GB1421805A - Method of forming a positive resist - Google Patents

Method of forming a positive resist

Info

Publication number
GB1421805A
GB1421805A GB4110673A GB4110673A GB1421805A GB 1421805 A GB1421805 A GB 1421805A GB 4110673 A GB4110673 A GB 4110673A GB 4110673 A GB4110673 A GB 4110673A GB 1421805 A GB1421805 A GB 1421805A
Authority
GB
United Kingdom
Prior art keywords
ene
polymers
olefine
sulphur dioxide
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4110673A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1421805A publication Critical patent/GB1421805A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists

Abstract

1421805 Olefin-sulphur dioxide polymers INTERNATIONAL BUSINESS MACHINES CORP 31 Aug 1973 [13 Nov 1972] 41106/73 Heading C3P [Also in Division G2] Olefine-sulphone polymers containing the unit-[CR 1 H-CR 2 H] n -SO 2 wherein n is 1 or 2, R 1 and R 2 are H, alkyl, substituted alkyl or aryl or together form an alicyclic ring are prepared by heating the olefine and sulphur dioxide in the presence of azobisisobutyronitrile catalyst. Specified olefines are cis-but-2-ene, but-1- ene, pent-1-ene, cyclopentene, hex-1-ene, 4- bromo-but-1-ene and styrene. The polymers are used in electron-sensitive processes (see Division G2).
GB4110673A 1972-11-13 1973-08-31 Method of forming a positive resist Expired GB1421805A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US30623472A 1972-11-13 1972-11-13

Publications (1)

Publication Number Publication Date
GB1421805A true GB1421805A (en) 1976-01-21

Family

ID=23184410

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4110673A Expired GB1421805A (en) 1972-11-13 1973-08-31 Method of forming a positive resist

Country Status (5)

Country Link
JP (1) JPS4979525A (en)
CA (1) CA1286905C (en)
DE (1) DE2355701A1 (en)
FR (1) FR2206527B1 (en)
GB (1) GB1421805A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3893127A (en) * 1973-09-27 1975-07-01 Rca Corp Electron beam recording media
WO1987006029A2 (en) * 1986-03-24 1987-10-08 American Telephone & Telegraph Company Pattern transfer process for fabricating integrated-circuit devices
DE19917790A1 (en) * 1999-04-20 2000-11-02 Hoechst Trespaphan Gmbh Biaxially oriented film for the production of ceramic capacitors

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535137A (en) * 1967-01-13 1970-10-20 Ibm Method of fabricating etch resistant masks
SE391405B (en) * 1972-05-01 1977-02-14 Western Electric Co PROCEDURE FOR RESISTANCE OF RESIST MONSTERS ON A SUBSTRATE

Also Published As

Publication number Publication date
CA1286905C (en) 1991-07-30
FR2206527A1 (en) 1974-06-07
DE2355701A1 (en) 1974-05-16
JPS4979525A (en) 1974-08-01
FR2206527B1 (en) 1978-01-13

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee