CA1162028A - Silane ultra-pur et obtention de silicium - Google Patents

Silane ultra-pur et obtention de silicium

Info

Publication number
CA1162028A
CA1162028A CA000357023A CA357023A CA1162028A CA 1162028 A CA1162028 A CA 1162028A CA 000357023 A CA000357023 A CA 000357023A CA 357023 A CA357023 A CA 357023A CA 1162028 A CA1162028 A CA 1162028A
Authority
CA
Canada
Prior art keywords
silane
silicon
zone
stream
product
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000357023A
Other languages
English (en)
Inventor
Larry M. Coleman
William C. Breneman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Union Carbide Corp
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Application granted granted Critical
Publication of CA1162028A publication Critical patent/CA1162028A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
CA000357023A 1979-08-01 1980-07-25 Silane ultra-pur et obtention de silicium Expired CA1162028A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US6275579A 1979-08-01 1979-08-01
US062,755 1979-08-01

Publications (1)

Publication Number Publication Date
CA1162028A true CA1162028A (fr) 1984-02-14

Family

ID=22044578

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000357023A Expired CA1162028A (fr) 1979-08-01 1980-07-25 Silane ultra-pur et obtention de silicium

Country Status (1)

Country Link
CA (1) CA1162028A (fr)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5094831A (en) * 1989-07-31 1992-03-10 Degussa Aktiengesellschaft Process for the dismutation of chlorosilanes
DE10061680A1 (de) * 2000-12-11 2002-06-20 Solarworld Ag Verfahren zur Herstellung von Silan
DE10062413A1 (de) * 2000-12-14 2002-07-04 Solarworld Ag Verfahren zur Herstellung von Trichlorsilan
FR2933714A1 (fr) * 2008-07-11 2010-01-15 Air Liquide Procede de recyclage de silane (sih4)
US8691055B2 (en) 2004-11-19 2014-04-08 Memc Electronic Materials Spa Processes for the purification of trichlorosilane or silicon tetrachloride
TWI472486B (zh) * 2006-03-02 2015-02-11 Memc Electronic Materials 用於純化三氯矽烷及四氯化矽之方法和裝置
CN108394904A (zh) * 2018-05-20 2018-08-14 宁波工程学院 一种圆台形冷却夹套的甲硅烷热分解炉
TWI637908B (zh) * 2012-04-27 2018-10-11 香港商各星有限公司 純化含鹵代矽烷流的方法
WO2021104618A1 (fr) 2019-11-27 2021-06-03 Wacker Chemie Ag Procédé permettant d'éliminer une impureté d'un mélange de chlorosilane
WO2021164876A1 (fr) 2020-02-20 2021-08-26 Wacker Chemie Ag Procédé d'obtention d'hexachlorodisilane par réaction d'au moins un chlorodisilane partiellement hydrogéné sur un adsorbeur solide non fonctionnalisé
WO2022096098A1 (fr) 2020-11-05 2022-05-12 Wacker Chemie Ag Procédé d'élimination d'une impureté d'un mélange de chlorosilane

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5094831A (en) * 1989-07-31 1992-03-10 Degussa Aktiengesellschaft Process for the dismutation of chlorosilanes
DE10061680A1 (de) * 2000-12-11 2002-06-20 Solarworld Ag Verfahren zur Herstellung von Silan
DE10062413A1 (de) * 2000-12-14 2002-07-04 Solarworld Ag Verfahren zur Herstellung von Trichlorsilan
US8691055B2 (en) 2004-11-19 2014-04-08 Memc Electronic Materials Spa Processes for the purification of trichlorosilane or silicon tetrachloride
TWI472486B (zh) * 2006-03-02 2015-02-11 Memc Electronic Materials 用於純化三氯矽烷及四氯化矽之方法和裝置
WO2009112730A3 (fr) * 2008-03-04 2010-02-25 L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude PROCEDE DE RECYCLAGE DE SILANE (SiH4)
FR2933714A1 (fr) * 2008-07-11 2010-01-15 Air Liquide Procede de recyclage de silane (sih4)
TWI637908B (zh) * 2012-04-27 2018-10-11 香港商各星有限公司 純化含鹵代矽烷流的方法
CN108394904A (zh) * 2018-05-20 2018-08-14 宁波工程学院 一种圆台形冷却夹套的甲硅烷热分解炉
WO2021104618A1 (fr) 2019-11-27 2021-06-03 Wacker Chemie Ag Procédé permettant d'éliminer une impureté d'un mélange de chlorosilane
WO2021164876A1 (fr) 2020-02-20 2021-08-26 Wacker Chemie Ag Procédé d'obtention d'hexachlorodisilane par réaction d'au moins un chlorodisilane partiellement hydrogéné sur un adsorbeur solide non fonctionnalisé
WO2022096098A1 (fr) 2020-11-05 2022-05-12 Wacker Chemie Ag Procédé d'élimination d'une impureté d'un mélange de chlorosilane

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