CA1299188CCA000561102ACA561102ACA1299188CCA 1299188 CCA1299188 CCA 1299188CCA 000561102 ACA000561102 ACA 000561102ACA 561102 ACA561102 ACA 561102ACA 1299188 CCA1299188 CCA 1299188C
Authority
CA
Canada
Prior art keywords
layer
contrast
photoresist
bleaching
photobleachable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu MicroSi Inc
Original Assignee
MicroSi Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MicroSi IncfiledCriticalMicroSi Inc
Priority to CA000561102ApriorityCriticalpatent/CA1299188C/fr
Application grantedgrantedCritical
Publication of CA1299188CpublicationCriticalpatent/CA1299188C/fr