CA1059880A - Depot de produits semi-conducteurs solides et nouvelles substances semi-conductrices - Google Patents

Depot de produits semi-conducteurs solides et nouvelles substances semi-conductrices

Info

Publication number
CA1059880A
CA1059880A CA303,106A CA303106A CA1059880A CA 1059880 A CA1059880 A CA 1059880A CA 303106 A CA303106 A CA 303106A CA 1059880 A CA1059880 A CA 1059880A
Authority
CA
Canada
Prior art keywords
sih4
ash3
sbh3
geh4
insb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA303,106A
Other languages
English (en)
Inventor
Alexander J. Noreika
Maurice H. Francombe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CA203,408A external-priority patent/CA1036470A/fr
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Priority to CA303,106A priority Critical patent/CA1059880A/fr
Application granted granted Critical
Publication of CA1059880A publication Critical patent/CA1059880A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
CA303,106A 1974-06-25 1978-05-11 Depot de produits semi-conducteurs solides et nouvelles substances semi-conductrices Expired CA1059880A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA303,106A CA1059880A (fr) 1974-06-25 1978-05-11 Depot de produits semi-conducteurs solides et nouvelles substances semi-conductrices

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CA203,408A CA1036470A (fr) 1973-07-23 1974-06-25 Deposition de composes semiconducteurs solides d'un nouveau genre
CA303,106A CA1059880A (fr) 1974-06-25 1978-05-11 Depot de produits semi-conducteurs solides et nouvelles substances semi-conductrices

Publications (1)

Publication Number Publication Date
CA1059880A true CA1059880A (fr) 1979-08-07

Family

ID=25667611

Family Applications (1)

Application Number Title Priority Date Filing Date
CA303,106A Expired CA1059880A (fr) 1974-06-25 1978-05-11 Depot de produits semi-conducteurs solides et nouvelles substances semi-conductrices

Country Status (1)

Country Link
CA (1) CA1059880A (fr)

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