1332782 C CA1332782 C CA 1332782C
Authority
CA
Canada
Prior art keywords
annulus
fluidized bed
heating zone
particles
reaction zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA 595278
Other languages
English (en)
Inventor
Richard Andrew Van Slooten
Ravi Prasad
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Silicon Materials LLC
Original Assignee
Advanced Silicon Materials LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Silicon Materials LLC filed Critical Advanced Silicon Materials LLC
Application granted granted Critical
Publication of CA1332782C publication Critical patent/CA1332782C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/18Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
    • B01J8/24Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique
    • B01J8/38Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique with fluidised bed containing a rotatable device or being subject to rotation or to a circulatory movement, i.e. leaving a vessel and subsequently re-entering it
    • B01J8/384Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique with fluidised bed containing a rotatable device or being subject to rotation or to a circulatory movement, i.e. leaving a vessel and subsequently re-entering it being subject to a circulatory movement only
    • B01J8/386Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique with fluidised bed containing a rotatable device or being subject to rotation or to a circulatory movement, i.e. leaving a vessel and subsequently re-entering it being subject to a circulatory movement only internally, i.e. the particles rotate within the vessel
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/18Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
    • B01J8/1836Heating and cooling the reactor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/18Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
    • B01J8/1845Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles with particles moving upwards while fluidised
    • B01J8/1854Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles with particles moving upwards while fluidised followed by a downward movement inside the reactor to form a loop
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/02Silicon
    • C01B33/021Preparation
    • C01B33/027Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/029Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/02Silicon
    • C01B33/021Preparation
    • C01B33/027Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/03Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008Controlling the process
    • B01J2208/00017Controlling the temperature
    • B01J2208/00106Controlling the temperature by indirect heat exchange
    • B01J2208/00168Controlling the temperature by indirect heat exchange with heat exchange elements outside the bed of solid particles
    • B01J2208/00203Coils
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008Controlling the process
    • B01J2208/00017Controlling the temperature
    • B01J2208/00327Controlling the temperature by direct heat exchange
    • B01J2208/00336Controlling the temperature by direct heat exchange adding a temperature modifying medium to the reactants
    • B01J2208/0038Solids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008Controlling the process
    • B01J2208/00017Controlling the temperature
    • B01J2208/00389Controlling the temperature using electric heating or cooling elements
    • B01J2208/00407Controlling the temperature using electric heating or cooling elements outside the reactor bed
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008Controlling the process
    • B01J2208/00017Controlling the temperature
    • B01J2208/00477Controlling the temperature by thermal insulation means
    • B01J2208/00495Controlling the temperature by thermal insulation means using insulating materials or refractories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008Controlling the process
    • B01J2208/00017Controlling the temperature
    • B01J2208/0053Controlling multiple zones along the direction of flow, e.g. pre-heating and after-cooling

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
  • Silicon Compounds (AREA)
CA 595278 1988-03-31 1989-03-30 Reacteur a lit fluidise a zone chauffante annulaire Expired - Fee Related CA1332782C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17590188A 1988-03-31 1988-03-31
US175,901 1988-03-31

Publications (1)

Publication Number Publication Date
CA1332782C true CA1332782C (fr) 1994-11-01

Family

ID=22642135

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 595278 Expired - Fee Related CA1332782C (fr) 1988-03-31 1989-03-30 Reacteur a lit fluidise a zone chauffante annulaire

Country Status (3)

Country Link
JP (1) JPH0221938A (fr)
CA (1) CA1332782C (fr)
DE (1) DE3910343A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8404206B2 (en) 2008-06-30 2013-03-26 Memc Electronic Materials, Inc. Methods for producing polycrystalline silicon that reduce the deposition of silicon on reactor walls
US8828324B2 (en) 2009-12-29 2014-09-09 Sunedison, Inc. Fluidized bed reactor systems and distributors for use in same

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10063862A1 (de) * 2000-12-21 2002-07-11 Solarworld Ag Verfahren zur Herstellung von hochreinem, granularen Silizium
ATE489333T1 (de) 2005-03-05 2010-12-15 Jssi Gmbh Reaktor und verfahren zur herstellung von silizium
DE102005042753A1 (de) * 2005-09-08 2007-03-15 Wacker Chemie Ag Verfahren und Vorrichtung zur Herstellung von granulatförmigem polykristallinem Silicium in einem Wirbelschichtreaktor
KR100756310B1 (ko) * 2006-02-07 2007-09-07 한국화학연구원 입자형 다결정실리콘 제조용 고압 유동층반응기
KR100661284B1 (ko) * 2006-02-14 2006-12-27 한국화학연구원 유동층 반응기를 이용한 다결정실리콘 제조 방법
KR100783667B1 (ko) * 2006-08-10 2007-12-07 한국화학연구원 입자형 다결정 실리콘의 제조방법 및 제조장치
DE102006042685A1 (de) 2006-09-12 2008-03-27 Wacker Chemie Ag Verfahren und Vorrichtung zur kontaminationsfreien Erwärmung von Gasen
CN101318654B (zh) * 2008-07-04 2010-06-02 清华大学 一种流化床制备高纯度多晶硅颗粒的方法及流化床反应器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3012861A (en) * 1960-01-15 1961-12-12 Du Pont Production of silicon
GB1412033A (en) * 1973-03-02 1975-10-29 Coal Industry Patents Ltd Fluidised bed combustion
JPS5945917A (ja) * 1982-09-02 1984-03-15 Denki Kagaku Kogyo Kk 多結晶シリコンの連続的製法
DE3842099A1 (de) * 1987-12-14 1989-06-22 Union Carbide Corp Wirbelschichtreaktor zur herstellung von polykristallinem silicium

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8404206B2 (en) 2008-06-30 2013-03-26 Memc Electronic Materials, Inc. Methods for producing polycrystalline silicon that reduce the deposition of silicon on reactor walls
US8728574B2 (en) 2008-06-30 2014-05-20 Memc Electronic Materials, Inc. Methods for introducing a first gas and a second gas into a reaction chamber
US8906313B2 (en) 2008-06-30 2014-12-09 Sunedison, Inc. Fluidized bed reactor systems
US8828324B2 (en) 2009-12-29 2014-09-09 Sunedison, Inc. Fluidized bed reactor systems and distributors for use in same

Also Published As

Publication number Publication date
JPH0221938A (ja) 1990-01-24
DE3910343C2 (fr) 1992-11-12
DE3910343A1 (de) 1989-10-12

Similar Documents

Publication Publication Date Title
US4992245A (en) Annular heated fluidized bed reactor
US5165908A (en) Annular heated fluidized bed reactor
US4818495A (en) Reactor for fluidized bed silane decomposition
US5810934A (en) Silicon deposition reactor apparatus
US5374413A (en) Heating of fluidized bed reactor by microwaves
US5382412A (en) Fluidized bed reactor heated by microwaves
US4684513A (en) Zone heating for fluidized bed silane pyrolysis
US5139762A (en) Fluidized bed for production of polycrystalline silicon
US8828324B2 (en) Fluidized bed reactor systems and distributors for use in same
JP5694927B2 (ja) 反応炉壁へのシリコンの析出を低減する流動層反応炉システム及び方法
EP0832312B1 (fr) Procede et appareil de depot de silicium dans un reacteur a lit fluidise
US4906441A (en) Fluidized bed with heated liners and a method for its use
CA1332782C (fr) Reacteur a lit fluidise a zone chauffante annulaire
US4904452A (en) Inner core heating in fluidized bed
US6451277B1 (en) Method of improving the efficiency of a silicon purification process
KR20110037967A (ko) 실리콘 미분의 재순환에 의한 다결정 실리콘 반응로 생산성 향상 방법
JP2711305B2 (ja) 流動床反応器及び方法
US4664944A (en) Deposition method for producing silicon carbide high-temperature semiconductors
JPH0317768B2 (fr)
WO2004013044A1 (fr) Pprocedes permettant de chauffer un appareil de depot de silicium en lit fluidise
CA1336937C (fr) Alliages de silicum perfectionnes
JPH01168333A (ja) 加熱流動床反応器
JPH0230611A (ja) 多結晶シリコンの製造方法及び装置
JPH01239014A (ja) 多結晶シリコンの製造方法及び装置
JPH0386228A (ja) 環状加熱流動床反応器

Legal Events

Date Code Title Description
MKLA Lapsed