BE800991A - Procede et dispositif de fabrication de corps faconnes en silicium ou carbure de silicium - Google Patents

Procede et dispositif de fabrication de corps faconnes en silicium ou carbure de silicium

Info

Publication number
BE800991A
BE800991A BE132334A BE132334A BE800991A BE 800991 A BE800991 A BE 800991A BE 132334 A BE132334 A BE 132334A BE 132334 A BE132334 A BE 132334A BE 800991 A BE800991 A BE 800991A
Authority
BE
Belgium
Prior art keywords
silicon
silicon carbide
bodies shaped
manufacturing bodies
manufacturing
Prior art date
Application number
BE132334A
Other languages
English (en)
French (fr)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of BE800991A publication Critical patent/BE800991A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
BE132334A 1972-06-15 1973-06-15 Procede et dispositif de fabrication de corps faconnes en silicium ou carbure de silicium BE800991A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2229229A DE2229229A1 (de) 1972-06-15 1972-06-15 Verfahren zum herstellen von aus silizium oder siliziumcarbid bestehenden formkoerpern

Publications (1)

Publication Number Publication Date
BE800991A true BE800991A (fr) 1973-10-01

Family

ID=5847866

Family Applications (1)

Application Number Title Priority Date Filing Date
BE132334A BE800991A (fr) 1972-06-15 1973-06-15 Procede et dispositif de fabrication de corps faconnes en silicium ou carbure de silicium

Country Status (7)

Country Link
US (1) US3943218A (xx)
JP (1) JPS4952136A (xx)
BE (1) BE800991A (xx)
DE (1) DE2229229A1 (xx)
FR (1) FR2189536B1 (xx)
GB (1) GB1393211A (xx)
IT (1) IT988971B (xx)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4015922A (en) * 1970-12-09 1977-04-05 Siemens Aktiengesellschaft Apparatus for the manufacture of tubular bodies of semiconductor material
DE2618293A1 (de) * 1976-04-27 1977-11-17 Papst Motoren Kg Kollektorloser gleichstrommotor
DE2618273C3 (de) * 1976-04-27 1984-04-19 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Verfahren zur Abscheidung von polykristallinem Silicium
US4565731A (en) * 1978-05-04 1986-01-21 Canon Kabushiki Kaisha Image-forming member for electrophotography
US4471042A (en) * 1978-05-04 1984-09-11 Canon Kabushiki Kaisha Image-forming member for electrophotography comprising hydrogenated amorphous matrix of silicon and/or germanium
US4263031A (en) * 1978-06-12 1981-04-21 Corning Glass Works Method of producing glass optical filaments
JPS554040A (en) * 1978-06-26 1980-01-12 Hitachi Ltd Photoconductive material
US4475030A (en) * 1981-09-25 1984-10-02 Caterpillar Tractor Co. Glow plug having resiliently mounted ceramic surface-ignition element
US4412126A (en) * 1982-02-04 1983-10-25 Sanders Associates, Inc. Infrared source
US4861533A (en) * 1986-11-20 1989-08-29 Air Products And Chemicals, Inc. Method of preparing silicon carbide capillaries
DE59100763D1 (de) * 1990-05-02 1994-02-10 Siemens Ag Elektrode für medizinische Anwendungen.
US6228297B1 (en) * 1998-05-05 2001-05-08 Rohm And Haas Company Method for producing free-standing silicon carbide articles
US6464912B1 (en) 1999-01-06 2002-10-15 Cvd, Incorporated Method for producing near-net shape free standing articles by chemical vapor deposition
RU2159213C2 (ru) * 1999-02-25 2000-11-20 Абдюханов Мансур Абдрахманович Способ очистки кремния и устройство для его осуществления
US20050007118A1 (en) * 2003-04-09 2005-01-13 John Kitching Micromachined alkali-atom vapor cells and method of fabrication
US20090224439A1 (en) * 2008-03-07 2009-09-10 Graham Packaging Company, Lp Injection molding apparatus and methods for making plastic preforms
CN101920961B (zh) * 2009-06-09 2013-09-04 内蒙古神舟硅业有限责任公司 一种去除三氯氢硅中磷硼杂质的工艺
CN103443653B (zh) * 2011-04-01 2015-09-23 株式会社岛津制作所 辐射线检测器的制造方法以及辐射线检测器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2925357A (en) * 1954-11-08 1960-02-16 Union Carbide Corp Siliconized inert base materials
US3329527A (en) * 1963-09-13 1967-07-04 Monsanto Co Graphite heating elements and method of conditioning the heating surfaces thereof
DE1287047B (de) * 1965-02-18 1969-01-16 Siemens Ag Verfahren und Vorrichtung zum Abscheiden einer einkristallinen Halbleiterschicht
DE1917016B2 (de) * 1969-04-02 1972-01-05 Siemens AG, 1000 Berlin u. 8000 München Verfahren zur herstellung von hohlkoerpern aus halbleiter material

Also Published As

Publication number Publication date
JPS4952136A (xx) 1974-05-21
FR2189536A1 (xx) 1974-01-25
GB1393211A (en) 1975-05-07
IT988971B (it) 1975-04-30
DE2229229A1 (de) 1974-01-10
US3943218A (en) 1976-03-09
FR2189536B1 (xx) 1976-11-12

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