CA1162028A - Silane ultra-pur et obtention de silicium - Google Patents
Silane ultra-pur et obtention de siliciumInfo
- Publication number
- CA1162028A CA1162028A CA000357023A CA357023A CA1162028A CA 1162028 A CA1162028 A CA 1162028A CA 000357023 A CA000357023 A CA 000357023A CA 357023 A CA357023 A CA 357023A CA 1162028 A CA1162028 A CA 1162028A
- Authority
- CA
- Canada
- Prior art keywords
- silane
- silicon
- zone
- stream
- product
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Silicon Compounds (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US6275579A | 1979-08-01 | 1979-08-01 | |
US062,755 | 1979-08-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1162028A true CA1162028A (fr) | 1984-02-14 |
Family
ID=22044578
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA000357023A Expired CA1162028A (fr) | 1979-08-01 | 1980-07-25 | Silane ultra-pur et obtention de silicium |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA1162028A (fr) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5094831A (en) * | 1989-07-31 | 1992-03-10 | Degussa Aktiengesellschaft | Process for the dismutation of chlorosilanes |
DE10061680A1 (de) * | 2000-12-11 | 2002-06-20 | Solarworld Ag | Verfahren zur Herstellung von Silan |
DE10062413A1 (de) * | 2000-12-14 | 2002-07-04 | Solarworld Ag | Verfahren zur Herstellung von Trichlorsilan |
FR2933714A1 (fr) * | 2008-07-11 | 2010-01-15 | Air Liquide | Procede de recyclage de silane (sih4) |
US8691055B2 (en) | 2004-11-19 | 2014-04-08 | Memc Electronic Materials Spa | Processes for the purification of trichlorosilane or silicon tetrachloride |
TWI472486B (zh) * | 2006-03-02 | 2015-02-11 | Memc Electronic Materials | 用於純化三氯矽烷及四氯化矽之方法和裝置 |
CN108394904A (zh) * | 2018-05-20 | 2018-08-14 | 宁波工程学院 | 一种圆台形冷却夹套的甲硅烷热分解炉 |
TWI637908B (zh) * | 2012-04-27 | 2018-10-11 | 香港商各星有限公司 | 純化含鹵代矽烷流的方法 |
WO2021104618A1 (fr) | 2019-11-27 | 2021-06-03 | Wacker Chemie Ag | Procédé permettant d'éliminer une impureté d'un mélange de chlorosilane |
WO2021164876A1 (fr) | 2020-02-20 | 2021-08-26 | Wacker Chemie Ag | Procédé d'obtention d'hexachlorodisilane par réaction d'au moins un chlorodisilane partiellement hydrogéné sur un adsorbeur solide non fonctionnalisé |
WO2022096098A1 (fr) | 2020-11-05 | 2022-05-12 | Wacker Chemie Ag | Procédé d'élimination d'une impureté d'un mélange de chlorosilane |
-
1980
- 1980-07-25 CA CA000357023A patent/CA1162028A/fr not_active Expired
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5094831A (en) * | 1989-07-31 | 1992-03-10 | Degussa Aktiengesellschaft | Process for the dismutation of chlorosilanes |
DE10061680A1 (de) * | 2000-12-11 | 2002-06-20 | Solarworld Ag | Verfahren zur Herstellung von Silan |
DE10062413A1 (de) * | 2000-12-14 | 2002-07-04 | Solarworld Ag | Verfahren zur Herstellung von Trichlorsilan |
US8691055B2 (en) | 2004-11-19 | 2014-04-08 | Memc Electronic Materials Spa | Processes for the purification of trichlorosilane or silicon tetrachloride |
TWI472486B (zh) * | 2006-03-02 | 2015-02-11 | Memc Electronic Materials | 用於純化三氯矽烷及四氯化矽之方法和裝置 |
WO2009112730A3 (fr) * | 2008-03-04 | 2010-02-25 | L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | PROCEDE DE RECYCLAGE DE SILANE (SiH4) |
FR2933714A1 (fr) * | 2008-07-11 | 2010-01-15 | Air Liquide | Procede de recyclage de silane (sih4) |
TWI637908B (zh) * | 2012-04-27 | 2018-10-11 | 香港商各星有限公司 | 純化含鹵代矽烷流的方法 |
CN108394904A (zh) * | 2018-05-20 | 2018-08-14 | 宁波工程学院 | 一种圆台形冷却夹套的甲硅烷热分解炉 |
WO2021104618A1 (fr) | 2019-11-27 | 2021-06-03 | Wacker Chemie Ag | Procédé permettant d'éliminer une impureté d'un mélange de chlorosilane |
WO2021164876A1 (fr) | 2020-02-20 | 2021-08-26 | Wacker Chemie Ag | Procédé d'obtention d'hexachlorodisilane par réaction d'au moins un chlorodisilane partiellement hydrogéné sur un adsorbeur solide non fonctionnalisé |
WO2022096098A1 (fr) | 2020-11-05 | 2022-05-12 | Wacker Chemie Ag | Procédé d'élimination d'une impureté d'un mélange de chlorosilane |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MKEX | Expiry |