CA1236929A - Photon assisted tunneling testing of passivated integrated circuits - Google Patents

Photon assisted tunneling testing of passivated integrated circuits

Info

Publication number
CA1236929A
CA1236929A CA000499662A CA499662A CA1236929A CA 1236929 A CA1236929 A CA 1236929A CA 000499662 A CA000499662 A CA 000499662A CA 499662 A CA499662 A CA 499662A CA 1236929 A CA1236929 A CA 1236929A
Authority
CA
Canada
Prior art keywords
test
chip
integrated circuit
layer
testing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000499662A
Other languages
English (en)
French (fr)
Inventor
Johannes G. Beha
Russell W. Dreyfus
Allan M. Hartstein
Gary W. Rubloff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA1236929A publication Critical patent/CA1236929A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
CA000499662A 1985-03-29 1986-01-15 Photon assisted tunneling testing of passivated integrated circuits Expired CA1236929A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/717,409 US4644264A (en) 1985-03-29 1985-03-29 Photon assisted tunneling testing of passivated integrated circuits
US06/717,409 1985-03-29

Publications (1)

Publication Number Publication Date
CA1236929A true CA1236929A (en) 1988-05-17

Family

ID=24881911

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000499662A Expired CA1236929A (en) 1985-03-29 1986-01-15 Photon assisted tunneling testing of passivated integrated circuits

Country Status (5)

Country Link
US (1) US4644264A (cg-RX-API-DMAC7.html)
EP (1) EP0196475B1 (cg-RX-API-DMAC7.html)
JP (1) JPS61225830A (cg-RX-API-DMAC7.html)
CA (1) CA1236929A (cg-RX-API-DMAC7.html)
DE (1) DE3675236D1 (cg-RX-API-DMAC7.html)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4786864A (en) * 1985-03-29 1988-11-22 International Business Machines Corporation Photon assisted tunneling testing of passivated integrated circuits
US4755748A (en) * 1985-06-05 1988-07-05 Bell Communications Research, Inc. Method and apparatus for analyzing semiconductor devices using charge-sensitive electron-beam-injected-carrier microscopy
EP0264482B1 (en) * 1986-10-23 1991-12-18 International Business Machines Corporation Method for contactless testing of integrated circuit packaging boards under atmospheric conditions
EP0264481B1 (en) * 1986-10-23 1992-05-13 International Business Machines Corporation Testing method for integrated circuit packaging boards using a laser in vacuum
NL8700933A (nl) * 1987-04-21 1988-11-16 Philips Nv Testmethode voor lcd-elementen.
JP2690908B2 (ja) * 1987-09-25 1997-12-17 株式会社日立製作所 表面計測装置
US5225771A (en) * 1988-05-16 1993-07-06 Dri Technology Corp. Making and testing an integrated circuit using high density probe points
US5034685A (en) * 1988-05-16 1991-07-23 Leedy Glenn J Test device for testing integrated circuits
US5020219A (en) * 1988-05-16 1991-06-04 Leedy Glenn J Method of making a flexible tester surface for testing integrated circuits
US5512397A (en) * 1988-05-16 1996-04-30 Leedy; Glenn J. Stepper scanner discretionary lithography and common mask discretionary lithography for integrated circuits
EP0404970A1 (en) * 1989-06-26 1991-01-02 International Business Machines Corporation Method and system for contactless testing of electronic activity in an integrated circuit chip-to-test after passivation thereof
US5111137A (en) * 1990-10-29 1992-05-05 Hewlett-Packard Company Method and apparatus for the detection of leakage current
DE69118319T2 (de) * 1990-11-06 1996-08-08 Texas Instruments Inc Anwendung eines STM-artigen Systems zur Messung der Knotenspannung in integrierten Schaltungen
US5179279A (en) * 1991-01-25 1993-01-12 Rensselaer Polytechnic Institute Non-contact electrical pathway
US6472889B1 (en) 2000-06-15 2002-10-29 University Of Connecticut Apparatus and method for producing an ion channel microprobe
TWI565119B (zh) * 2011-05-27 2017-01-01 半導體能源研究所股份有限公司 發光裝置的製造方法及發光裝置
FR3112653B1 (fr) * 2020-07-15 2025-10-24 St Microelectronics Alps Sas Circuit intégré et procédé de diagnostic d’un tel circuit intégré

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4051437A (en) * 1976-04-02 1977-09-27 The United States Of America As Represented By The Secretary Of The Navy Method and apparatus for semiconductor profiling using an optical probe
DE2824308A1 (de) * 1978-06-02 1979-12-13 Siemens Ag Verfahren zum einpraegen einer spannung mit einem elektronenstrahl
US4301409A (en) * 1978-06-06 1981-11-17 California Institute Of Technology Solar cell anomaly detection method and apparatus
US4417203A (en) * 1981-05-26 1983-11-22 International Business Machines Corporation System for contactless electrical property testing of multi-layer ceramics
US4415851A (en) * 1981-05-26 1983-11-15 International Business Machines Corporation System for contactless testing of multi-layer ceramics
US4419530A (en) * 1982-02-11 1983-12-06 Energy Conversion Devices, Inc. Solar cell and method for producing same

Also Published As

Publication number Publication date
DE3675236D1 (de) 1990-12-06
JPS61225830A (ja) 1986-10-07
US4644264A (en) 1987-02-17
JPH0262948B2 (cg-RX-API-DMAC7.html) 1990-12-27
EP0196475A1 (en) 1986-10-08
EP0196475B1 (en) 1990-10-31

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