CA1111373A - Preparation of cadmium stannate films - Google Patents
Preparation of cadmium stannate filmsInfo
- Publication number
- CA1111373A CA1111373A CA313,265A CA313265A CA1111373A CA 1111373 A CA1111373 A CA 1111373A CA 313265 A CA313265 A CA 313265A CA 1111373 A CA1111373 A CA 1111373A
- Authority
- CA
- Canada
- Prior art keywords
- cadmium
- sputtering
- target
- films
- tin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
- C03C17/2453—Coating containing SnO2
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
- Photovoltaic Devices (AREA)
- Manufacturing Of Electric Cables (AREA)
- Conductive Materials (AREA)
- Coating By Spraying Or Casting (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US87345178A | 1978-01-30 | 1978-01-30 | |
US873,451 | 1978-01-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1111373A true CA1111373A (en) | 1981-10-27 |
Family
ID=25361663
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA313,265A Expired CA1111373A (en) | 1978-01-30 | 1978-10-12 | Preparation of cadmium stannate films |
Country Status (11)
Country | Link |
---|---|
JP (1) | JPS54113096A (ja) |
AU (1) | AU521645B2 (ja) |
BE (1) | BE873761A (ja) |
BR (1) | BR7807832A (ja) |
CA (1) | CA1111373A (ja) |
DE (1) | DE2853875A1 (ja) |
ES (1) | ES477282A1 (ja) |
FR (1) | FR2415864A1 (ja) |
GB (1) | GB2013724B (ja) |
IT (1) | IT1113734B (ja) |
NL (1) | NL7811077A (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3103509C2 (de) * | 1981-02-03 | 1986-11-20 | Günter Dr. Dipl.-Phys. 7801 Buchenbach Kleer | Target zum Herstellen dünner Schichten, Verfahren zum Erzeugen des Targets und Verwendung des Targets |
JPS63114159U (ja) * | 1987-01-19 | 1988-07-22 | ||
US4806221A (en) * | 1987-03-26 | 1989-02-21 | Ppg Industries, Inc. | Sputtered films of bismuth/tin oxide |
GB2256282A (en) * | 1991-04-02 | 1992-12-02 | Elmwood Sensors | Electrochromic device. |
JPH04127042U (ja) * | 1991-05-14 | 1992-11-19 | 富士通テン株式会社 | 車載用部材の取付装置 |
US6761985B2 (en) * | 2000-10-05 | 2004-07-13 | Battelle Memorial Institute | Magnetic transparent conducting oxide film and method of making |
TWI310408B (en) * | 2004-12-23 | 2009-06-01 | Ind Tech Res Inst | Cadmium tin oxide multi-layer laminate and its producing method |
WO2009135114A2 (en) * | 2008-05-01 | 2009-11-05 | First Solar, Inc. | Transparent conductive materials including cadmium stannate |
US9276142B2 (en) | 2010-12-17 | 2016-03-01 | First Solar, Inc. | Methods for forming a transparent oxide layer for a photovoltaic device |
US8476105B2 (en) | 2010-12-22 | 2013-07-02 | General Electric Company | Method of making a transparent conductive oxide layer and a photovoltaic device |
CN114657423B (zh) * | 2022-03-15 | 2023-03-24 | 先导薄膜材料(广东)有限公司 | 一种CdSn合金靶材及其制备方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB732891A (en) * | 1949-03-25 | 1955-06-29 | Megatron Ltd | Improvements in and relating to the production of thin layers of chemical compounds on surfaces |
US4040927A (en) * | 1975-11-19 | 1977-08-09 | Honeywell Inc. | Cadmium tellurite thin films |
-
1978
- 1978-10-12 CA CA313,265A patent/CA1111373A/en not_active Expired
- 1978-10-18 GB GB7840996A patent/GB2013724B/en not_active Expired
- 1978-10-18 AU AU40817/78A patent/AU521645B2/en not_active Expired
- 1978-11-07 NL NL7811077A patent/NL7811077A/xx not_active Application Discontinuation
- 1978-11-15 FR FR7832284A patent/FR2415864A1/fr active Granted
- 1978-11-29 BR BR7807832A patent/BR7807832A/pt unknown
- 1978-12-13 DE DE19782853875 patent/DE2853875A1/de not_active Withdrawn
-
1979
- 1979-01-10 IT IT47571/79A patent/IT1113734B/it active
- 1979-01-29 BE BE0/193120A patent/BE873761A/xx not_active IP Right Cessation
- 1979-01-29 JP JP830679A patent/JPS54113096A/ja active Granted
- 1979-01-30 ES ES477282A patent/ES477282A1/es not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2415864B1 (ja) | 1983-11-18 |
IT7947571A0 (it) | 1979-01-10 |
DE2853875A1 (de) | 1979-08-02 |
AU4081778A (en) | 1980-04-24 |
FR2415864A1 (fr) | 1979-08-24 |
BE873761A (fr) | 1979-07-30 |
IT1113734B (it) | 1986-01-20 |
AU521645B2 (en) | 1982-04-22 |
JPS54113096A (en) | 1979-09-04 |
BR7807832A (pt) | 1979-07-31 |
JPS6146921B2 (ja) | 1986-10-16 |
ES477282A1 (es) | 1979-10-16 |
GB2013724A (en) | 1979-08-15 |
NL7811077A (nl) | 1979-08-01 |
GB2013724B (en) | 1982-10-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA1111373A (en) | Preparation of cadmium stannate films | |
US4065600A (en) | Metal oxide films | |
US4201649A (en) | Low resistance indium oxide coatings | |
Hjortsberg et al. | Transparent and heat-reflecting indium tin oxide films prepared by reactive electron beam evaporation | |
EP0657562A2 (en) | Durable sputtered metal oxide coating | |
US4990234A (en) | Process for coating substrates made of a transparent material, for example floatglass | |
CN100485082C (zh) | 一种直流磁控共溅射法制备ZnO:Al透明导电薄膜的方法 | |
JPS62122011A (ja) | 透明導電膜の製造方法 | |
GB2094355A (en) | Sputtered indium-tin oxide coating | |
US5965278A (en) | Method of making cathode targets comprising silicon | |
US4622120A (en) | Sputtered indium oxide films | |
Khan et al. | Optical properties at the metal‐insulator transition in thermochromic VO2− xFx thin films | |
US4400254A (en) | Method for preparing transparent, electrically conducting indium oxide (In2 O3) films | |
CA1328089C (en) | Sputtered films of bismuth/tin oxide | |
KR930001782B1 (ko) | 투명 도전막의 제조방법 및 그 제조장치 | |
US3749658A (en) | Method of fabricating transparent conductors | |
KR0179462B1 (ko) | 알칼리금속 확산 차단 층 | |
US5190631A (en) | Process for forming transparent silicon carbide films | |
US3630873A (en) | Sputtering of transparent conductive oxide films | |
Bichsel et al. | Electrical and optical properties of MoSe2 films prepared by rf magnetron sputtering | |
EP0020456B1 (en) | Transparent heat mirrors formed on polymeric substrates | |
KR820001343B1 (ko) | 전기전도성 주석산 카드뮴 박막의 제조방법 | |
JPH04503053A (ja) | 基層上に弗素含有ガラスを気相析出させる方法及びこの方法で析出させたガラス質組成物 | |
US4512864A (en) | Low resistance indium oxide films | |
Schmidt et al. | Superconducting properties of getter‐sputtered V3Al thin films as a function of sputtering gas, pressure, and substrate temperature |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MKEX | Expiry |