CA1249926A - Plasma processing apparatus - Google Patents

Plasma processing apparatus

Info

Publication number
CA1249926A
CA1249926A CA000483614A CA483614A CA1249926A CA 1249926 A CA1249926 A CA 1249926A CA 000483614 A CA000483614 A CA 000483614A CA 483614 A CA483614 A CA 483614A CA 1249926 A CA1249926 A CA 1249926A
Authority
CA
Canada
Prior art keywords
plasma processing
processing apparatus
plasma
housing chamber
support base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000483614A
Other languages
English (en)
French (fr)
Inventor
Katsuhide Manabe
Yasuhiko Ogisu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyoda Gosei Co Ltd
Original Assignee
Toyoda Gosei Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP59121122A external-priority patent/JPS61439A/ja
Priority claimed from JP59130622A external-priority patent/JPS619440A/ja
Priority claimed from JP10907384U external-priority patent/JPS6125972U/ja
Priority claimed from JP15023384A external-priority patent/JPS6128531A/ja
Priority claimed from JP15023484A external-priority patent/JPS6128532A/ja
Priority claimed from JP15359684A external-priority patent/JPS6131437A/ja
Priority claimed from JP11215484U external-priority patent/JPS6125974U/ja
Priority claimed from JP11215384U external-priority patent/JPS6125973U/ja
Priority claimed from JP16232384A external-priority patent/JPS6140330A/ja
Priority claimed from JP59228494A external-priority patent/JPS61107939A/ja
Application filed by Toyoda Gosei Co Ltd filed Critical Toyoda Gosei Co Ltd
Publication of CA1249926A publication Critical patent/CA1249926A/en
Application granted granted Critical
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
    • B05B7/22—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc
    • B05B7/222—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B05B13/0242—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the objects being individually presented to the spray heads by a rotating element, e.g. turntable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/30—Vehicles, e.g. ships or aircraft, or body parts thereof
    • B29L2031/3044—Bumpers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S422/00—Chemical apparatus and process disinfecting, deodorizing, preserving, or sterilizing
    • Y10S422/906—Plasma or ion generation means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating Apparatus (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
CA000483614A 1984-06-12 1985-06-11 Plasma processing apparatus Expired CA1249926A (en)

Applications Claiming Priority (20)

Application Number Priority Date Filing Date Title
JP59121122A JPS61439A (ja) 1984-06-12 1984-06-12 プラズマ処理装置
JP59-121122 1984-06-12
JP59130622A JPS619440A (ja) 1984-06-25 1984-06-25 プラズマ処理装置
JP59-130622 1984-06-25
JP59-150233 1984-07-19
JP15023384A JPS6128531A (ja) 1984-07-19 1984-07-19 プラズマ処理装置
JP59-109073 1984-07-19
JP59-150234 1984-07-19
JP10907384U JPS6125972U (ja) 1984-07-19 1984-07-19 プラズマ処理装置
JP15023484A JPS6128532A (ja) 1984-07-19 1984-07-19 プラズマ処理装置
JP59-153596 1984-07-23
JP15359684A JPS6131437A (ja) 1984-07-23 1984-07-23 プラズマ処理品の判別方法
JP59-112154 1984-07-23
JP11215484U JPS6125974U (ja) 1984-07-23 1984-07-23 プラズマ処理装置
JP11215384U JPS6125973U (ja) 1984-07-23 1984-07-23 プラズマ処理装置
JP59-112153 1984-07-23
JP59-162323 1984-07-31
JP16232384A JPS6140330A (ja) 1984-07-31 1984-07-31 プラズマ処理装置
JP59228494A JPS61107939A (ja) 1984-10-30 1984-10-30 プラズマ処理装置
JP59-228494 1984-10-30

Publications (1)

Publication Number Publication Date
CA1249926A true CA1249926A (en) 1989-02-14

Family

ID=27580237

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000483614A Expired CA1249926A (en) 1984-06-12 1985-06-11 Plasma processing apparatus

Country Status (3)

Country Link
US (1) US4668479A (OSRAM)
CA (1) CA1249926A (OSRAM)
DE (1) DE3520924A1 (OSRAM)

Families Citing this family (37)

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EP0261644B1 (en) * 1986-09-25 1991-02-27 Mazda Motor Corporation Coating method in coating line and coating apparatus therefor
EP0360301B1 (en) * 1986-09-25 1993-07-28 Mazda Motor Corporation Coating method in coating line and coating apparatus therefor
US5169683A (en) * 1986-09-25 1992-12-08 Mazda Motor Corporation Coating a rotating vehicle body
EP0278482B1 (en) * 1987-02-10 1991-01-09 Mazda Motor Corporation Coating method
CA1264025A (en) * 1987-05-29 1989-12-27 James A.E. Bell Apparatus and process for coloring objects by plasma coating
US5008087A (en) * 1990-06-06 1991-04-16 American Ozone Systems, Inc. Ozone generator apparatus and method
US5169606A (en) * 1990-06-06 1992-12-08 American Ozone Systems, Inc. Ozone generator apparatus
US5198272A (en) * 1992-03-24 1993-03-30 Davidson Textron Inc. Thermal evaporation in two planes
USRE43097E1 (en) 1994-10-13 2012-01-10 Illumina, Inc. Massively parallel signature sequencing by ligation of encoded adaptors
DE4437050A1 (de) * 1994-10-17 1996-04-18 Leybold Ag Vorrichtung zum Behandeln von Oberflächen von Hohlkörpern, insbesondere von Innenflächen von Kraftstofftanks
US5801634A (en) * 1997-09-08 1998-09-01 Sony Corporation Signal tower controller
US7318856B2 (en) 1998-11-05 2008-01-15 Sharper Image Corporation Air treatment apparatus having an electrode extending along an axis which is substantially perpendicular to an air flow path
US6544485B1 (en) 2001-01-29 2003-04-08 Sharper Image Corporation Electro-kinetic device with enhanced anti-microorganism capability
US7220295B2 (en) 2003-05-14 2007-05-22 Sharper Image Corporation Electrode self-cleaning mechanisms with anti-arc guard for electro-kinetic air transporter-conditioner devices
US20030206837A1 (en) 1998-11-05 2003-11-06 Taylor Charles E. Electro-kinetic air transporter and conditioner device with enhanced maintenance features and enhanced anti-microorganism capability
US6176977B1 (en) 1998-11-05 2001-01-23 Sharper Image Corporation Electro-kinetic air transporter-conditioner
US20050210902A1 (en) 2004-02-18 2005-09-29 Sharper Image Corporation Electro-kinetic air transporter and/or conditioner devices with features for cleaning emitter electrodes
US7695690B2 (en) 1998-11-05 2010-04-13 Tessera, Inc. Air treatment apparatus having multiple downstream electrodes
DE10029899B4 (de) * 2000-06-17 2004-02-19 Carl Freudenberg Kg Vorrichtung zur Oberflächenbehandlung von Kunststoffteilen
US6689219B2 (en) * 2001-03-15 2004-02-10 Michael Antoine Birmingham Apparatus and method for dispensing viscous liquid material
US7405672B2 (en) 2003-04-09 2008-07-29 Sharper Image Corp. Air treatment device having a sensor
US7906080B1 (en) 2003-09-05 2011-03-15 Sharper Image Acquisition Llc Air treatment apparatus having a liquid holder and a bipolar ionization device
US20050051420A1 (en) 2003-09-05 2005-03-10 Sharper Image Corporation Electro-kinetic air transporter and conditioner devices with insulated driver electrodes
US7724492B2 (en) 2003-09-05 2010-05-25 Tessera, Inc. Emitter electrode having a strip shape
US7077890B2 (en) 2003-09-05 2006-07-18 Sharper Image Corporation Electrostatic precipitators with insulated driver electrodes
US7517503B2 (en) 2004-03-02 2009-04-14 Sharper Image Acquisition Llc Electro-kinetic air transporter and conditioner devices including pin-ring electrode configurations with driver electrode
US7767169B2 (en) 2003-12-11 2010-08-03 Sharper Image Acquisition Llc Electro-kinetic air transporter-conditioner system and method to oxidize volatile organic compounds
US7638104B2 (en) 2004-03-02 2009-12-29 Sharper Image Acquisition Llc Air conditioner device including pin-ring electrode configurations with driver electrode
US20060016333A1 (en) 2004-07-23 2006-01-26 Sharper Image Corporation Air conditioner device with removable driver electrodes
US7311762B2 (en) 2004-07-23 2007-12-25 Sharper Image Corporation Air conditioner device with a removable driver electrode
US7285155B2 (en) 2004-07-23 2007-10-23 Taylor Charles E Air conditioner device with enhanced ion output production features
US7833322B2 (en) 2006-02-28 2010-11-16 Sharper Image Acquisition Llc Air treatment apparatus having a voltage control device responsive to current sensing
WO2008090763A1 (ja) * 2007-01-22 2008-07-31 Panasonic Corporation 半導体装置の製造方法及び半導体製造装置
WO2012097784A1 (de) * 2010-11-23 2012-07-26 Bruker Elemental Gmbh Vorrichtung und verfahren zur verbrennungsanalyse mittels induktionsöfen sowie schutzelement für induktionsöfen für die verbrennungsanalyse
CN104307665A (zh) * 2014-10-28 2015-01-28 重庆市永宏陈记实业有限公司 旋转摆动式汽车保险杠喷涂工装
CH711291A1 (de) * 2015-07-03 2017-01-13 Amt Ag Anordnung sowie Verfahren zum Beschichten von Werkstücken.
JP6512133B2 (ja) * 2016-02-25 2019-05-15 株式会社オートネットワーク技術研究所 電線保護部材及びその製造方法並びにワイヤーハーネス

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE435297B (sv) * 1975-08-22 1984-09-17 Bosch Gmbh Robert Optiska reflektorer framstellda genom att reflektorytan belegges med ett skyddsskikt
JPS6039290B2 (ja) * 1979-10-23 1985-09-05 信越化学工業株式会社 塩化ビニル系樹脂成形品に親水性を付与する方法
JPS60129158A (ja) * 1983-12-15 1985-07-10 Toyoda Gosei Co Ltd プラズマ処理装置
US4560462A (en) * 1984-06-22 1985-12-24 Westinghouse Electric Corp. Apparatus for coating nuclear fuel pellets with a burnable absorber

Also Published As

Publication number Publication date
DE3520924C2 (OSRAM) 1992-09-03
US4668479A (en) 1987-05-26
DE3520924A1 (de) 1985-12-12

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