BR112022004171A2 - Guia de onda e método para fabricar uma ferramenta de grade mestra de guia de onda - Google Patents
Guia de onda e método para fabricar uma ferramenta de grade mestra de guia de ondaInfo
- Publication number
- BR112022004171A2 BR112022004171A2 BR112022004171A BR112022004171A BR112022004171A2 BR 112022004171 A2 BR112022004171 A2 BR 112022004171A2 BR 112022004171 A BR112022004171 A BR 112022004171A BR 112022004171 A BR112022004171 A BR 112022004171A BR 112022004171 A2 BR112022004171 A2 BR 112022004171A2
- Authority
- BR
- Brazil
- Prior art keywords
- waveguide
- grating
- profile
- master
- making
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0065—Manufacturing aspects; Material aspects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/0048—Moulds for lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00663—Production of light guides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
- B29D11/00769—Producing diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/0101—Head-up displays characterised by optical features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/017—Head mounted
- G02B27/0172—Head mounted characterised by optical features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4272—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having plural diffractive elements positioned sequentially along the optical path
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
- G02B5/1819—Plural gratings positioned on the same surface, e.g. array of gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
- G02B5/188—Plurality of such optical elements formed in or on a supporting substrate
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2011/00—Optical elements, e.g. lenses, prisms
- B29L2011/0075—Light guides, optical cables
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0081—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for altering, e.g. enlarging, the entrance or exit pupil
Abstract
guia de onda e método para fabricar uma ferramenta de grade mestra de guia de onda. é fornecido um método para fabricar uma ferramenta de impressão de grade mestra de guia de onda. o método compreende: revestir um substrato com pelo menos uma camada de fotorresistência; expor seletivamente um primeiro perfil mestre de grade de difração em uma primeira área da pelo menos uma camada de fotorresistência; expor seletivamente um segundo perfil mestre de grade de difração em uma segunda área da pelo menos uma camada de fotorresistência; e processar o substrato para formar o primeiro perfil mestre de grade de difração e o segundo perfil mestre de grade de difração. cada um dentre o primeiro perfil de grade de difração e o segundo perfil de grade de difração compreende uma borda entre o substrato e o respectivo perfil de grade que é substancialmente perpendicular à superfície de substrato e cada uma das bordas tem substancialmente a mesma altura que uma profundidade máxima do primeiro perfil mestre de grade de difração e do segundo perfil mestre de grade de difração.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1912820.6A GB2586851A (en) | 2019-09-06 | 2019-09-06 | Waveguide and method for fabricating a waveguide master grating tool |
EP19275099.0A EP3809039A1 (en) | 2019-10-17 | 2019-10-17 | Waveguide and method for fabricating a waveguide master grating tool |
PCT/GB2020/052003 WO2021044121A1 (en) | 2019-09-06 | 2020-08-20 | Waveguide and method for fabricating a waveguide master grating tool |
Publications (1)
Publication Number | Publication Date |
---|---|
BR112022004171A2 true BR112022004171A2 (pt) | 2022-05-31 |
Family
ID=72243163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR112022004171A BR112022004171A2 (pt) | 2019-09-06 | 2020-08-20 | Guia de onda e método para fabricar uma ferramenta de grade mestra de guia de onda |
Country Status (7)
Country | Link |
---|---|
US (1) | US20220317347A1 (pt) |
EP (1) | EP4025829A1 (pt) |
KR (1) | KR20220056235A (pt) |
BR (1) | BR112022004171A2 (pt) |
GB (1) | GB2589686B (pt) |
IL (1) | IL291117A (pt) |
WO (1) | WO2021044121A1 (pt) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0718706D0 (en) | 2007-09-25 | 2007-11-07 | Creative Physics Ltd | Method and apparatus for reducing laser speckle |
US9335604B2 (en) | 2013-12-11 | 2016-05-10 | Milan Momcilo Popovich | Holographic waveguide display |
US11726332B2 (en) | 2009-04-27 | 2023-08-15 | Digilens Inc. | Diffractive projection apparatus |
WO2012136970A1 (en) | 2011-04-07 | 2012-10-11 | Milan Momcilo Popovich | Laser despeckler based on angular diversity |
WO2016020630A2 (en) | 2014-08-08 | 2016-02-11 | Milan Momcilo Popovich | Waveguide laser illuminator incorporating a despeckler |
US20140204455A1 (en) | 2011-08-24 | 2014-07-24 | Milan Momcilo Popovich | Wearable data display |
WO2013102759A2 (en) | 2012-01-06 | 2013-07-11 | Milan Momcilo Popovich | Contact image sensor using switchable bragg gratings |
US9933684B2 (en) | 2012-11-16 | 2018-04-03 | Rockwell Collins, Inc. | Transparent waveguide display providing upper and lower fields of view having a specific light output aperture configuration |
WO2014188149A1 (en) | 2013-05-20 | 2014-11-27 | Milan Momcilo Popovich | Holographic waveguide eye tracker |
US9727772B2 (en) | 2013-07-31 | 2017-08-08 | Digilens, Inc. | Method and apparatus for contact image sensing |
US10241330B2 (en) | 2014-09-19 | 2019-03-26 | Digilens, Inc. | Method and apparatus for generating input images for holographic waveguide displays |
US20180275402A1 (en) | 2015-01-12 | 2018-09-27 | Digilens, Inc. | Holographic waveguide light field displays |
CN111323867A (zh) | 2015-01-12 | 2020-06-23 | 迪吉伦斯公司 | 环境隔离的波导显示器 |
JP6867947B2 (ja) | 2015-01-20 | 2021-05-12 | ディジレンズ インコーポレイテッド | ホログラフィック導波路ライダー |
US9632226B2 (en) | 2015-02-12 | 2017-04-25 | Digilens Inc. | Waveguide grating device |
WO2016146963A1 (en) | 2015-03-16 | 2016-09-22 | Popovich, Milan, Momcilo | Waveguide device incorporating a light pipe |
JP6598269B2 (ja) | 2015-10-05 | 2019-10-30 | ディジレンズ インコーポレイテッド | 導波管ディスプレイ |
JP6895451B2 (ja) | 2016-03-24 | 2021-06-30 | ディジレンズ インコーポレイテッド | 偏光選択ホログラフィー導波管デバイスを提供するための方法および装置 |
US11513350B2 (en) | 2016-12-02 | 2022-11-29 | Digilens Inc. | Waveguide device with uniform output illumination |
US10545346B2 (en) | 2017-01-05 | 2020-01-28 | Digilens Inc. | Wearable heads up displays |
KR20200108030A (ko) | 2018-01-08 | 2020-09-16 | 디지렌즈 인코포레이티드. | 도파관 셀 내의 홀로그래픽 격자의 높은 처리능력의 레코딩을 위한 시스템 및 방법 |
WO2019178614A1 (en) | 2018-03-16 | 2019-09-19 | Digilens Inc. | Holographic waveguides incorporating birefringence control and methods for their fabrication |
US11402801B2 (en) | 2018-07-25 | 2022-08-02 | Digilens Inc. | Systems and methods for fabricating a multilayer optical structure |
WO2020168348A1 (en) | 2019-02-15 | 2020-08-20 | Digilens Inc. | Methods and apparatuses for providing a holographic waveguide display using integrated gratings |
KR20210134763A (ko) | 2019-03-12 | 2021-11-10 | 디지렌즈 인코포레이티드. | 홀로그래픽 도파관 백라이트 및 관련된 제조 방법 |
US20200386947A1 (en) | 2019-06-07 | 2020-12-10 | Digilens Inc. | Waveguides Incorporating Transmissive and Reflective Gratings and Related Methods of Manufacturing |
KR20220038452A (ko) | 2019-07-29 | 2022-03-28 | 디지렌즈 인코포레이티드. | 픽셀화된 디스플레이의 이미지 해상도와 시야를 증배하는 방법 및 장치 |
JP2022546413A (ja) | 2019-08-29 | 2022-11-04 | ディジレンズ インコーポレイテッド | 真空回折格子および製造方法 |
WO2024046111A1 (zh) * | 2022-08-31 | 2024-03-07 | 上海鲲游科技有限公司 | 衍射光波导的制备方法、衍射光波导及压印母版 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1537703A (en) * | 1976-01-27 | 1979-01-04 | Rca Corp | Fabrication of rectangular relief profiles in photoresist |
US5710849A (en) * | 1995-11-01 | 1998-01-20 | Northern Telecom, Ltd. | Taper shapes for flatband response and sidelobe suppression in grating assisted optical coupler filters |
US7202076B2 (en) * | 2000-10-30 | 2007-04-10 | Sru Biosystems, Inc. | Label-free high-throughput optical technique for detecting biomolecular interactions |
US6869754B2 (en) * | 2001-10-23 | 2005-03-22 | Digital Optics Corp. | Transfer of optical element patterns on a same side of a substrate already having a feature thereon |
WO2012162286A1 (en) * | 2011-05-26 | 2012-11-29 | Corning Incorporated | High resolution label-free sensor |
CN102323634B (zh) * | 2011-10-19 | 2016-06-22 | 苏州大学 | 一种全息双闪耀光栅的制作方法 |
GB2500631B (en) * | 2012-03-27 | 2017-12-27 | Bae Systems Plc | Improvements in or relating to optical waveguides |
JP2014215375A (ja) * | 2013-04-24 | 2014-11-17 | 株式会社島津製作所 | レプリカ回折格子及びその製造方法 |
CN109239920A (zh) * | 2017-07-11 | 2019-01-18 | 苏州苏大维格光电科技股份有限公司 | 一种全息波导镜片及增强现实显示装置 |
-
2020
- 2020-08-20 US US17/753,353 patent/US20220317347A1/en active Pending
- 2020-08-20 EP EP20761881.0A patent/EP4025829A1/en active Pending
- 2020-08-20 KR KR1020227011317A patent/KR20220056235A/ko unknown
- 2020-08-20 WO PCT/GB2020/052003 patent/WO2021044121A1/en unknown
- 2020-08-20 GB GB2012998.7A patent/GB2589686B/en active Active
- 2020-08-20 BR BR112022004171A patent/BR112022004171A2/pt unknown
-
2022
- 2022-03-04 IL IL291117A patent/IL291117A/en unknown
Also Published As
Publication number | Publication date |
---|---|
KR20220056235A (ko) | 2022-05-04 |
GB202012998D0 (en) | 2020-10-07 |
EP4025829A1 (en) | 2022-07-13 |
IL291117A (en) | 2022-05-01 |
GB2589686B (en) | 2023-05-10 |
GB2589686A (en) | 2021-06-09 |
WO2021044121A1 (en) | 2021-03-11 |
US20220317347A1 (en) | 2022-10-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
BR112022004171A2 (pt) | Guia de onda e método para fabricar uma ferramenta de grade mestra de guia de onda | |
BR112017019141A2 (pt) | chapa de aço elétrico com grão orientado | |
ES2633849T3 (es) | Inserto de corte que tiene depresiones de holgura cóncava formadas en las superficies laterales de esquina | |
MY193683A (en) | Ventilation boards and methods for manufacturing ventilation board | |
ES2068629T3 (es) | Procedimiento para el mecanizado de precision de superficies de piezas. | |
ATE512747T1 (de) | Verfahren zum formen eines oder mehrerer getrennten ritze in einer oberfläche eines substrats | |
ES2028868T3 (es) | Estructura de pared o de forro. | |
BR112018014807A2 (pt) | método para fabricar artigo moldado por prensa e aparelho de prensa | |
BR112019004688A2 (pt) | elemento de cobertura de concreto para uma construção de quebra-mar ou píer, e, construção de quebra-mar ou píer. | |
EP3126893A1 (en) | Focus measurements using scatterometry metrology | |
BR112018009346A2 (pt) | ferramenta de corte e inserto de corte indexável em forma triangular para a mesma | |
FI3687791T3 (fi) | Kipsilevyt, joissa on sisäisiä kerroksia, ja menetelmiä niiden valmistamiseksi | |
KR102345170B1 (ko) | 기판의 가공방법 | |
BR112018014879A2 (pt) | método de rebarbação e dispositivo de rebarbação | |
ATE501804T1 (de) | Wendeschneidplatte, verwendung einer solchen wendeschneidplatte in einem fräswerkzeug sowie fräswerkzeug mit der wendescheidplatte | |
BR112022011935A2 (pt) | Método para determinar espessura de filme, método para produzir um filme e dispositivo para produzir um filme | |
EA202190254A1 (ru) | Способ изготовления панелей из плиты, нажимная пластина, способ изготовления плиты и плита | |
BR112021017371A2 (pt) | Dispositivo e processo para a criação de uma pluralidade de sulcos | |
CN106002039A (zh) | 用于薄板切割的胎具及薄板切割方法 | |
CN104216233A (zh) | 曝光方法 | |
BR112022015741A2 (pt) | Método e máquina para produção de relevos, bem como painéis | |
BR112017002877A2 (pt) | placas de impressão flexográfica limpa e método para fabricação das mesmas | |
US10414685B2 (en) | Substrate processing method | |
CN105182681A (zh) | 一种掩模板及在同一硅片上加工多种深度结构的方法 | |
BR112022004134A2 (pt) | Guia de onda e método para fabricar uma guia de onda |