BE839057A - Procede et appareil pour le depot d'une couche de matiere polymerisee au moyen d'une decharge dans un gaz - Google Patents

Procede et appareil pour le depot d'une couche de matiere polymerisee au moyen d'une decharge dans un gaz

Info

Publication number
BE839057A
BE839057A BE164750A BE164750A BE839057A BE 839057 A BE839057 A BE 839057A BE 164750 A BE164750 A BE 164750A BE 164750 A BE164750 A BE 164750A BE 839057 A BE839057 A BE 839057A
Authority
BE
Belgium
Prior art keywords
depositing
discharge
gas
layer
polymerized material
Prior art date
Application number
BE164750A
Other languages
English (en)
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE839057A publication Critical patent/BE839057A/xx

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Polymerisation Methods In General (AREA)
BE164750A 1975-03-03 1976-02-27 Procede et appareil pour le depot d'une couche de matiere polymerisee au moyen d'une decharge dans un gaz BE839057A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/554,823 US4013532A (en) 1975-03-03 1975-03-03 Method for coating a substrate

Publications (1)

Publication Number Publication Date
BE839057A true BE839057A (fr) 1976-08-27

Family

ID=24214842

Family Applications (1)

Application Number Title Priority Date Filing Date
BE164750A BE839057A (fr) 1975-03-03 1976-02-27 Procede et appareil pour le depot d'une couche de matiere polymerisee au moyen d'une decharge dans un gaz

Country Status (9)

Country Link
US (1) US4013532A (xx)
JP (1) JPS51112489A (xx)
BE (1) BE839057A (xx)
CA (1) CA1044177A (xx)
DE (1) DE2608415C2 (xx)
FR (1) FR2303091A1 (xx)
GB (1) GB1495480A (xx)
IT (1) IT1055462B (xx)
NL (1) NL176642C (xx)

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JPS61168922A (ja) 1985-01-17 1986-07-30 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション プラズマ・エツチング装置
US4618477A (en) * 1985-01-17 1986-10-21 International Business Machines Corporation Uniform plasma for drill smear removal reactor
DE3521318A1 (de) * 1985-06-14 1986-12-18 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zum behandeln, insbesondere zum beschichten, von substraten mittels einer plasmaentladung
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DE69032691T2 (de) * 1989-12-07 1999-06-10 Japan Science And Technology Corp., Kawaguchi, Saitama Verfahren und Gerät zur Plasmabehandlung unter atmosphärischem Druck
JP2897055B2 (ja) * 1990-03-14 1999-05-31 株式会社ブリヂストン ゴム系複合材料の製造方法
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US5407548A (en) * 1990-10-26 1995-04-18 Leybold Aktiengesellschaft Method for coating a substrate of low resistance to corrosion
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US6022595A (en) * 1996-02-01 2000-02-08 Rensselaer Polytechnic Institute Increase of deposition rate of vapor deposited polymer by electric field
US5993598A (en) * 1996-07-30 1999-11-30 The Dow Chemical Company Magnetron
US5900284A (en) * 1996-07-30 1999-05-04 The Dow Chemical Company Plasma generating device and method
US6156389A (en) 1997-02-03 2000-12-05 Cytonix Corporation Hydrophobic coating compositions, articles coated with said compositions, and processes for manufacturing same
US7268179B2 (en) * 1997-02-03 2007-09-11 Cytonix Corporation Hydrophobic coating compositions, articles coated with said compositions, and processes for manufacturing same
US8653213B2 (en) 1997-02-03 2014-02-18 Cytonix, Llc Hydrophobic coating compositions and articles coated with said compositions
US5853894A (en) * 1997-02-03 1998-12-29 Cytonix Corporation Laboratory vessel having hydrophobic coating and process for manufacturing same
US6495624B1 (en) * 1997-02-03 2002-12-17 Cytonix Corporation Hydrophobic coating compositions, articles coated with said compositions, and processes for manufacturing same
US6203898B1 (en) 1997-08-29 2001-03-20 3M Innovatave Properties Company Article comprising a substrate having a silicone coating
US6055929A (en) * 1997-09-24 2000-05-02 The Dow Chemical Company Magnetron
US6572825B1 (en) * 1999-10-04 2003-06-03 Sandia Corporation Apparatus for thermally evolving chemical analytes from a removable substrate
US6375811B1 (en) * 1999-08-12 2002-04-23 Northrop Grumman Corporation Flexible, highly durable, transparent optical coatings
US6811853B1 (en) 2000-03-06 2004-11-02 Shipley Company, L.L.C. Single mask lithographic process for patterning multiple types of surface features
US6627096B2 (en) 2000-05-02 2003-09-30 Shipley Company, L.L.C. Single mask technique for making positive and negative micromachined features on a substrate
KR20030030768A (ko) * 2001-10-12 2003-04-18 주식회사 엘지이아이 마그네트를 가지는 플라즈마 연속증착장치
US20050008919A1 (en) * 2003-05-05 2005-01-13 Extrand Charles W. Lyophilic fuel cell component
JP2007193997A (ja) * 2006-01-17 2007-08-02 Tateyama Machine Kk プラズマ処理装置
JP4268195B2 (ja) * 2007-02-13 2009-05-27 株式会社神戸製鋼所 プラズマｃｖｄ装置
EP1978038A1 (en) * 2007-04-02 2008-10-08 Vlaamse Instelling Voor Technologisch Onderzoek (Vito) A method for producing a coating by atmospheric pressure plasma technology
WO2010052846A1 (ja) * 2008-11-05 2010-05-14 株式会社アルバック 巻取式真空処理装置
DE102010015149A1 (de) 2010-04-16 2011-10-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zum Beschichten eines Substrates innerhalb einer Vakuumkammer mittels plasmaunterstützter chemischer Dampfabscheidung
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US9250178B2 (en) * 2011-10-07 2016-02-02 Kla-Tencor Corporation Passivation of nonlinear optical crystals

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US3297465A (en) * 1963-12-31 1967-01-10 Ibm Method for producing organic plasma and for depositing polymer films
US3318790A (en) * 1964-04-29 1967-05-09 Texas Instruments Inc Production of thin organic polymer by screened glow discharge
US3475307A (en) * 1965-02-04 1969-10-28 Continental Can Co Condensation of monomer vapors to increase polymerization rates in a glow discharge
US3471316A (en) * 1965-06-14 1969-10-07 Continental Can Co Method of forming a flexible organic layer on metal by a pulsed electrical abnormal glow discharge
US3464907A (en) * 1967-02-23 1969-09-02 Victory Eng Corp Triode sputtering apparatus and method using synchronized pulsating current
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NL7202331A (xx) * 1972-01-24 1973-07-26
US3878085A (en) * 1973-07-05 1975-04-15 Sloan Technology Corp Cathode sputtering apparatus

Also Published As

Publication number Publication date
FR2303091B1 (xx) 1979-02-02
JPS51112489A (en) 1976-10-04
US4013532A (en) 1977-03-22
JPS5527626B2 (xx) 1980-07-22
GB1495480A (en) 1977-12-21
NL7602156A (nl) 1976-09-07
CA1044177A (en) 1978-12-12
NL176642B (nl) 1984-12-17
IT1055462B (it) 1981-12-21
FR2303091A1 (fr) 1976-10-01
NL176642C (nl) 1985-05-17
DE2608415A1 (de) 1976-09-16
DE2608415C2 (de) 1983-09-01

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: AIRCO INC.

Effective date: 19920228