CA1145057A - High voltage solid-state switch - Google Patents
High voltage solid-state switchInfo
- Publication number
- CA1145057A CA1145057A CA000363569A CA363569A CA1145057A CA 1145057 A CA1145057 A CA 1145057A CA 000363569 A CA000363569 A CA 000363569A CA 363569 A CA363569 A CA 363569A CA 1145057 A CA1145057 A CA 1145057A
- Authority
- CA
- Canada
- Prior art keywords
- region
- regions
- type
- semiconductor
- semiconductor body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims abstract description 42
- 230000009977 dual effect Effects 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 239000012535 impurity Substances 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 244000187656 Eucalyptus cornuta Species 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7391—Gated diode structures
- H01L29/7392—Gated diode structures with PN junction gate, e.g. field controlled thyristors (FCTh), static induction thyristors (SITh)
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thyristors (AREA)
- Bipolar Transistors (AREA)
- Use Of Switch Circuits For Exchanges And Methods Of Control Of Multiplex Exchanges (AREA)
- Junction Field-Effect Transistors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10777579A | 1979-12-28 | 1979-12-28 | |
| US107,775 | 1979-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1145057A true CA1145057A (en) | 1983-04-19 |
Family
ID=22318408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000363569A Expired CA1145057A (en) | 1979-12-28 | 1980-10-30 | High voltage solid-state switch |
Country Status (21)
| Country | Link |
|---|---|
| JP (1) | JPS56103467A (it) |
| KR (1) | KR840002413B1 (it) |
| AU (1) | AU534874B2 (it) |
| BE (1) | BE886821A (it) |
| CA (1) | CA1145057A (it) |
| CH (1) | CH652863A5 (it) |
| DD (1) | DD156039A5 (it) |
| DE (1) | DE3048702A1 (it) |
| DK (1) | DK549780A (it) |
| ES (1) | ES498097A0 (it) |
| FR (1) | FR2473790A1 (it) |
| GB (1) | GB2066569B (it) |
| HK (1) | HK69684A (it) |
| HU (1) | HU181246B (it) |
| IE (1) | IE50697B1 (it) |
| IL (1) | IL61780A (it) |
| IT (1) | IT1134896B (it) |
| NL (1) | NL8007051A (it) |
| PL (1) | PL228665A1 (it) |
| SE (1) | SE453621B (it) |
| SG (1) | SG35184G (it) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4467344A (en) * | 1981-12-23 | 1984-08-21 | At&T Bell Telephone Laboratories, Incorporated | Bidirectional switch using two gated diode switches in a single dielectrically isolated tub |
| US4573065A (en) * | 1982-12-10 | 1986-02-25 | At&T Bell Laboratories | Radial high voltage switch structure |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1039915A (en) * | 1964-05-25 | 1966-08-24 | Standard Telephones Cables Ltd | Improvements in or relating to semiconductor devices |
| US3417393A (en) * | 1967-10-18 | 1968-12-17 | Texas Instruments Inc | Integrated circuit modular radar antenna |
| DE2102103A1 (de) * | 1970-01-22 | 1971-07-29 | Rca Corp | Durch Feldeffekt gesteuerte Diode |
| JPS5135114B1 (it) * | 1970-12-28 | 1976-09-30 | ||
| US3725683A (en) * | 1971-02-03 | 1973-04-03 | Wescom | Discrete and integrated-type circuit |
| DE2133430A1 (de) * | 1971-07-05 | 1973-01-18 | Siemens Ag | Planar-vierschichtdiode |
| DE2241600A1 (de) * | 1971-08-26 | 1973-03-01 | Dionics Inc | Hochspannungs-p-n-uebergang und seine anwendung in halbleiterschaltelementen, sowie verfahren zu seiner herstellung |
| JPS5032942U (it) * | 1973-07-23 | 1975-04-10 | ||
| JPS5210061A (en) * | 1975-07-15 | 1977-01-26 | Hitachi Ltd | Thyristor circuit |
| US4130827A (en) * | 1976-12-03 | 1978-12-19 | Bell Telephone Laboratories, Incorporated | Integrated circuit switching network using low substrate leakage current thyristor construction |
| JPS5412682A (en) * | 1977-06-30 | 1979-01-30 | Nec Corp | Thyristor |
| GB1587540A (en) * | 1977-12-20 | 1981-04-08 | Philips Electronic Associated | Gate turn-off diodes and arrangements including such diodes |
| GB2049283B (en) * | 1978-12-20 | 1983-07-27 | Western Electric Co | High voltage dielectrically isolated solid-state switch |
-
1980
- 1980-10-30 CA CA000363569A patent/CA1145057A/en not_active Expired
- 1980-12-12 IE IE2604/80A patent/IE50697B1/en unknown
- 1980-12-16 GB GB8040186A patent/GB2066569B/en not_active Expired
- 1980-12-16 SE SE8008851A patent/SE453621B/sv not_active IP Right Cessation
- 1980-12-17 AU AU65449/80A patent/AU534874B2/en not_active Ceased
- 1980-12-19 CH CH9424/80A patent/CH652863A5/de not_active IP Right Cessation
- 1980-12-19 DD DD80226369A patent/DD156039A5/de unknown
- 1980-12-22 IL IL61780A patent/IL61780A/xx unknown
- 1980-12-22 PL PL22866580A patent/PL228665A1/xx unknown
- 1980-12-23 DK DK549780A patent/DK549780A/da not_active Application Discontinuation
- 1980-12-23 BE BE0/203288A patent/BE886821A/fr not_active IP Right Cessation
- 1980-12-23 DE DE19803048702 patent/DE3048702A1/de not_active Withdrawn
- 1980-12-23 ES ES498097A patent/ES498097A0/es active Granted
- 1980-12-23 HU HU80803113A patent/HU181246B/hu unknown
- 1980-12-24 FR FR8027441A patent/FR2473790A1/fr active Granted
- 1980-12-24 NL NL8007051A patent/NL8007051A/nl not_active Application Discontinuation
- 1980-12-24 IT IT26947/80A patent/IT1134896B/it active
- 1980-12-26 KR KR1019800004953A patent/KR840002413B1/ko active
- 1980-12-27 JP JP18942880A patent/JPS56103467A/ja active Pending
-
1984
- 1984-05-04 SG SG351/84A patent/SG35184G/en unknown
- 1984-09-06 HK HK696/84A patent/HK69684A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| HU181246B (en) | 1983-06-28 |
| SE453621B (sv) | 1988-02-15 |
| IT1134896B (it) | 1986-08-20 |
| CH652863A5 (de) | 1985-11-29 |
| DK549780A (da) | 1981-06-29 |
| NL8007051A (nl) | 1981-07-16 |
| IE802604L (en) | 1981-06-28 |
| IL61780A0 (en) | 1981-01-30 |
| IT8026947A0 (it) | 1980-12-24 |
| KR830004678A (ko) | 1983-07-16 |
| GB2066569B (en) | 1983-09-14 |
| ES8201376A1 (es) | 1981-12-16 |
| ES498097A0 (es) | 1981-12-16 |
| BE886821A (fr) | 1981-04-16 |
| FR2473790B1 (it) | 1985-03-08 |
| DD156039A5 (de) | 1982-07-21 |
| AU6544980A (en) | 1981-07-02 |
| HK69684A (en) | 1984-09-14 |
| IE50697B1 (en) | 1986-06-25 |
| AU534874B2 (en) | 1984-02-16 |
| IL61780A (en) | 1983-07-31 |
| FR2473790A1 (fr) | 1981-07-17 |
| JPS56103467A (en) | 1981-08-18 |
| GB2066569A (en) | 1981-07-08 |
| SG35184G (en) | 1985-02-08 |
| SE8008851L (sv) | 1981-06-29 |
| DE3048702A1 (de) | 1981-09-10 |
| PL228665A1 (it) | 1981-09-04 |
| KR840002413B1 (ko) | 1984-12-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |