CA1176744A - Semiconductor stress sensing apparatus - Google Patents

Semiconductor stress sensing apparatus

Info

Publication number
CA1176744A
CA1176744A CA000389753A CA389753A CA1176744A CA 1176744 A CA1176744 A CA 1176744A CA 000389753 A CA000389753 A CA 000389753A CA 389753 A CA389753 A CA 389753A CA 1176744 A CA1176744 A CA 1176744A
Authority
CA
Canada
Prior art keywords
domain
region
terminating
semiconductor
resistive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000389753A
Other languages
English (en)
French (fr)
Inventor
Russell L. Johnson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Application granted granted Critical
Publication of CA1176744A publication Critical patent/CA1176744A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
CA000389753A 1980-12-03 1981-11-09 Semiconductor stress sensing apparatus Expired CA1176744A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/212,657 US4345477A (en) 1980-12-03 1980-12-03 Semiconduction stress sensing apparatus
US212,657 1980-12-03

Publications (1)

Publication Number Publication Date
CA1176744A true CA1176744A (en) 1984-10-23

Family

ID=22791941

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000389753A Expired CA1176744A (en) 1980-12-03 1981-11-09 Semiconductor stress sensing apparatus

Country Status (5)

Country Link
US (1) US4345477A (enExample)
EP (1) EP0053486B1 (enExample)
JP (1) JPS57128075A (enExample)
CA (1) CA1176744A (enExample)
DE (1) DE3176738D1 (enExample)

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US8687981B2 (en) * 2007-10-02 2014-04-01 Luxtera, Inc. Method and system for split voltage domain transmitter circuits
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US9157822B2 (en) * 2011-02-01 2015-10-13 Kulite Semiconductor Products, Inc. Electronic interface for LVDT-type pressure transducers using piezoresistive sensors
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JP2014089087A (ja) * 2012-10-30 2014-05-15 Yamaha Corp オフセットキャンセル回路
US9983715B2 (en) 2012-12-17 2018-05-29 Apple Inc. Force detection in touch devices using piezoelectric sensors
US9952703B2 (en) 2013-03-15 2018-04-24 Apple Inc. Force sensing of inputs through strain analysis
EP2784521B1 (en) 2013-03-28 2019-04-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sensor apparatus and method
CN110134283B (zh) 2013-10-28 2022-10-11 苹果公司 基于压电的力感测
AU2015100011B4 (en) 2014-01-13 2015-07-16 Apple Inc. Temperature compensating transparent force sensor
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US10162017B2 (en) 2016-07-12 2018-12-25 Allegro Microsystems, Llc Systems and methods for reducing high order hall plate sensitivity temperature coefficients
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US10458828B2 (en) * 2017-02-07 2019-10-29 Honeywell International Inc. Flow sensor heater circuit calibration
US10444091B2 (en) 2017-04-11 2019-10-15 Apple Inc. Row column architecture for strain sensing
US11024525B2 (en) 2017-06-12 2021-06-01 Analog Devices International Unlimited Company Diffusion temperature shock monitor
US10309846B2 (en) 2017-07-24 2019-06-04 Apple Inc. Magnetic field cancellation for strain sensors
US10520559B2 (en) 2017-08-14 2019-12-31 Allegro Microsystems, Llc Arrangements for Hall effect elements and vertical epi resistors upon a substrate
US20200018662A1 (en) * 2018-07-11 2020-01-16 King Fahd University Of Petroleum And Minerals Pipeline leak detection
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WO2020059246A1 (ja) * 2018-09-21 2020-03-26 パナソニックＩｐマネジメント株式会社 センサ処理回路及びセンサシステム
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Also Published As

Publication number Publication date
EP0053486B1 (en) 1988-05-11
JPH0322065B2 (enExample) 1991-03-26
US4345477A (en) 1982-08-24
DE3176738D1 (en) 1988-06-16
JPS57128075A (en) 1982-08-09
EP0053486A3 (en) 1984-05-30
EP0053486A2 (en) 1982-06-09

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