DE102015222554A1 - Lecksuche mit Sauerstoff - Google Patents

Lecksuche mit Sauerstoff Download PDF

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Publication number
DE102015222554A1
DE102015222554A1 DE102015222554.2A DE102015222554A DE102015222554A1 DE 102015222554 A1 DE102015222554 A1 DE 102015222554A1 DE 102015222554 A DE102015222554 A DE 102015222554A DE 102015222554 A1 DE102015222554 A1 DE 102015222554A1
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DE
Germany
Prior art keywords
test
oxygen
gas
test chamber
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102015222554.2A
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German (de)
English (en)
Inventor
Daniel Wetzig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Priority to DE102015222554.2A priority Critical patent/DE102015222554A1/de
Priority to US15/776,299 priority patent/US10935453B2/en
Priority to PCT/EP2016/077414 priority patent/WO2017084974A1/de
Priority to CN201680065738.3A priority patent/CN108369152A/zh
Priority to KR1020187016316A priority patent/KR102733784B1/ko
Priority to JP2018525397A priority patent/JP6878425B2/ja
Priority to EP16794354.7A priority patent/EP3377870B1/de
Priority to BR112018009435-8A priority patent/BR112018009435B1/pt
Publication of DE102015222554A1 publication Critical patent/DE102015222554A1/de
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F17/00—Methods or apparatus for determining the capacity of containers or cavities, or the volume of solid bodies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/3236—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers
    • G01M3/3263—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers using a differential pressure detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/3281—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators removably mounted in a test cell

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Examining Or Testing Airtightness (AREA)
DE102015222554.2A 2015-11-16 2015-11-16 Lecksuche mit Sauerstoff Withdrawn DE102015222554A1 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE102015222554.2A DE102015222554A1 (de) 2015-11-16 2015-11-16 Lecksuche mit Sauerstoff
US15/776,299 US10935453B2 (en) 2015-11-16 2016-11-11 Leak detection with oxygen
PCT/EP2016/077414 WO2017084974A1 (de) 2015-11-16 2016-11-11 Lecksuche mit sauerstoff
CN201680065738.3A CN108369152A (zh) 2015-11-16 2016-11-11 用氧气进行泄漏检测
KR1020187016316A KR102733784B1 (ko) 2015-11-16 2016-11-11 산소를 이용한 누출 검출 방법과 장치
JP2018525397A JP6878425B2 (ja) 2015-11-16 2016-11-11 酸素を用いたリーク検知
EP16794354.7A EP3377870B1 (de) 2015-11-16 2016-11-11 Lecksuche mit sauerstoff
BR112018009435-8A BR112018009435B1 (pt) 2015-11-16 2016-11-11 Método e dispositivo para detecção de vazamento com oxigênio

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102015222554.2A DE102015222554A1 (de) 2015-11-16 2015-11-16 Lecksuche mit Sauerstoff

Publications (1)

Publication Number Publication Date
DE102015222554A1 true DE102015222554A1 (de) 2017-05-18

Family

ID=57281233

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102015222554.2A Withdrawn DE102015222554A1 (de) 2015-11-16 2015-11-16 Lecksuche mit Sauerstoff

Country Status (8)

Country Link
US (1) US10935453B2 (https=)
EP (1) EP3377870B1 (https=)
JP (1) JP6878425B2 (https=)
KR (1) KR102733784B1 (https=)
CN (1) CN108369152A (https=)
BR (1) BR112018009435B1 (https=)
DE (1) DE102015222554A1 (https=)
WO (1) WO2017084974A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121558257A (zh) * 2026-01-26 2026-02-24 上海车仪田科技有限公司 一种半导体腔室的漏率检测方法及检测系统

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3068781A1 (fr) 2017-07-06 2019-01-11 Ateq Procede de detection de fuite d'une piece creuse et installation pour la mise en œuvre d'un tel procede
FR3073623B1 (fr) 2017-11-16 2019-11-08 Ateq Installation et procede de detection et de localisation de fuite dans un circuit de transport d'un fluide, notamment d'un aeronef
EP3567356B1 (en) * 2018-05-07 2021-02-24 Inficon GmbH Sniffing leak detector with switching valve and buffer chamber
EP3844512B1 (en) 2018-08-31 2023-10-11 Ateq Corporation Battery leak test device and methods
FR3092171B1 (fr) 2019-01-29 2021-04-30 Ateq Système de détection de fuite par gaz traceur et utilisation correspondante.
FR3106661B1 (fr) 2020-01-28 2022-01-21 Ateq Dispositif de détection de fuites
DE102020119600A1 (de) * 2020-07-24 2022-01-27 Inficon Gmbh Vakuumlecksuchsystem, Gassteuereinheit und Verfahren zur Gaslecksuche

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001044775A1 (de) 1999-12-14 2001-06-21 Inficon Gmbh Verfahren zur lecksuche und lecklokalisierung sowie zur durchführung dieser verfahren geeignete vorrichtungen
US20150211955A1 (en) * 2012-07-23 2015-07-30 Adixen Vacuum Products Detection method and facility for checking sealed products for leaks

Family Cites Families (13)

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US5170660A (en) * 1987-10-28 1992-12-15 Martin Lehmann Process and apparatus for volume-testing a hollow body
DE19719390A1 (de) 1997-05-07 1998-11-12 Bayerische Motoren Werke Ag Verfahren zur Überprüfung der Funktionsfähigkeit der elektrischen Heizung einer Lambda-Sonde im Abgasrohr einer Brennkraftmaschine
US20040040372A1 (en) * 2002-08-30 2004-03-04 George Plester Method for determining the permeation of gases into or out of plastic packages and for determination of shelf-life with respect to gas permeation
DE10240295B4 (de) * 2002-08-31 2008-01-24 Applied Materials Gmbh & Co. Kg Verfahren und Vorrichtung für die Bestimmung der Gasdurchlässigkeit eines Behälters
DE102004045803A1 (de) 2004-09-22 2006-04-06 Inficon Gmbh Leckprüfverfahren und Leckprüfvorrichtung
CN1664563A (zh) * 2004-12-31 2005-09-07 合肥东能光电科技有限公司 一种六氟化硫(sf6)气体检测方法
DE102007057944A1 (de) * 2007-12-01 2009-06-04 Inficon Gmbh Verfahren und Vorrichtung zur Dichtheitsprüfung
CN101476966B (zh) * 2009-01-23 2011-12-14 黄若 涡轮增压器漏气测量装置及方法
CN201594030U (zh) * 2009-11-06 2010-09-29 卧龙电气集团股份有限公司 无氧干燥窑内氧含量检测装置
JP2011179975A (ja) 2010-03-01 2011-09-15 Ts:Kk 漏れ検査装置及び漏れ検査方法
US8806919B2 (en) * 2011-07-29 2014-08-19 Vacuum Technology Inc. Leak detection apparatus and method
WO2014038192A1 (ja) * 2012-09-04 2014-03-13 アトナープ株式会社 リーク検査を行うシステムおよび方法
JP2015040836A (ja) * 2013-08-23 2015-03-02 株式会社フクダ 水素リークテスト方法及び装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001044775A1 (de) 1999-12-14 2001-06-21 Inficon Gmbh Verfahren zur lecksuche und lecklokalisierung sowie zur durchführung dieser verfahren geeignete vorrichtungen
US20150211955A1 (en) * 2012-07-23 2015-07-30 Adixen Vacuum Products Detection method and facility for checking sealed products for leaks

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121558257A (zh) * 2026-01-26 2026-02-24 上海车仪田科技有限公司 一种半导体腔室的漏率检测方法及检测系统

Also Published As

Publication number Publication date
JP6878425B2 (ja) 2021-05-26
BR112018009435A2 (pt) 2018-12-04
US20180328810A1 (en) 2018-11-15
EP3377870A1 (de) 2018-09-26
CN108369152A (zh) 2018-08-03
EP3377870B1 (de) 2021-03-17
US10935453B2 (en) 2021-03-02
BR112018009435B1 (pt) 2022-11-29
JP2018533741A (ja) 2018-11-15
WO2017084974A1 (de) 2017-05-26
KR102733784B1 (ko) 2024-11-22
KR20180082524A (ko) 2018-07-18

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R005 Application deemed withdrawn due to failure to request examination