BE789090A - Procede et solution d'attaque de semi-conducteurs - Google Patents
Procede et solution d'attaque de semi-conducteursInfo
- Publication number
- BE789090A BE789090A BE789090DA BE789090A BE 789090 A BE789090 A BE 789090A BE 789090D A BE789090D A BE 789090DA BE 789090 A BE789090 A BE 789090A
- Authority
- BE
- Belgium
- Prior art keywords
- solution
- attack method
- semiconductor
- semiconductor attack
- attack
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
- H01L21/30608—Anisotropic liquid etching
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
- C09K13/06—Etching, surface-brightening or pickling compositions containing an inorganic acid with organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/32—Alkaline compositions
- C23F1/40—Alkaline compositions for etching other metallic material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/051—Etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/115—Orientation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Inorganic Chemistry (AREA)
- Weting (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US18289171A | 1971-09-22 | 1971-09-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
BE789090A true BE789090A (fr) | 1973-01-15 |
Family
ID=22670506
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE789090D BE789090A (fr) | 1971-09-22 | Procede et solution d'attaque de semi-conducteurs |
Country Status (12)
Country | Link |
---|---|
US (1) | US3738881A (ja) |
JP (1) | JPS5212060B2 (ja) |
KR (1) | KR780000484B1 (ja) |
BE (1) | BE789090A (ja) |
CA (1) | CA954425A (ja) |
CH (1) | CH582755A5 (ja) |
DE (1) | DE2245809C3 (ja) |
FR (1) | FR2153384B1 (ja) |
GB (1) | GB1357831A (ja) |
IT (1) | IT969438B (ja) |
NL (1) | NL166361C (ja) |
SE (1) | SE380543B (ja) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4013502A (en) * | 1973-06-18 | 1977-03-22 | Texas Instruments Incorporated | Stencil process for high resolution pattern replication |
US3990925A (en) * | 1975-03-31 | 1976-11-09 | Bell Telephone Laboratories, Incorporated | Removal of projections on epitaxial layers |
US4057939A (en) * | 1975-12-05 | 1977-11-15 | International Business Machines Corporation | Silicon wafer polishing |
JPS5351970A (en) * | 1976-10-21 | 1978-05-11 | Toshiba Corp | Manufacture for semiconductor substrate |
FR2372904A1 (fr) * | 1976-11-19 | 1978-06-30 | Ibm | Composition de decapage du silicium polycristallin contenant de l'hydroxyde de tetramethylammonium et procede d'application |
US6060237A (en) | 1985-02-26 | 2000-05-09 | Biostar, Inc. | Devices and methods for optical detection of nucleic acid hybridization |
US4680243A (en) * | 1985-08-02 | 1987-07-14 | Micronix Corporation | Method for producing a mask for use in X-ray photolithography and resulting structure |
US5482830A (en) * | 1986-02-25 | 1996-01-09 | Biostar, Inc. | Devices and methods for detection of an analyte based upon light interference |
DE3805752A1 (de) * | 1988-02-24 | 1989-08-31 | Fraunhofer Ges Forschung | Anisotropes aetzverfahren mit elektrochemischem aetzstop |
US4996627A (en) * | 1989-01-30 | 1991-02-26 | Dresser Industries, Inc. | High sensitivity miniature pressure transducer |
US4918030A (en) * | 1989-03-31 | 1990-04-17 | Electric Power Research Institute | Method of forming light-trapping surface for photovoltaic cell and resulting structure |
US5116464A (en) * | 1989-06-02 | 1992-05-26 | Massachusetts Institute Of Technology | Cesium hydroxide etch of a semiconductor crystal |
US5541057A (en) * | 1989-09-18 | 1996-07-30 | Biostar, Inc. | Methods for detection of an analyte |
US5639671A (en) * | 1989-09-18 | 1997-06-17 | Biostar, Inc. | Methods for optimizing of an optical assay device |
WO1991004483A1 (en) * | 1989-09-18 | 1991-04-04 | Biostar Medical Products, Inc. | Apparatus for detection of an immobilized analyte |
US5550063A (en) * | 1991-02-11 | 1996-08-27 | Biostar, Inc. | Methods for production of an optical assay device |
US5955377A (en) * | 1991-02-11 | 1999-09-21 | Biostar, Inc. | Methods and kits for the amplification of thin film based assays |
US5418136A (en) * | 1991-10-01 | 1995-05-23 | Biostar, Inc. | Devices for detection of an analyte based upon light interference |
US5494829A (en) * | 1992-07-31 | 1996-02-27 | Biostar, Inc. | Devices and methods for detection of an analyte based upon light interference |
US5431777A (en) * | 1992-09-17 | 1995-07-11 | International Business Machines Corporation | Methods and compositions for the selective etching of silicon |
US5552272A (en) * | 1993-06-10 | 1996-09-03 | Biostar, Inc. | Detection of an analyte by fluorescence using a thin film optical device |
US6114248A (en) * | 1998-01-15 | 2000-09-05 | International Business Machines Corporation | Process to reduce localized polish stop erosion |
US8021483B2 (en) | 2002-02-20 | 2011-09-20 | Hemlock Semiconductor Corporation | Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods |
JP4304154B2 (ja) * | 2002-06-07 | 2009-07-29 | マリンクロッド・ベイカー・インコーポレイテッド | 酸化剤および有機溶媒を含有するマイクロエレクトロニクス洗浄組成物 |
US6874713B2 (en) | 2002-08-22 | 2005-04-05 | Dow Corning Corporation | Method and apparatus for improving silicon processing efficiency |
US7270706B2 (en) | 2004-10-04 | 2007-09-18 | Dow Corning Corporation | Roll crusher to produce high purity polycrystalline silicon chips |
US7994062B2 (en) * | 2009-10-30 | 2011-08-09 | Sachem, Inc. | Selective silicon etch process |
US9873833B2 (en) * | 2014-12-29 | 2018-01-23 | Versum Materials Us, Llc | Etchant solutions and method of use thereof |
-
0
- BE BE789090D patent/BE789090A/xx unknown
-
1971
- 1971-09-22 US US00182891A patent/US3738881A/en not_active Expired - Lifetime
-
1972
- 1972-05-19 CA CA142,580A patent/CA954425A/en not_active Expired
- 1972-09-11 SE SE7211667A patent/SE380543B/xx unknown
- 1972-09-16 KR KR7201398A patent/KR780000484B1/ko active
- 1972-09-18 NL NL7212612.A patent/NL166361C/xx not_active IP Right Cessation
- 1972-09-19 DE DE2245809A patent/DE2245809C3/de not_active Expired
- 1972-09-19 IT IT52846/72A patent/IT969438B/it active
- 1972-09-21 JP JP47094188A patent/JPS5212060B2/ja not_active Expired
- 1972-09-21 GB GB4367272A patent/GB1357831A/en not_active Expired
- 1972-09-21 CH CH1382072A patent/CH582755A5/xx not_active IP Right Cessation
- 1972-09-21 FR FR7233501A patent/FR2153384B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL166361C (nl) | 1981-07-15 |
US3738881A (en) | 1973-06-12 |
CA954425A (en) | 1974-09-10 |
JPS5212060B2 (ja) | 1977-04-04 |
DE2245809B2 (de) | 1977-09-01 |
CH582755A5 (ja) | 1976-12-15 |
NL7212612A (ja) | 1973-03-26 |
DE2245809C3 (de) | 1978-04-27 |
IT969438B (it) | 1974-03-30 |
SE380543B (sv) | 1975-11-10 |
KR780000484B1 (en) | 1978-10-24 |
DE2245809A1 (de) | 1973-04-05 |
JPS4840380A (ja) | 1973-06-13 |
NL166361B (nl) | 1981-02-16 |
FR2153384B1 (ja) | 1976-10-29 |
FR2153384A1 (ja) | 1973-05-04 |
GB1357831A (en) | 1974-06-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
BE789090A (fr) | Procede et solution d'attaque de semi-conducteurs | |
BE793246A (fr) | Procede d'encapsulation | |
BE838223Q (fr) | Procede d'hydrodesulfuration | |
BE779768A (fr) | Procede et installation d'adsorption | |
BE744162A (fr) | Procede d'encapsulage | |
BE757476A (fr) | Procede d'oxydeshydrogenation | |
BE792435A (fr) | Procede d'evaporation | |
BE771169A (fr) | Procede de preparation d'isobutylates | |
BE764883A (fr) | Procede de preparation d'hydrogenosilanes | |
BE789272A (fr) | Procede de preparation d'organosiloxanes | |
BE777470A (fr) | Procede de preparation d'uree | |
BE793144A (fr) | Procede et agents permettant d'influer sur le temps | |
BE791542A (fr) | Procede et dispositif de refroidissement | |
BE792042A (fr) | Procede de preparation de nouvelles alcenylene-amines substituees en 3 | |
BE786518A (fr) | Procede de preparation d'oxa-bicyclo-alcenes | |
BE781490A (fr) | Inhibiteur d'amylase et son procede de preparation | |
BE793020A (fr) | Machine et procede d'excavation | |
BE783762A (fr) | Procede de preparation d'hypophosphites | |
BE785055A (fr) | Procede de preparation d'alpha-monohydroxylamino- anthraquinoneet d'alpha,alpha'-dihydroxylamino-anthraquinone | |
BE791449A (fr) | Nouvelles urees substituees et procede de | |
BE795902A (fr) | Procede de preparation du diiodo-3,5 hydroxy-4benzonitrile et de l'iodo-3 hydroxy-4 nitro-5benzonitrile | |
BE795592A (fr) | Installation et procede d'alcoylation | |
BE757727A (fr) | Procede d'encapsulation | |
BE793327A (fr) | Procede d'encapsulation | |
BE764210A (fr) | Procede de preparation d'alcoyl-silanes |