CA1181627A - Composition photosensible renfermant un azide et un compose iode - Google Patents

Composition photosensible renfermant un azide et un compose iode

Info

Publication number
CA1181627A
CA1181627A CA000455393A CA455393A CA1181627A CA 1181627 A CA1181627 A CA 1181627A CA 000455393 A CA000455393 A CA 000455393A CA 455393 A CA455393 A CA 455393A CA 1181627 A CA1181627 A CA 1181627A
Authority
CA
Canada
Prior art keywords
group
compound
radiation
polymer
acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000455393A
Other languages
English (en)
Inventor
Takumi Ueno
Hiroshi Shiraishi
Takao Iwayanagi
Takahiro Kohashi
Saburo Nonogaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10933781A external-priority patent/JPS5811930A/ja
Priority claimed from JP57075231A external-priority patent/JPS58192033A/ja
Priority claimed from CA000407336A external-priority patent/CA1176903A/fr
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to CA000455393A priority Critical patent/CA1181627A/fr
Application granted granted Critical
Publication of CA1181627A publication Critical patent/CA1181627A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Compositions Of Macromolecular Compounds (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
CA000455393A 1981-07-15 1984-05-29 Composition photosensible renfermant un azide et un compose iode Expired CA1181627A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA000455393A CA1181627A (fr) 1981-07-15 1984-05-29 Composition photosensible renfermant un azide et un compose iode

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP109337/1981 1981-07-15
JP10933781A JPS5811930A (ja) 1981-07-15 1981-07-15 放射線感応性組成物及びそれを用いたパタ−ン形成方法
JP57075231A JPS58192033A (ja) 1982-05-07 1982-05-07 放射線感応性組成物及びそれを用いたパタ−ン形成方法
JP75231/1982 1982-05-07
CA000407336A CA1176903A (fr) 1981-07-15 1982-07-15 Composition photosensible renfermant un azide iode
CA000455393A CA1181627A (fr) 1981-07-15 1984-05-29 Composition photosensible renfermant un azide et un compose iode

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CA000407336A Division CA1176903A (fr) 1981-07-15 1982-07-15 Composition photosensible renfermant un azide iode

Publications (1)

Publication Number Publication Date
CA1181627A true CA1181627A (fr) 1985-01-29

Family

ID=27426355

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000455393A Expired CA1181627A (fr) 1981-07-15 1984-05-29 Composition photosensible renfermant un azide et un compose iode

Country Status (1)

Country Link
CA (1) CA1181627A (fr)

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Legal Events

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