CA1305564C - Dispositif de nettoyage de substrat - Google Patents

Dispositif de nettoyage de substrat

Info

Publication number
CA1305564C
CA1305564C CA000615874A CA615874A CA1305564C CA 1305564 C CA1305564 C CA 1305564C CA 000615874 A CA000615874 A CA 000615874A CA 615874 A CA615874 A CA 615874A CA 1305564 C CA1305564 C CA 1305564C
Authority
CA
Canada
Prior art keywords
substrate
gas
electron beam
gas jet
beam irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA000615874A
Other languages
English (en)
Inventor
Hiroki Ito
Teruo Ina
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61165141A external-priority patent/JPS6320450A/ja
Priority claimed from JP62069035A external-priority patent/JPS63235476A/ja
Priority claimed from CA000541974A external-priority patent/CA1294063C/fr
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of CA1305564C publication Critical patent/CA1305564C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

CA000615874A 1986-07-14 1990-09-27 Dispositif de nettoyage de substrat Expired - Fee Related CA1305564C (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP165141/86 1986-07-14
JP61165141A JPS6320450A (ja) 1986-07-14 1986-07-14 基板のクリ−ニング装置
JP62069035A JPS63235476A (ja) 1987-03-25 1987-03-25 化合物薄膜形成装置
JP69035/87 1987-03-25
CA000541974A CA1294063C (fr) 1986-07-14 1987-07-14 Dispositif de deposition en couche mince

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CA000541974A Division CA1294063C (fr) 1986-07-14 1987-07-14 Dispositif de deposition en couche mince

Publications (1)

Publication Number Publication Date
CA1305564C true CA1305564C (fr) 1992-07-21

Family

ID=27167744

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000615874A Expired - Fee Related CA1305564C (fr) 1986-07-14 1990-09-27 Dispositif de nettoyage de substrat

Country Status (1)

Country Link
CA (1) CA1305564C (fr)

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