CA1156731A - Thick film capacitor adjustable by low energy laser beam and method of manufacture - Google Patents
Thick film capacitor adjustable by low energy laser beam and method of manufactureInfo
- Publication number
- CA1156731A CA1156731A CA000358543A CA358543A CA1156731A CA 1156731 A CA1156731 A CA 1156731A CA 000358543 A CA000358543 A CA 000358543A CA 358543 A CA358543 A CA 358543A CA 1156731 A CA1156731 A CA 1156731A
- Authority
- CA
- Canada
- Prior art keywords
- layer
- paste
- capacitor
- dielectric
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003990 capacitor Substances 0.000 title claims abstract description 56
- 238000000034 method Methods 0.000 title claims description 21
- 238000004519 manufacturing process Methods 0.000 title description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 17
- 125000002524 organometallic group Chemical group 0.000 claims abstract description 15
- 239000002245 particle Substances 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 238000010304 firing Methods 0.000 claims abstract description 6
- 238000009966 trimming Methods 0.000 claims description 10
- 238000012216 screening Methods 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 5
- 230000008016 vaporization Effects 0.000 claims 2
- 239000010410 layer Substances 0.000 description 52
- 229910052737 gold Inorganic materials 0.000 description 11
- 239000010931 gold Substances 0.000 description 11
- 239000010408 film Substances 0.000 description 9
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000000576 coating method Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- GNLCAVBZUNZENF-UHFFFAOYSA-N platinum silver Chemical compound [Ag].[Ag].[Ag].[Pt] GNLCAVBZUNZENF-UHFFFAOYSA-N 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000002730 additional effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000002844 continuous effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010981 drying operation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- JUWSSMXCCAMYGX-UHFFFAOYSA-N gold platinum Chemical compound [Pt].[Au] JUWSSMXCCAMYGX-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/008—Selection of materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/255—Means for correcting the capacitance value
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
- Y10T29/435—Solid dielectric type
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US073,404 | 1979-09-07 | ||
| US06/073,404 US4338506A (en) | 1979-09-07 | 1979-09-07 | Method of trimming thick film capacitor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1156731A true CA1156731A (en) | 1983-11-08 |
Family
ID=22113505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000358543A Expired CA1156731A (en) | 1979-09-07 | 1980-08-19 | Thick film capacitor adjustable by low energy laser beam and method of manufacture |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4338506A (enExample) |
| EP (1) | EP0035536B1 (enExample) |
| JP (1) | JPS6367329B2 (enExample) |
| CA (1) | CA1156731A (enExample) |
| DE (1) | DE3072007D1 (enExample) |
| WO (1) | WO1981000786A1 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3234895A1 (de) * | 1982-09-21 | 1984-03-22 | Siemens AG, 1000 Berlin und 8000 München | Elektrisches bauelement, insbesondere chip-bauelement und verfahren zur herstellung des bauelements |
| JPS60167491A (ja) * | 1984-02-10 | 1985-08-30 | 株式会社東芝 | 導体路形成方法 |
| US4741077A (en) * | 1987-05-15 | 1988-05-03 | Sfe Technologies | End terminations for capacitors |
| US4894316A (en) * | 1988-06-22 | 1990-01-16 | Electro-Films, Inc. | Adjustment of thin film capacitors |
| US5119538A (en) * | 1990-08-10 | 1992-06-09 | Ranco Incorporated Of Delaware | Method of making a temperature sensor |
| DE4031289A1 (de) * | 1990-10-04 | 1992-04-09 | Telefunken Electronic Gmbh | Oszillator |
| US5189261A (en) * | 1990-10-09 | 1993-02-23 | Ibm Corporation | Electrical and/or thermal interconnections and methods for obtaining such |
| US5231066A (en) * | 1991-09-11 | 1993-07-27 | Quantum Chemical Corporation | Bimodal silica gel, its preparation and use as a catalyst support |
| US5347423A (en) * | 1992-08-24 | 1994-09-13 | Murata Erie North America, Inc. | Trimmable composite multilayer capacitor and method |
| US6040226A (en) * | 1997-05-27 | 2000-03-21 | General Electric Company | Method for fabricating a thin film inductor |
| JP2000065789A (ja) * | 1998-08-25 | 2000-03-03 | Ngk Insulators Ltd | 一酸化炭素センサとその作製方法及び使用方法 |
| DE19913466A1 (de) * | 1999-03-25 | 2000-09-28 | Bosch Gmbh Robert | Auf einem Substrat aufgebaute Schichtenfolge in Dünnschichttechnologie |
| US6507477B1 (en) * | 2000-09-11 | 2003-01-14 | John E. Stauffer | Electrical capacitor |
| US7504150B2 (en) * | 2005-06-15 | 2009-03-17 | E.I. Du Pont De Nemours & Company | Polymer-based capacitor composites capable of being light-activated and receiving direct metalization, and methods and compositions related thereto |
| US7547849B2 (en) * | 2005-06-15 | 2009-06-16 | E.I. Du Pont De Nemours And Company | Compositions useful in electronic circuitry type applications, patternable using amplified light, and methods and compositions relating thereto |
| CN101336461B (zh) * | 2006-01-30 | 2011-07-20 | 株式会社村田制作所 | 多层陶瓷基板的内置电容器的电容值调整方法以及多层陶瓷基板及其制造方法 |
| US20080213605A1 (en) * | 2006-12-07 | 2008-09-04 | Briney Gary C | Multi-functional circuitry substrates and compositions and methods relating thereto |
| US8475924B2 (en) * | 2007-07-09 | 2013-07-02 | E.I. Du Pont De Nemours And Company | Compositions and methods for creating electronic circuitry |
| US20100193950A1 (en) * | 2009-01-30 | 2010-08-05 | E.I.Du Pont De Nemours And Company | Wafer level, chip scale semiconductor device packaging compositions, and methods relating thereto |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3330696A (en) * | 1967-07-11 | Method of fabricating thin film capacitors | ||
| GB262272A (en) * | 1925-12-15 | 1926-12-09 | Benjamin Hesketh | Improvements in and relating to the manufacture of electric condensers |
| BE415494A (enExample) * | 1934-03-15 | 1936-06-30 | ||
| US2235489A (en) * | 1936-09-28 | 1941-03-18 | Rath Werner | Ceramic electric insulating body |
| US2335714A (en) * | 1939-12-19 | 1943-11-30 | Voigtmann Walter | Electric condenser |
| GB558714A (en) * | 1942-07-14 | 1944-01-18 | Johnson Matthey Co Ltd | Improvements in the production of electrical condenser plates |
| US2919483A (en) * | 1955-03-21 | 1960-01-05 | Clevite Corp | Method of forming ceramic capacitors |
| US3192086A (en) * | 1960-06-16 | 1965-06-29 | Rca Corp | Methods for manufacturing multilayered monolithic ceramic bodies |
| US3379942A (en) * | 1964-11-13 | 1968-04-23 | Westinghouse Electric Corp | Dielectric glasses and capacitors employing such glasses |
| US3360398A (en) * | 1965-03-11 | 1967-12-26 | United Aircraft Corp | Fabrication of thin film devices |
| US3402448A (en) * | 1966-05-04 | 1968-09-24 | Bunker Ramo | Thin film capacitor and method of adjusting the capacitance thereof |
| US3600652A (en) * | 1969-01-24 | 1971-08-17 | Allen Bradley Co | Electrical capacitor |
| DE1938767B2 (de) * | 1969-07-30 | 1972-11-16 | Siemens AG, 1000 Berlin u. 8000 München | Verfahren zum abgleichen von elektrischenduennschicht-kondensatoren |
| US3597579A (en) * | 1970-06-25 | 1971-08-03 | Western Electric Co | Method of trimming capacitors |
| US3683245A (en) * | 1971-12-01 | 1972-08-08 | Du Pont | Hermetic printed capacitor |
| US3872360A (en) * | 1973-01-08 | 1975-03-18 | Du Pont | Capacitors with nickel containing electrodes |
| JPS5313601Y2 (enExample) * | 1973-05-24 | 1978-04-12 | ||
| US3947934A (en) * | 1973-07-20 | 1976-04-06 | Rca Corporation | Method of tuning a tunable microelectronic LC circuit |
| US3988651A (en) * | 1975-05-23 | 1976-10-26 | Erie Technological Products, Inc. | Monolithic ceramic capacitor |
| JPS5329565A (en) * | 1976-09-01 | 1978-03-18 | Hitachi Ltd | Hybrid integrated circuit unit |
| US4081653A (en) * | 1976-12-27 | 1978-03-28 | Western Electric Co., Inc. | Removal of thin films from substrates by laser induced explosion |
-
1979
- 1979-09-07 US US06/073,404 patent/US4338506A/en not_active Expired - Lifetime
-
1980
- 1980-08-15 JP JP55502095A patent/JPS6367329B2/ja not_active Expired
- 1980-08-15 DE DE8080901779T patent/DE3072007D1/de not_active Expired
- 1980-08-15 WO PCT/US1980/001052 patent/WO1981000786A1/en not_active Ceased
- 1980-08-19 CA CA000358543A patent/CA1156731A/en not_active Expired
-
1981
- 1981-03-23 EP EP80901779A patent/EP0035536B1/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US4338506A (en) | 1982-07-06 |
| WO1981000786A1 (en) | 1981-03-19 |
| JPS56501109A (enExample) | 1981-08-06 |
| EP0035536A1 (en) | 1981-09-16 |
| JPS6367329B2 (enExample) | 1988-12-26 |
| EP0035536B1 (en) | 1987-08-12 |
| DE3072007D1 (en) | 1987-09-17 |
| EP0035536A4 (en) | 1985-02-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |