CA1299188C - Diarylnitrones - Google Patents

Diarylnitrones

Info

Publication number
CA1299188C
CA1299188C CA000561102A CA561102A CA1299188C CA 1299188 C CA1299188 C CA 1299188C CA 000561102 A CA000561102 A CA 000561102A CA 561102 A CA561102 A CA 561102A CA 1299188 C CA1299188 C CA 1299188C
Authority
CA
Canada
Prior art keywords
layer
contrast
photoresist
bleaching
photobleachable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CA000561102A
Other languages
English (en)
Inventor
Bruce Frederick Griffing
Paul Richard West
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu MicroSi Inc
Original Assignee
MicroSi Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MicroSi Inc filed Critical MicroSi Inc
Priority to CA000561102A priority Critical patent/CA1299188C/fr
Application granted granted Critical
Publication of CA1299188C publication Critical patent/CA1299188C/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
CA000561102A 1988-03-10 1988-03-10 Diarylnitrones Expired - Lifetime CA1299188C (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA000561102A CA1299188C (fr) 1988-03-10 1988-03-10 Diarylnitrones

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA000561102A CA1299188C (fr) 1988-03-10 1988-03-10 Diarylnitrones

Publications (1)

Publication Number Publication Date
CA1299188C true CA1299188C (fr) 1992-04-21

Family

ID=4137612

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000561102A Expired - Lifetime CA1299188C (fr) 1988-03-10 1988-03-10 Diarylnitrones

Country Status (1)

Country Link
CA (1) CA1299188C (fr)

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Legal Events

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