CA1002209A - Electron microscope for dark-field illumination - Google Patents

Electron microscope for dark-field illumination

Info

Publication number
CA1002209A
CA1002209A CA195,890A CA195890A CA1002209A CA 1002209 A CA1002209 A CA 1002209A CA 195890 A CA195890 A CA 195890A CA 1002209 A CA1002209 A CA 1002209A
Authority
CA
Canada
Prior art keywords
dark
electron microscope
field illumination
illumination
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA195,890A
Other languages
English (en)
Inventor
Karel J. Van Oostrum
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA1002209A publication Critical patent/CA1002209A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CA195,890A 1973-03-28 1974-03-25 Electron microscope for dark-field illumination Expired CA1002209A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7304298A NL7304298A (enrdf_load_stackoverflow) 1973-03-28 1973-03-28

Publications (1)

Publication Number Publication Date
CA1002209A true CA1002209A (en) 1976-12-21

Family

ID=19818520

Family Applications (1)

Application Number Title Priority Date Filing Date
CA195,890A Expired CA1002209A (en) 1973-03-28 1974-03-25 Electron microscope for dark-field illumination

Country Status (11)

Country Link
US (1) US3889114A (enrdf_load_stackoverflow)
JP (1) JPS49130668A (enrdf_load_stackoverflow)
BE (1) BE812849A (enrdf_load_stackoverflow)
CA (1) CA1002209A (enrdf_load_stackoverflow)
DE (1) DE2412675A1 (enrdf_load_stackoverflow)
ES (1) ES424663A1 (enrdf_load_stackoverflow)
FR (1) FR2223831B1 (enrdf_load_stackoverflow)
GB (1) GB1469777A (enrdf_load_stackoverflow)
IT (1) IT1003873B (enrdf_load_stackoverflow)
NL (1) NL7304298A (enrdf_load_stackoverflow)
SE (1) SE392365B (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2541915A1 (de) * 1975-09-19 1977-03-31 Max Planck Gesellschaft Korpuskularstrahlenmikroskop mit ringzonensegmentabbildung
JPS5248964A (en) * 1975-10-17 1977-04-19 Hitachi Ltd Transmission-type scanning electronic microscope
AT353519B (de) * 1978-03-07 1979-11-26 Oesterr Studien Atomenergie Einrichtung zur buendelung des primaerionen- strahls
JPS63298949A (ja) * 1987-05-28 1988-12-06 Jeol Ltd 広狭領域が同時観察可能な分析電子顕微鏡
JPH0233843A (ja) * 1988-07-25 1990-02-05 Hitachi Ltd 走査電子顕微鏡
JPH0594798A (ja) * 1991-05-21 1993-04-16 Jeol Ltd 焦点深度切り換え可能な電子顕微鏡等の電子光学観察装置
DE4412137A1 (de) * 1993-12-28 1995-10-26 Alexander Dr Zarubin Mikroskop, welches mit geladenen Teilchen arbeitet
US8642959B2 (en) * 2007-10-29 2014-02-04 Micron Technology, Inc. Method and system of performing three-dimensional imaging using an electron microscope
DE102009016861A1 (de) * 2009-04-08 2010-10-21 Carl Zeiss Nts Gmbh Teilchenstrahlmikroskop
CN103388406A (zh) * 2013-07-29 2013-11-13 苏州市世好建材新技术工程有限公司 插合式铺浆器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2464419A (en) * 1947-12-26 1949-03-15 Rca Corp Method of and apparatus for selectively achieving electronic darkfield and bright field illumation
DE2213208C3 (de) * 1972-03-16 1975-11-13 Max Planck Gesellschaft Rotationssymetrisches, sphärisch korrigiertes korpuskularstrahloptisches Abbildungssystem

Also Published As

Publication number Publication date
IT1003873B (it) 1976-06-10
NL7304298A (enrdf_load_stackoverflow) 1974-10-01
US3889114A (en) 1975-06-10
JPS49130668A (enrdf_load_stackoverflow) 1974-12-14
FR2223831A1 (enrdf_load_stackoverflow) 1974-10-25
SE392365B (sv) 1977-03-21
DE2412675A1 (de) 1974-10-10
ES424663A1 (es) 1976-06-01
BE812849A (fr) 1974-09-26
FR2223831B1 (enrdf_load_stackoverflow) 1977-09-30
GB1469777A (en) 1977-04-06

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