BE727261A - - Google Patents
Info
- Publication number
- BE727261A BE727261A BE727261DA BE727261A BE 727261 A BE727261 A BE 727261A BE 727261D A BE727261D A BE 727261DA BE 727261 A BE727261 A BE 727261A
- Authority
- BE
- Belgium
Links
Classifications
-
- H10P14/6927—
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/308—Oxynitrides
-
- H10P14/6334—
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/113—Nitrides of boron or aluminum or gallium
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/114—Nitrides of silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Formation Of Insulating Films (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US72233668A | 1968-04-18 | 1968-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE727261A true BE727261A (cg-RX-API-DMAC10.html) | 1969-07-01 |
Family
ID=24901429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE727261D BE727261A (cg-RX-API-DMAC10.html) | 1968-04-18 | 1969-01-22 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3558348A (cg-RX-API-DMAC10.html) |
| BE (1) | BE727261A (cg-RX-API-DMAC10.html) |
| DE (1) | DE1917995B2 (cg-RX-API-DMAC10.html) |
| FR (1) | FR1600346A (cg-RX-API-DMAC10.html) |
| GB (1) | GB1264163A (cg-RX-API-DMAC10.html) |
| NL (1) | NL6901224A (cg-RX-API-DMAC10.html) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3765935A (en) * | 1971-08-10 | 1973-10-16 | Bell Telephone Labor Inc | Radiation resistant coatings for semiconductor devices |
| US3886000A (en) * | 1973-11-05 | 1975-05-27 | Ibm | Method for controlling dielectric isolation of a semiconductor device |
| JPS6022497B2 (ja) * | 1974-10-26 | 1985-06-03 | ソニー株式会社 | 半導体装置 |
| NL171942C (nl) * | 1976-02-13 | 1983-06-01 | Hitachi Ltd | Werkwijze voor het vervaardigen van een halfgeleiderinrichting, waarbij op een halfgeleiderlichaam een menglaag van nitriden van silicium en germanium wordt aangebracht. |
| JPS5245268A (en) * | 1976-08-11 | 1977-04-09 | Mitsubishi Electric Corp | Process for production of semiconductor integfrated circuit |
| JPS5559729A (en) * | 1978-10-27 | 1980-05-06 | Fujitsu Ltd | Forming method of semiconductor surface insulating film |
| US4668365A (en) * | 1984-10-25 | 1987-05-26 | Applied Materials, Inc. | Apparatus and method for magnetron-enhanced plasma-assisted chemical vapor deposition |
| US4620986A (en) * | 1984-11-09 | 1986-11-04 | Intel Corporation | MOS rear end processing |
| GB2267291B (en) * | 1992-05-27 | 1995-02-01 | Northern Telecom Ltd | Plasma deposition process |
| EP0617461B1 (en) * | 1993-03-24 | 1997-09-10 | AT&T Corp. | Oxynitride dielectric process for IC manufacture |
| US6806154B1 (en) | 1998-10-08 | 2004-10-19 | Integrated Device Technology, Inc. | Method for forming a salicided MOSFET structure with tunable oxynitride spacer |
| WO2003025992A1 (en) * | 2001-09-17 | 2003-03-27 | Advion Biosciences, Inc. | Dielectric film |
| US20100178758A1 (en) * | 2009-01-15 | 2010-07-15 | Macronix International Co., Ltd. | Methods for fabricating dielectric layer and non-volatile memory |
-
1968
- 1968-04-18 US US722336A patent/US3558348A/en not_active Expired - Lifetime
- 1968-12-31 FR FR1600346D patent/FR1600346A/fr not_active Expired
-
1969
- 1969-01-22 BE BE727261D patent/BE727261A/xx unknown
- 1969-01-24 NL NL6901224A patent/NL6901224A/xx unknown
- 1969-04-09 DE DE19691917995 patent/DE1917995B2/de active Pending
- 1969-04-16 GB GB1264163D patent/GB1264163A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1917995A1 (de) | 1969-10-30 |
| DE1917995B2 (de) | 1972-04-13 |
| NL6901224A (cg-RX-API-DMAC10.html) | 1969-10-21 |
| GB1264163A (cg-RX-API-DMAC10.html) | 1972-02-16 |
| FR1600346A (cg-RX-API-DMAC10.html) | 1970-07-20 |
| US3558348A (en) | 1971-01-26 |