BE770634A - Procedes et dispositifs pour usiner, reaffuter, ou nettoyer despoints par bombardement electronique - Google Patents

Procedes et dispositifs pour usiner, reaffuter, ou nettoyer despoints par bombardement electronique

Info

Publication number
BE770634A
BE770634A BE770634A BE770634A BE770634A BE 770634 A BE770634 A BE 770634A BE 770634 A BE770634 A BE 770634A BE 770634 A BE770634 A BE 770634A BE 770634 A BE770634 A BE 770634A
Authority
BE
Belgium
Prior art keywords
sharpening
machining
methods
devices
cleaning spots
Prior art date
Application number
BE770634A
Other languages
English (en)
French (fr)
Inventor
M Drechsler
J-P Prulhiere
Original Assignee
Anvar
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anvar filed Critical Anvar
Publication of BE770634A publication Critical patent/BE770634A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/02—Manufacture of cathodes
    • H01J2209/022—Cold cathodes
    • H01J2209/0223—Field emission cathodes
    • H01J2209/0226—Sharpening or resharpening of emitting point or edge

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
BE770634A 1970-07-31 1971-07-29 Procedes et dispositifs pour usiner, reaffuter, ou nettoyer despoints par bombardement electronique BE770634A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7028388A FR2098954A5 (xx) 1970-07-31 1970-07-31

Publications (1)

Publication Number Publication Date
BE770634A true BE770634A (fr) 1971-12-01

Family

ID=9059619

Family Applications (1)

Application Number Title Priority Date Filing Date
BE770634A BE770634A (fr) 1970-07-31 1971-07-29 Procedes et dispositifs pour usiner, reaffuter, ou nettoyer despoints par bombardement electronique

Country Status (7)

Country Link
US (1) US3763346A (xx)
BE (1) BE770634A (xx)
CA (1) CA946937A (xx)
DE (1) DE2138339C3 (xx)
FR (1) FR2098954A5 (xx)
GB (1) GB1357198A (xx)
NL (1) NL167546C (xx)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5062766A (xx) * 1973-10-05 1975-05-28
NL8500596A (nl) * 1985-03-04 1986-10-01 Philips Nv Inrichting voorzien van een halfgeleiderkathode.
US4892752A (en) * 1987-08-12 1990-01-09 Oki Electric Industry Co., Ltd. Method of ion implantation
JP2634295B2 (ja) * 1990-05-17 1997-07-23 双葉電子工業株式会社 電子放出素子
DE9005786U1 (xx) * 1990-05-21 1990-08-30 Forschungszentrum Juelich Gmbh, 5170 Juelich, De
US5459296A (en) * 1990-12-15 1995-10-17 Sidmar N.V. Method for the low-maintenance operation of an apparatus for producing a surface structure, and apparatus
DE69130920T2 (de) * 1990-12-28 1999-09-16 Sony Corp Flache Anzeigeeinrichtung
CA2126535C (en) 1993-12-28 2000-12-19 Ichiro Nomura Electron beam apparatus and image-forming apparatus
FR2750785B1 (fr) * 1996-07-02 1998-11-06 Pixtech Sa Procede de regeneration de micropointes d'un ecran plat de visualisation
EP1135540B1 (de) * 1998-10-21 2002-03-13 Siemens Aktiengesellschaft Verfahren und vorrichtung zur reinigung eines erzeugnisses
ITRM20040464A1 (it) * 2004-09-29 2004-12-29 Uni Degli Studi Di Roma Tor Vergata Dispositivo per la pulizia di punte di un microscopio a scansione tunnel (stm), microscopio a scansione tunnel e relativo procedimento di pulizia.
EP1746629A1 (en) * 2005-07-22 2007-01-24 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh Field emitter arrangement and method of cleansing an emitting surface of a field emitter
WO2008031058A2 (en) * 2006-09-07 2008-03-13 Michigan Technological University Self-regenerating nanotips for low-power electric propulsion (ep) cathodes
US8460049B2 (en) * 2011-11-10 2013-06-11 Khalifa University Of Science And Technology & Research (Kustar) Fabrication of super ion—electron source and nanoprobe by local electron bombardment

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3385949A (en) * 1964-10-23 1968-05-28 Hughes Aircraft Co Ion gun apparatus for treatment of surfaces with beams of very small size

Also Published As

Publication number Publication date
GB1357198A (en) 1974-06-19
DE2138339B2 (de) 1978-07-27
DE2138339C3 (de) 1979-03-29
NL167546C (nl) 1981-12-16
FR2098954A5 (xx) 1972-03-10
US3763346A (en) 1973-10-02
CA946937A (en) 1974-05-07
NL167546B (nl) 1981-07-16
NL7110448A (xx) 1972-02-02
DE2138339A1 (de) 1972-02-03

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: AGENCE NATIONALE ANVAR

Effective date: 19840729