BE789504A - Bobine de chauffage par induction pour la fusion par zones sanscreuset de barreaux semiconducteurs - Google Patents
Bobine de chauffage par induction pour la fusion par zones sanscreuset de barreaux semiconducteursInfo
- Publication number
- BE789504A BE789504A BE789504DA BE789504A BE 789504 A BE789504 A BE 789504A BE 789504D A BE789504D A BE 789504DA BE 789504 A BE789504 A BE 789504A
- Authority
- BE
- Belgium
- Prior art keywords
- sanscreus
- zones
- melting
- induction heating
- heating coil
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
- Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Induction Heating (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2160694A DE2160694C3 (de) | 1971-12-07 | 1971-12-07 | Induktionsheizspule zum tiegelfreien Zonenschmelzen von Halbleiterstäben |
Publications (1)
Publication Number | Publication Date |
---|---|
BE789504A true BE789504A (fr) | 1973-01-15 |
Family
ID=5827286
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE789504D BE789504A (fr) | 1971-12-07 | Bobine de chauffage par induction pour la fusion par zones sanscreuset de barreaux semiconducteurs |
Country Status (12)
Country | Link |
---|---|
US (1) | US3827017A (ja) |
JP (1) | JPS5124964B2 (ja) |
AT (1) | AT324433B (ja) |
BE (1) | BE789504A (ja) |
CA (1) | CA976617A (ja) |
DE (1) | DE2160694C3 (ja) |
DK (1) | DK146725C (ja) |
FR (1) | FR2162442B1 (ja) |
GB (2) | GB1406079A (ja) |
IT (1) | IT971386B (ja) |
NL (1) | NL7213754A (ja) |
PL (1) | PL79132B1 (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2434136A1 (de) * | 1974-07-16 | 1976-01-29 | Siemens Ag | Vorrichtung zum tiegelfreien zonenschmelzen von halbleitermaterialstaeben |
DE2538854B2 (de) * | 1975-09-01 | 1979-02-15 | Wacker-Chemitronic Gesellschaft Fuer Elektronik-Grundstoffe Mbh, 8263 Burghausen | Einwindige Induktionsheizspule zum tiegelfreien Zonenschmelzen |
US4059493A (en) * | 1976-04-29 | 1977-11-22 | Cities Service Company | Anode, anode basket and method of packaging anodes |
US4220839A (en) * | 1978-01-05 | 1980-09-02 | Topsil A/S | Induction heating coil for float zone melting of semiconductor rods |
US4184135A (en) * | 1978-04-10 | 1980-01-15 | Monsanto Company | Breakapart single turn RF induction apparatus |
DE3143146A1 (de) * | 1981-10-30 | 1983-05-11 | Siemens AG, 1000 Berlin und 8000 München | Als flachspule ausgebildete induktionsheizspule zum tiegelfreien zonenschmelzen |
DE3229461A1 (de) * | 1982-08-06 | 1984-02-09 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum tiegelfreien zonenschmelzen eines, insbesondere aus silicium bestehenden halbleiterstabes |
US4714808A (en) * | 1986-09-02 | 1987-12-22 | Fmc Corporation | Induction heating pressure welding with linear bus bar joint |
JPS6448391A (en) * | 1987-04-27 | 1989-02-22 | Shinetsu Handotai Kk | Single winding induction heating coil used in floating zone melting method |
JPS63291888A (ja) * | 1987-05-25 | 1988-11-29 | Shin Etsu Handotai Co Ltd | 半導体単結晶製造装置 |
DE3873173T2 (de) * | 1987-05-25 | 1993-03-04 | Shinetsu Handotai Kk | Vorrichtung fuer hf-induktionsheizung. |
US5113049A (en) * | 1991-02-14 | 1992-05-12 | Pda Engineering | Flexible induction heating coil |
JP3127981B2 (ja) * | 1995-01-31 | 2001-01-29 | 信越半導体株式会社 | 高周波誘導加熱装置 |
US20110073591A1 (en) * | 2008-07-17 | 2011-03-31 | Seiichi Sawatsubashi | Guide Chip Structure for High-Frequency Induction Heating Coil |
US20110204044A1 (en) * | 2008-11-25 | 2011-08-25 | Chaoxuan Liu | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
WO2010060349A1 (zh) * | 2008-11-25 | 2010-06-03 | Liu Chaoxuan | 制造多根硅芯的高频线圈拉制孔布局 |
DE102010005263A1 (de) * | 2010-01-20 | 2011-07-21 | Benteler Automobiltechnik GmbH, 33102 | Verfahren zur Herstellung eines Bauteils und Vorrichtung zur Durchführung des Verfahrens |
US9282593B2 (en) | 2011-06-03 | 2016-03-08 | General Electric Company | Device and system for induction heating |
JP6111033B2 (ja) * | 2011-12-05 | 2017-04-05 | 高周波熱錬株式会社 | 加熱コイル |
DE102012017130B4 (de) | 2012-09-01 | 2016-06-16 | Man Diesel & Turbo Se | Laser-Rohreinschweißen |
CN111101199A (zh) * | 2019-12-30 | 2020-05-05 | 亚洲硅业(青海)股份有限公司 | 可拆卸高频线圈与硅芯炉 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US156707A (en) * | 1874-11-10 | Improvement in faucets | ||
US1335895A (en) * | 1919-03-24 | 1920-04-06 | Emily W Hughes | Electrode-holder |
US2266176A (en) * | 1934-03-29 | 1941-12-16 | Ohio Crankshaft Co | Apparatus for electric heating |
US2264301A (en) * | 1934-03-29 | 1941-12-02 | Ohio Crankshaft Co | Heating and quenching apparatus |
US2404987A (en) * | 1944-04-19 | 1946-07-30 | Induction Heating Corp | Induction heating and quenching device |
US2419116A (en) * | 1944-04-20 | 1947-04-15 | Westinghouse Electric Corp | Apparatus for high-frequency induction heating of strips |
US2456091A (en) * | 1945-03-12 | 1948-12-14 | Induction Heating Corp | Inductor for high-frequency induction heating |
US2481008A (en) * | 1945-06-27 | 1949-09-06 | Induction Heating Corp | Multiturn split inductor |
US2459971A (en) * | 1945-08-30 | 1949-01-25 | Induction Heating Corp | Inductor for high-frequency induction heating apparatus |
GB615779A (en) * | 1946-08-17 | 1949-01-11 | Standard Telephones Cables Ltd | Improvements in or relating to high frequency heating equipment |
US2709741A (en) * | 1952-04-17 | 1955-05-31 | Allis Chalmers Mfg Co | Inductor coil comprising parallel plates connected by a cooling conduit |
US3110793A (en) * | 1961-11-20 | 1963-11-12 | Gen Electric | Brazing tool |
NL295506A (ja) * | 1963-07-18 | |||
US3428769A (en) * | 1966-07-26 | 1969-02-18 | Mc Donnell Douglas Corp | Induction heating tool |
SE318944B (ja) * | 1967-07-12 | 1969-12-22 | Asea Ab | |
US3534198A (en) * | 1967-11-29 | 1970-10-13 | Leonidas C Miller | Adjustable induction heating head for a coaxial cable |
-
0
- BE BE789504D patent/BE789504A/xx unknown
-
1971
- 1971-12-07 DE DE2160694A patent/DE2160694C3/de not_active Expired
-
1972
- 1972-09-27 AT AT830472A patent/AT324433B/de not_active IP Right Cessation
- 1972-10-11 NL NL7213754A patent/NL7213754A/xx not_active Application Discontinuation
- 1972-11-08 GB GB5139872A patent/GB1406079A/en not_active Expired
- 1972-11-08 GB GB676375A patent/GB1406080A/en not_active Expired
- 1972-11-24 US US00309420A patent/US3827017A/en not_active Expired - Lifetime
- 1972-11-30 IT IT32301/72A patent/IT971386B/it active
- 1972-12-04 CA CA157,945A patent/CA976617A/en not_active Expired
- 1972-12-05 FR FR7243179A patent/FR2162442B1/fr not_active Expired
- 1972-12-05 PL PL1972159310A patent/PL79132B1/pl unknown
- 1972-12-06 JP JP47122333A patent/JPS5124964B2/ja not_active Expired
- 1972-12-06 DK DK608472A patent/DK146725C/da not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
GB1406080A (en) | 1975-09-10 |
DK146725B (da) | 1983-12-12 |
JPS5124964B2 (ja) | 1976-07-28 |
DK146725C (da) | 1984-05-28 |
FR2162442A1 (ja) | 1973-07-20 |
JPS49100960A (ja) | 1974-09-24 |
PL79132B1 (ja) | 1975-06-30 |
FR2162442B1 (ja) | 1977-08-26 |
IT971386B (it) | 1974-04-30 |
CA976617A (en) | 1975-10-21 |
US3827017A (en) | 1974-07-30 |
DE2160694B2 (de) | 1979-06-13 |
NL7213754A (ja) | 1973-06-12 |
DE2160694A1 (de) | 1973-06-14 |
AT324433B (de) | 1975-08-25 |
GB1406079A (en) | 1975-09-10 |
DE2160694C3 (de) | 1980-02-07 |
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