CA1179786A - Lateral transistor structure having self-aligned base and base contact and method of fabrication - Google Patents

Lateral transistor structure having self-aligned base and base contact and method of fabrication

Info

Publication number
CA1179786A
CA1179786A CA000388541A CA388541A CA1179786A CA 1179786 A CA1179786 A CA 1179786A CA 000388541 A CA000388541 A CA 000388541A CA 388541 A CA388541 A CA 388541A CA 1179786 A CA1179786 A CA 1179786A
Authority
CA
Canada
Prior art keywords
layer
region
impurity
base
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000388541A
Other languages
English (en)
French (fr)
Inventor
Madhukar B. Vora
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fairchild Semiconductor Corp
Original Assignee
Fairchild Camera and Instrument Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fairchild Camera and Instrument Corp filed Critical Fairchild Camera and Instrument Corp
Application granted granted Critical
Publication of CA1179786A publication Critical patent/CA1179786A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00—Bipolar junction transistors [BJT]
    • H10D10/311—Thin-film BJTs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/3215—Doping the layers
    • H01L21/32155—Doping polycristalline - or amorphous silicon layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Bipolar Transistors (AREA)
CA000388541A 1980-10-23 1981-10-22 Lateral transistor structure having self-aligned base and base contact and method of fabrication Expired CA1179786A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US19977180A 1980-10-23 1980-10-23
US199,771 1980-10-23

Publications (1)

Publication Number Publication Date
CA1179786A true CA1179786A (en) 1984-12-18

Family

ID=22738957

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000388541A Expired CA1179786A (en) 1980-10-23 1981-10-22 Lateral transistor structure having self-aligned base and base contact and method of fabrication

Country Status (4)

Country Link
EP (1) EP0052038B1 (en:Method)
JP (1) JPS57100763A (en:Method)
CA (1) CA1179786A (en:Method)
DE (1) DE3174777D1 (en:Method)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0137992A3 (en) * 1983-09-29 1987-01-21 Fujitsu Limited Lateral bipolar transistor formed in a silicon on insulator (soi) substrate
JPS6074477A (ja) * 1983-09-29 1985-04-26 Fujitsu Ltd 半導体装置及びその製造方法
NL8303467A (nl) * 1983-10-10 1985-05-01 Philips Nv Werkwijze voor het vervaardigen van een patroon van geleidend materiaal.
JPS6081864A (ja) * 1983-10-12 1985-05-09 Fujitsu Ltd ラテラル型トランジスタ
DE3587797T2 (de) * 1984-10-31 1994-07-28 Texas Instruments Inc Transistor mit horizontaler Struktur und Verfahren zu dessen Herstellung.
US4897698A (en) * 1984-10-31 1990-01-30 Texas Instruments Incorporated Horizontal structure thin film transistor
GB2178593B (en) * 1985-08-02 1989-07-26 Stc Plc Transistor manufacture
US4792837A (en) * 1986-02-26 1988-12-20 Ge Solid State Patents, Inc. Orthogonal bipolar transistor
US5005066A (en) * 1987-06-02 1991-04-02 Texas Instruments Incorporated Self-aligned NPN bipolar transistor built in a double polysilicon CMOS technology
US4784966A (en) * 1987-06-02 1988-11-15 Texas Instruments Incorporated Self-aligned NPN bipolar transistor built in a double polysilicon CMOS technology
US4922315A (en) * 1987-11-13 1990-05-01 Kopin Corporation Control gate lateral silicon-on-insulator bipolar transistor
US5043786A (en) * 1989-04-13 1991-08-27 International Business Machines Corporation Lateral transistor and method of making same
JPH0483173A (ja) * 1990-07-26 1992-03-17 Tele Syst:Yugen 電力量計

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1352044A (en) * 1971-04-21 1974-05-15 Garyainov S A Glazkov I M Raik Planar semiconductor device
JPS4915374A (en:Method) * 1972-05-18 1974-02-09
JPS49123274A (en:Method) * 1973-03-29 1974-11-26
US4201603A (en) * 1978-12-04 1980-05-06 Rca Corporation Method of fabricating improved short channel MOS devices utilizing selective etching and counterdoping of polycrystalline silicon

Also Published As

Publication number Publication date
EP0052038A3 (en) 1983-01-12
DE3174777D1 (en) 1986-07-10
EP0052038A2 (en) 1982-05-19
JPS57100763A (en) 1982-06-23
JPH0241170B2 (en:Method) 1990-09-14
EP0052038B1 (en) 1986-06-04

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Legal Events

Date Code Title Description
MKEX Expiry