CA1286905C - Resist process using polysulfone polymers - Google Patents

Resist process using polysulfone polymers

Info

Publication number
CA1286905C
CA1286905C CA 184354 CA184354A CA1286905C CA 1286905 C CA1286905 C CA 1286905C CA 184354 CA184354 CA 184354 CA 184354 A CA184354 A CA 184354A CA 1286905 C CA1286905 C CA 1286905C
Authority
CA
Canada
Prior art keywords
olefin
film
polymer
copolymer
sulfone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA 184354
Other languages
English (en)
French (fr)
Other versions
CA184354S (en
Inventor
Edward Gipstein
Wayne M. Moreau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA1286905C publication Critical patent/CA1286905C/en
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
CA 184354 1972-11-13 1973-10-26 Resist process using polysulfone polymers Expired - Fee Related CA1286905C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US30623472A 1972-11-13 1972-11-13
US306,234 1972-11-13

Publications (1)

Publication Number Publication Date
CA1286905C true CA1286905C (en) 1991-07-30

Family

ID=23184410

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 184354 Expired - Fee Related CA1286905C (en) 1972-11-13 1973-10-26 Resist process using polysulfone polymers

Country Status (5)

Country Link
JP (1) JPS4979525A (US07655688-20100202-C00086.png)
CA (1) CA1286905C (US07655688-20100202-C00086.png)
DE (1) DE2355701A1 (US07655688-20100202-C00086.png)
FR (1) FR2206527B1 (US07655688-20100202-C00086.png)
GB (1) GB1421805A (US07655688-20100202-C00086.png)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3893127A (en) * 1973-09-27 1975-07-01 Rca Corp Electron beam recording media
KR880701400A (ko) * 1986-03-24 1988-07-26 엘리 와이스 집적 회로 장치의 제조방법
DE19917790A1 (de) * 1999-04-20 2000-11-02 Hoechst Trespaphan Gmbh Biaxial orientierte Folie für die Herstellung von Keramikkondensatoren

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535137A (en) * 1967-01-13 1970-10-20 Ibm Method of fabricating etch resistant masks
SE391405B (sv) * 1972-05-01 1977-02-14 Western Electric Co Forfarande for astadkommande av resistmonster pa ett substrat

Also Published As

Publication number Publication date
FR2206527B1 (US07655688-20100202-C00086.png) 1978-01-13
FR2206527A1 (US07655688-20100202-C00086.png) 1974-06-07
DE2355701A1 (de) 1974-05-16
JPS4979525A (US07655688-20100202-C00086.png) 1974-08-01
GB1421805A (en) 1976-01-21

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Legal Events

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