BR112018009435B1 - Método e dispositivo para detecção de vazamento com oxigênio - Google Patents
Método e dispositivo para detecção de vazamento com oxigênio Download PDFInfo
- Publication number
- BR112018009435B1 BR112018009435B1 BR112018009435-8A BR112018009435A BR112018009435B1 BR 112018009435 B1 BR112018009435 B1 BR 112018009435B1 BR 112018009435 A BR112018009435 A BR 112018009435A BR 112018009435 B1 BR112018009435 B1 BR 112018009435B1
- Authority
- BR
- Brazil
- Prior art keywords
- oxygen
- test
- gas
- test chamber
- test object
- Prior art date
Links
- 239000001301 oxygen Substances 0.000 title claims abstract description 93
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 93
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 92
- 238000000034 method Methods 0.000 title claims abstract description 36
- 238000001514 detection method Methods 0.000 title claims abstract description 12
- 238000012360 testing method Methods 0.000 claims abstract description 170
- 239000007789 gas Substances 0.000 claims abstract description 70
- 239000012159 carrier gas Substances 0.000 claims description 26
- 239000000523 sample Substances 0.000 claims description 16
- 238000009825 accumulation Methods 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 10
- 238000011161 development Methods 0.000 claims description 4
- 230000002123 temporal effect Effects 0.000 claims description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims 2
- 229910002092 carbon dioxide Inorganic materials 0.000 claims 1
- 239000001569 carbon dioxide Substances 0.000 claims 1
- 238000013016 damping Methods 0.000 claims 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
- G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F17/00—Methods or apparatus for determining the capacity of containers or cavities, or the volume of solid bodies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
- G01M3/3236—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers
- G01M3/3263—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers using a differential pressure detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
- G01M3/3281—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators removably mounted in a test cell
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Examining Or Testing Airtightness (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102015222554.2 | 2015-11-16 | ||
| DE102015222554.2A DE102015222554A1 (de) | 2015-11-16 | 2015-11-16 | Lecksuche mit Sauerstoff |
| PCT/EP2016/077414 WO2017084974A1 (de) | 2015-11-16 | 2016-11-11 | Lecksuche mit sauerstoff |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| BR112018009435A2 BR112018009435A2 (pt) | 2018-12-04 |
| BR112018009435B1 true BR112018009435B1 (pt) | 2022-11-29 |
Family
ID=57281233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BR112018009435-8A BR112018009435B1 (pt) | 2015-11-16 | 2016-11-11 | Método e dispositivo para detecção de vazamento com oxigênio |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10935453B2 (https=) |
| EP (1) | EP3377870B1 (https=) |
| JP (1) | JP6878425B2 (https=) |
| KR (1) | KR102733784B1 (https=) |
| CN (1) | CN108369152A (https=) |
| BR (1) | BR112018009435B1 (https=) |
| DE (1) | DE102015222554A1 (https=) |
| WO (1) | WO2017084974A1 (https=) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3068781A1 (fr) | 2017-07-06 | 2019-01-11 | Ateq | Procede de detection de fuite d'une piece creuse et installation pour la mise en œuvre d'un tel procede |
| FR3073623B1 (fr) | 2017-11-16 | 2019-11-08 | Ateq | Installation et procede de detection et de localisation de fuite dans un circuit de transport d'un fluide, notamment d'un aeronef |
| EP3567356B1 (en) * | 2018-05-07 | 2021-02-24 | Inficon GmbH | Sniffing leak detector with switching valve and buffer chamber |
| EP3844512B1 (en) | 2018-08-31 | 2023-10-11 | Ateq Corporation | Battery leak test device and methods |
| FR3092171B1 (fr) | 2019-01-29 | 2021-04-30 | Ateq | Système de détection de fuite par gaz traceur et utilisation correspondante. |
| FR3106661B1 (fr) | 2020-01-28 | 2022-01-21 | Ateq | Dispositif de détection de fuites |
| DE102020119600A1 (de) * | 2020-07-24 | 2022-01-27 | Inficon Gmbh | Vakuumlecksuchsystem, Gassteuereinheit und Verfahren zur Gaslecksuche |
| CN121558257B (zh) * | 2026-01-26 | 2026-04-07 | 上海车仪田科技有限公司 | 一种半导体腔室的漏率检测方法及检测系统 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5170660A (en) * | 1987-10-28 | 1992-12-15 | Martin Lehmann | Process and apparatus for volume-testing a hollow body |
| DE19719390A1 (de) | 1997-05-07 | 1998-11-12 | Bayerische Motoren Werke Ag | Verfahren zur Überprüfung der Funktionsfähigkeit der elektrischen Heizung einer Lambda-Sonde im Abgasrohr einer Brennkraftmaschine |
| DE19960174A1 (de) | 1999-12-14 | 2001-06-28 | Leybold Vakuum Gmbh | Verfahren zur Lecksuche und Lecklokalisierung sowie zur Durchführung dieser Verfahren geeignete Vorrichtungen |
| US20040040372A1 (en) * | 2002-08-30 | 2004-03-04 | George Plester | Method for determining the permeation of gases into or out of plastic packages and for determination of shelf-life with respect to gas permeation |
| DE10240295B4 (de) * | 2002-08-31 | 2008-01-24 | Applied Materials Gmbh & Co. Kg | Verfahren und Vorrichtung für die Bestimmung der Gasdurchlässigkeit eines Behälters |
| DE102004045803A1 (de) | 2004-09-22 | 2006-04-06 | Inficon Gmbh | Leckprüfverfahren und Leckprüfvorrichtung |
| CN1664563A (zh) * | 2004-12-31 | 2005-09-07 | 合肥东能光电科技有限公司 | 一种六氟化硫(sf6)气体检测方法 |
| DE102007057944A1 (de) * | 2007-12-01 | 2009-06-04 | Inficon Gmbh | Verfahren und Vorrichtung zur Dichtheitsprüfung |
| CN101476966B (zh) * | 2009-01-23 | 2011-12-14 | 黄若 | 涡轮增压器漏气测量装置及方法 |
| CN201594030U (zh) * | 2009-11-06 | 2010-09-29 | 卧龙电气集团股份有限公司 | 无氧干燥窑内氧含量检测装置 |
| JP2011179975A (ja) | 2010-03-01 | 2011-09-15 | Ts:Kk | 漏れ検査装置及び漏れ検査方法 |
| US8806919B2 (en) * | 2011-07-29 | 2014-08-19 | Vacuum Technology Inc. | Leak detection apparatus and method |
| FR2993659B1 (fr) | 2012-07-23 | 2014-08-08 | Adixen Vacuum Products | Procede et installation de detection pour le controle d'etancheite d'emballages de produits scelles |
| WO2014038192A1 (ja) * | 2012-09-04 | 2014-03-13 | アトナープ株式会社 | リーク検査を行うシステムおよび方法 |
| JP2015040836A (ja) * | 2013-08-23 | 2015-03-02 | 株式会社フクダ | 水素リークテスト方法及び装置 |
-
2015
- 2015-11-16 DE DE102015222554.2A patent/DE102015222554A1/de not_active Withdrawn
-
2016
- 2016-11-11 JP JP2018525397A patent/JP6878425B2/ja active Active
- 2016-11-11 US US15/776,299 patent/US10935453B2/en active Active
- 2016-11-11 CN CN201680065738.3A patent/CN108369152A/zh active Pending
- 2016-11-11 EP EP16794354.7A patent/EP3377870B1/de active Active
- 2016-11-11 BR BR112018009435-8A patent/BR112018009435B1/pt active IP Right Grant
- 2016-11-11 WO PCT/EP2016/077414 patent/WO2017084974A1/de not_active Ceased
- 2016-11-11 KR KR1020187016316A patent/KR102733784B1/ko active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP6878425B2 (ja) | 2021-05-26 |
| BR112018009435A2 (pt) | 2018-12-04 |
| US20180328810A1 (en) | 2018-11-15 |
| EP3377870A1 (de) | 2018-09-26 |
| CN108369152A (zh) | 2018-08-03 |
| DE102015222554A1 (de) | 2017-05-18 |
| EP3377870B1 (de) | 2021-03-17 |
| US10935453B2 (en) | 2021-03-02 |
| JP2018533741A (ja) | 2018-11-15 |
| WO2017084974A1 (de) | 2017-05-26 |
| KR102733784B1 (ko) | 2024-11-22 |
| KR20180082524A (ko) | 2018-07-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| B06U | Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette] | ||
| B07A | Application suspended after technical examination (opinion) [chapter 7.1 patent gazette] | ||
| B09A | Decision: intention to grant [chapter 9.1 patent gazette] | ||
| B16A | Patent or certificate of addition of invention granted [chapter 16.1 patent gazette] |
Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 11/11/2016, OBSERVADAS AS CONDICOES LEGAIS |