BE770634A - Procedes et dispositifs pour usiner, reaffuter, ou nettoyer despoints par bombardement electronique - Google Patents

Procedes et dispositifs pour usiner, reaffuter, ou nettoyer despoints par bombardement electronique

Info

Publication number
BE770634A
BE770634A BE770634A BE770634A BE770634A BE 770634 A BE770634 A BE 770634A BE 770634 A BE770634 A BE 770634A BE 770634 A BE770634 A BE 770634A BE 770634 A BE770634 A BE 770634A
Authority
BE
Belgium
Prior art keywords
sharpening
machining
methods
devices
cleaning spots
Prior art date
Application number
BE770634A
Other languages
English (en)
Inventor
M Drechsler
J-P Prulhiere
Original Assignee
Anvar
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anvar filed Critical Anvar
Publication of BE770634A publication Critical patent/BE770634A/fr

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00Apparatus and processes for manufacture of discharge tubes
    • H01J2209/02Manufacture of cathodes
    • H01J2209/022Cold cathodes
    • H01J2209/0223Field emission cathodes
    • H01J2209/0226Sharpening or resharpening of emitting point or edge

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cold Cathode And The Manufacture (AREA)
BE770634A 1970-07-31 1971-07-29 Procedes et dispositifs pour usiner, reaffuter, ou nettoyer despoints par bombardement electronique BE770634A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7028388A FR2098954A5 (fr) 1970-07-31 1970-07-31

Publications (1)

Publication Number Publication Date
BE770634A true BE770634A (fr) 1971-12-01

Family

ID=9059619

Family Applications (1)

Application Number Title Priority Date Filing Date
BE770634A BE770634A (fr) 1970-07-31 1971-07-29 Procedes et dispositifs pour usiner, reaffuter, ou nettoyer despoints par bombardement electronique

Country Status (7)

Country Link
US (1) US3763346A (fr)
BE (1) BE770634A (fr)
CA (1) CA946937A (fr)
DE (1) DE2138339C3 (fr)
FR (1) FR2098954A5 (fr)
GB (1) GB1357198A (fr)
NL (1) NL167546C (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5062766A (fr) * 1973-10-05 1975-05-28
NL8500596A (nl) * 1985-03-04 1986-10-01 Philips Nv Inrichting voorzien van een halfgeleiderkathode.
US4892752A (en) * 1987-08-12 1990-01-09 Oki Electric Industry Co., Ltd. Method of ion implantation
JP2634295B2 (ja) * 1990-05-17 1997-07-23 双葉電子工業株式会社 電子放出素子
DE9005786U1 (de) * 1990-05-21 1990-08-30 Forschungszentrum Jülich GmbH, 52428 Jülich Anordnung zum In-situ-Ausglühen von Emissions- oder Tunnelspitzen
DE4040201C2 (de) * 1990-12-15 1994-11-24 Hell Ag Linotype Verfahren zum wartungsarmen Betrieb einer Vorrichtung zur Herstellung einer Oberflächenstruktur und Vorrichtung zur Durchführung des Verfahrens
EP0729171B1 (fr) * 1990-12-28 2000-08-23 Sony Corporation Procédé de fabrication d'un dispositif d'affichage plat
CA2126535C (fr) * 1993-12-28 2000-12-19 Ichiro Nomura Appareil a faisceau electronique et appareil d'imagerie
FR2750785B1 (fr) * 1996-07-02 1998-11-06 Pixtech Sa Procede de regeneration de micropointes d'un ecran plat de visualisation
JP2002527628A (ja) * 1998-10-21 2002-08-27 シーメンス アクチエンゲゼルシヤフト 製品の浄化方法と被覆方法およびそのための装置
ITRM20040464A1 (it) * 2004-09-29 2004-12-29 Uni Degli Studi Di Roma Tor Vergata Dispositivo per la pulizia di punte di un microscopio a scansione tunnel (stm), microscopio a scansione tunnel e relativo procedimento di pulizia.
EP1746629A1 (fr) * 2005-07-22 2007-01-24 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh agencement d' émetteurs de champ et procédé de nettoyage d' une surface émettant d' un émetteur de champs
WO2008031058A2 (fr) * 2006-09-07 2008-03-13 Michigan Technological University Nanopointes auto-régénérantes pour cathodes de propulsion électrique à faible puissance (ep)
US8460049B2 (en) * 2011-11-10 2013-06-11 Khalifa University Of Science And Technology & Research (Kustar) Fabrication of super ion—electron source and nanoprobe by local electron bombardment

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3385949A (en) * 1964-10-23 1968-05-28 Hughes Aircraft Co Ion gun apparatus for treatment of surfaces with beams of very small size

Also Published As

Publication number Publication date
DE2138339B2 (de) 1978-07-27
US3763346A (en) 1973-10-02
FR2098954A5 (fr) 1972-03-10
NL167546C (nl) 1981-12-16
DE2138339A1 (de) 1972-02-03
CA946937A (en) 1974-05-07
DE2138339C3 (de) 1979-03-29
NL7110448A (fr) 1972-02-02
NL167546B (nl) 1981-07-16
GB1357198A (en) 1974-06-19

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: AGENCE NATIONALE ANVAR

Effective date: 19840729