BR112014013533A2 - processo de pulverização catódica reativa - Google Patents
processo de pulverização catódica reativaInfo
- Publication number
- BR112014013533A2 BR112014013533A2 BR112014013533A BR112014013533A BR112014013533A2 BR 112014013533 A2 BR112014013533 A2 BR 112014013533A2 BR 112014013533 A BR112014013533 A BR 112014013533A BR 112014013533 A BR112014013533 A BR 112014013533A BR 112014013533 A2 BR112014013533 A2 BR 112014013533A2
- Authority
- BR
- Brazil
- Prior art keywords
- target
- target surface
- reactive sputtering
- pulse
- voltage pulse
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3464—Operating strategies
- H01J37/3467—Pulsed operation, e.g. HIPIMS
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0094—Reactive sputtering in transition mode
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3485—Sputtering using pulsed power to the target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3492—Variation of parameters during sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3476—Testing and control
- H01J37/3485—Means for avoiding target poisoning
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
resumo patente de invenção: "processo de pulverização catódica reativa". a presente invenção refere-se a um processo para a pulverização catódica reativa, no qual um material é expelido da superfície de um primeiro alvo e passa para a fase gasosa, sendo que tensão negativa é aplicada à maneira de pulsos ao alvo, de modo que na superfície do alvo ocorre uma corrente elétrica com uma densidade maior do que 0,5a/cm2, e o material que está passando para a fase gasosa está parcialmente ionizado e no qual é formado um fluxo de gás reativo e o mesmo reage com o material da superfície do alvo, em que a duração de um pulso de tensão é selecionada de tal modo que durante o pulso de tensão, a superfície do alvo, no ou nos ponto(s), nos quais ocorre a corrente está coberta, pelo menos parcialmente, com um composto de gás reativo e material de alvo e, portanto, a superfície do alvo está em um primeiro estado intermediário e essa cobertura é menor no final do pulso de tensão do que no início e, portanto, no final do referido pulso de tensão, a superfície do alvo está em um segundo estado intermediário.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161566836P | 2011-12-05 | 2011-12-05 | |
| US61/566,836 | 2011-12-05 | ||
| PCT/EP2012/004848 WO2013083238A1 (de) | 2011-12-05 | 2012-11-23 | Reaktiver sputterprozess |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| BR112014013533A8 BR112014013533A8 (pt) | 2017-06-13 |
| BR112014013533A2 true BR112014013533A2 (pt) | 2017-06-13 |
| BR112014013533B1 BR112014013533B1 (pt) | 2021-09-08 |
Family
ID=47504785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BR112014013533-9A BR112014013533B1 (pt) | 2011-12-05 | 2012-11-23 | Processo de pulverização catódica reativa, e seu processo de regulação |
Country Status (18)
| Country | Link |
|---|---|
| US (1) | US10458015B2 (pt) |
| EP (1) | EP2789006B1 (pt) |
| JP (1) | JP6113743B2 (pt) |
| KR (1) | KR101990658B1 (pt) |
| CN (1) | CN104272429B (pt) |
| AR (1) | AR089044A1 (pt) |
| BR (1) | BR112014013533B1 (pt) |
| CA (1) | CA2858251C (pt) |
| ES (1) | ES2704121T3 (pt) |
| MX (1) | MX368733B (pt) |
| MY (1) | MY181526A (pt) |
| PH (1) | PH12014501269A1 (pt) |
| PL (1) | PL2789006T3 (pt) |
| RU (1) | RU2632210C2 (pt) |
| SG (1) | SG11201402945YA (pt) |
| SI (1) | SI2789006T1 (pt) |
| TW (1) | TWI565816B (pt) |
| WO (1) | WO2013083238A1 (pt) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5871103B2 (ja) * | 2013-06-04 | 2016-03-01 | 株式会社村田製作所 | 薄膜形成方法 |
| KR101891900B1 (ko) * | 2013-07-03 | 2018-09-28 | 외를리콘 서피스 솔루션즈 아게, 페피콘 | TixSi1-xN 층 및 그의 생산 |
| DE102016012460A1 (de) | 2016-10-19 | 2018-04-19 | Grenzebach Maschinenbau Gmbh | Vorrichtung und Verfahren zur Herstellung definierter Eigenschaften von Gradientenschichten in einem System mehrlagiger Beschichtungen bei Sputter - Anlagen |
| EP3406761A1 (en) | 2017-05-24 | 2018-11-28 | Walter Ag | A method for producing a coated cutting tool and a coated cutting tool |
| CN110184571A (zh) * | 2019-05-07 | 2019-08-30 | 天津君盛天成科技发展有限公司 | 高功率脉冲涂装方法 |
| WO2021160337A1 (en) * | 2020-02-11 | 2021-08-19 | Oerlikon Surface Solutions Ag, Pfäffikon | Method of surface smoothening of additive manufactured metal components |
| CN111621756B (zh) * | 2020-03-27 | 2021-12-24 | 中国科学院力学研究所 | 一种室温溅射制备晶态透明氧化铝薄膜的方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3700633C2 (de) * | 1987-01-12 | 1997-02-20 | Reinar Dr Gruen | Verfahren und Vorrichtung zum schonenden Beschichten elektrisch leitender Gegenstände mittels Plasma |
| DE19610012B4 (de) * | 1996-03-14 | 2005-02-10 | Unaxis Deutschland Holding Gmbh | Verfahren zur Stabilisierung eines Arbeitspunkts beim reaktiven Zerstäuben in einer Sauerstoff enthaltenden Atmosphäre |
| SE521095C2 (sv) | 2001-06-08 | 2003-09-30 | Cardinal Cg Co | Förfarande för reaktiv sputtring |
| US8025775B2 (en) * | 2002-03-15 | 2011-09-27 | Oerlikon Trading Ag, Truebbach | Vacuum plasma generator |
| JP3866615B2 (ja) * | 2002-05-29 | 2007-01-10 | 株式会社神戸製鋼所 | 反応性スパッタリング方法及び装置 |
| US20050103620A1 (en) * | 2003-11-19 | 2005-05-19 | Zond, Inc. | Plasma source with segmented magnetron cathode |
| US8500965B2 (en) * | 2004-05-06 | 2013-08-06 | Ppg Industries Ohio, Inc. | MSVD coating process |
| DE102006017382A1 (de) | 2005-11-14 | 2007-05-16 | Itg Induktionsanlagen Gmbh | Verfahren und Vorrichtung zum Beschichten und/oder zur Behandlung von Oberflächen |
| GB0608582D0 (en) * | 2006-05-02 | 2006-06-07 | Univ Sheffield Hallam | High power impulse magnetron sputtering vapour deposition |
| DE102006061324B4 (de) * | 2006-06-20 | 2008-07-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Regelung eines reaktiven Hochleistungs-Puls-Magnetronsputterprozesses und Vorrichtung hierzu |
| SE533395C2 (sv) * | 2007-06-08 | 2010-09-14 | Sandvik Intellectual Property | Sätt att göra PVD-beläggningar |
| US7685852B2 (en) | 2007-06-28 | 2010-03-30 | Rahamim Komemi | Tool for pin tumbler locks |
| US9039871B2 (en) * | 2007-11-16 | 2015-05-26 | Advanced Energy Industries, Inc. | Methods and apparatus for applying periodic voltage using direct current |
| KR101923221B1 (ko) * | 2007-12-07 | 2018-11-28 | 에바텍 아크티엔게젤샤프트 | Ｈｉｐｉｍｓ를 이용한 반응성 스퍼터링 |
| JP2010065240A (ja) * | 2008-09-08 | 2010-03-25 | Kobe Steel Ltd | スパッタ装置 |
| DE202010001497U1 (de) * | 2010-01-29 | 2010-04-22 | Hauzer Techno-Coating B.V. | Beschichtungsvorrichtung mit einer HIPIMS-Leistungsquelle |
| BR112013026962B1 (pt) | 2011-04-20 | 2021-02-09 | Oerlikon Surface Solutions Ag, Pfäffikon | método para prover pulsos de potência com intervalo de pulso de potência graduável para operar um cátodo de pulverização e método hipims |
-
2012
- 2012-11-23 RU RU2014127520A patent/RU2632210C2/ru active
- 2012-11-23 ES ES12810067T patent/ES2704121T3/es active Active
- 2012-11-23 SG SG11201402945YA patent/SG11201402945YA/en unknown
- 2012-11-23 CN CN201280069085.8A patent/CN104272429B/zh active Active
- 2012-11-23 JP JP2014545125A patent/JP6113743B2/ja not_active Expired - Fee Related
- 2012-11-23 SI SI201231461T patent/SI2789006T1/sl unknown
- 2012-11-23 CA CA2858251A patent/CA2858251C/en not_active Expired - Fee Related
- 2012-11-23 BR BR112014013533-9A patent/BR112014013533B1/pt active IP Right Grant
- 2012-11-23 WO PCT/EP2012/004848 patent/WO2013083238A1/de active Application Filing
- 2012-11-23 US US14/362,758 patent/US10458015B2/en active Active
- 2012-11-23 MY MYPI2014001644A patent/MY181526A/en unknown
- 2012-11-23 PL PL12810067T patent/PL2789006T3/pl unknown
- 2012-11-23 EP EP12810067.4A patent/EP2789006B1/de active Active
- 2012-11-23 MX MX2014006729A patent/MX368733B/es active IP Right Grant
- 2012-11-23 KR KR1020147018427A patent/KR101990658B1/ko active IP Right Grant
- 2012-11-30 AR ARP120104504A patent/AR089044A1/es active IP Right Grant
- 2012-11-30 TW TW101144896A patent/TWI565816B/zh not_active IP Right Cessation
-
2014
- 2014-06-05 PH PH12014501269A patent/PH12014501269A1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| MX2014006729A (es) | 2015-02-24 |
| PL2789006T3 (pl) | 2019-04-30 |
| JP2015504970A (ja) | 2015-02-16 |
| RU2014127520A (ru) | 2016-01-27 |
| ES2704121T3 (es) | 2019-03-14 |
| AR089044A1 (es) | 2014-07-23 |
| SG11201402945YA (en) | 2014-10-30 |
| MY181526A (en) | 2020-12-25 |
| CN104272429A (zh) | 2015-01-07 |
| WO2013083238A1 (de) | 2013-06-13 |
| EP2789006A1 (de) | 2014-10-15 |
| CA2858251A1 (en) | 2013-06-13 |
| EP2789006B1 (de) | 2018-10-31 |
| US10458015B2 (en) | 2019-10-29 |
| BR112014013533A8 (pt) | 2017-06-13 |
| PH12014501269B1 (en) | 2014-09-08 |
| RU2632210C2 (ru) | 2017-10-03 |
| US20140311892A1 (en) | 2014-10-23 |
| KR20140108672A (ko) | 2014-09-12 |
| KR101990658B1 (ko) | 2019-06-18 |
| CA2858251C (en) | 2019-12-10 |
| PH12014501269A1 (en) | 2014-09-08 |
| SI2789006T1 (sl) | 2019-02-28 |
| TWI565816B (zh) | 2017-01-11 |
| CN104272429B (zh) | 2016-08-24 |
| BR112014013533B1 (pt) | 2021-09-08 |
| JP6113743B2 (ja) | 2017-04-12 |
| TW201331401A (zh) | 2013-08-01 |
| MX368733B (es) | 2019-10-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| B25D | Requested change of name of applicant approved |
Owner name: OERLIKON SURFACE SOLUTIONS AG, TRUEBBACH (CH) |
|
| B06F | Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette] | ||
| B06U | Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette] | ||
| B350 | Update of information on the portal [chapter 15.35 patent gazette] | ||
| B09A | Decision: intention to grant [chapter 9.1 patent gazette] | ||
| B25D | Requested change of name of applicant approved |
Owner name: OERLIKON SURFACE SOLUTIONS AG, PFAEFFIKON (CH) |
|
| B25G | Requested change of headquarter approved |
Owner name: OERLIKON SURFACE SOLUTIONS AG, PFAEFFIKON (CH) |
|
| B16A | Patent or certificate of addition of invention granted [chapter 16.1 patent gazette] |
Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 23/11/2012, OBSERVADAS AS CONDICOES LEGAIS. |
|
| B25K | Entry of change of name and/or headquarter and transfer of application, patent and certificate of addition of invention: republication |
Owner name: OERLIKON SURFACE SOLUTIONS AG, PFAEFFIKON (CH) Free format text: RETIFICACAO DO DESPACHO (25.7) ? ALTERACAO DE SEDE PUBLICADO NA RPI NO 2641, DE 17/08/2021, QUANTO AO ITEM (71) ? DEPOSITANTE NO PARECER.ONDE SE LE: OERLIKON SURFACE SOLUTIONS AG, TRUEBBACHLEIA-SE: OERLIKON SURFACE SOLUTIONS AG, PFAEFFIKON |