BE720748A - - Google Patents

Info

Publication number
BE720748A
BE720748A BE720748DA BE720748A BE 720748 A BE720748 A BE 720748A BE 720748D A BE720748D A BE 720748DA BE 720748 A BE720748 A BE 720748A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE720748A publication Critical patent/BE720748A/xx

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Materials For Photolithography (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
BE720748D 1967-09-18 1968-09-12 BE720748A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66864867A 1967-09-18 1967-09-18

Publications (1)

Publication Number Publication Date
BE720748A true BE720748A (de) 1969-03-12

Family

ID=24683196

Family Applications (1)

Application Number Title Priority Date Filing Date
BE720748D BE720748A (de) 1967-09-18 1968-09-12

Country Status (8)

Country Link
AT (1) AT287742B (de)
BE (1) BE720748A (de)
CH (1) CH520957A (de)
DE (1) DE1797352A1 (de)
ES (1) ES358264A1 (de)
FR (1) FR1597523A (de)
GB (1) GB1217719A (de)
NL (1) NL6813382A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004004865B4 (de) 2004-01-30 2008-01-10 Qimonda Ag Antireflexschicht, die mit einem Photoresist beschichtet ist, enthaltend Polymere auf der Basis von Zimtsäure für die 157 nm Photolithographie

Also Published As

Publication number Publication date
GB1217719A (en) 1970-12-31
ES358264A1 (es) 1970-04-01
CH520957A (de) 1972-03-31
NL6813382A (de) 1969-03-20
AT287742B (de) 1971-02-10
FR1597523A (de) 1970-06-29
DE1797352A1 (de) 1971-03-18

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