BE705914A - - Google Patents

Info

Publication number
BE705914A
BE705914A BE705914DA BE705914A BE 705914 A BE705914 A BE 705914A BE 705914D A BE705914D A BE 705914DA BE 705914 A BE705914 A BE 705914A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE705914A publication Critical patent/BE705914A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
BE705914D 1966-11-09 1967-10-31 BE705914A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1966J0032191 DE1275229B (de) 1966-11-09 1966-11-09 Verfahren zur UEberwachung des elektrischen Verhaltens einer stromstarken Glimmentladung fuer metallurgische Verfahren und Einrichtung dazu

Publications (1)

Publication Number Publication Date
BE705914A true BE705914A (enrdf_load_stackoverflow) 1968-03-01

Family

ID=7204390

Family Applications (2)

Application Number Title Priority Date Filing Date
BE284991D BE284991A (enrdf_load_stackoverflow) 1966-11-09
BE705914D BE705914A (enrdf_load_stackoverflow) 1966-11-09 1967-10-31

Family Applications Before (1)

Application Number Title Priority Date Filing Date
BE284991D BE284991A (enrdf_load_stackoverflow) 1966-11-09

Country Status (8)

Country Link
AT (1) AT284991B (enrdf_load_stackoverflow)
BE (2) BE705914A (enrdf_load_stackoverflow)
CH (1) CH475366A (enrdf_load_stackoverflow)
DE (1) DE1275229B (enrdf_load_stackoverflow)
FR (1) FR1561958A (enrdf_load_stackoverflow)
GB (1) GB1202917A (enrdf_load_stackoverflow)
LU (1) LU54744A1 (enrdf_load_stackoverflow)
NL (1) NL6715171A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2232832A1 (en) * 1973-06-06 1975-01-03 Radiotechnique Compelec Discharge control in cathodic sputtering - using voltage variation on auxiliary insulated electrode to adjust gas supply
US4115828A (en) * 1977-04-05 1978-09-19 Gte Sylvania Incorporated Arc detection and control apparatus
GB8404173D0 (en) * 1984-02-17 1984-03-21 Ti Group Services Ltd Controlling current density
DE19521548A1 (de) * 1995-06-13 1996-12-19 Ipsen Ind Int Gmbh Verfahren und Vorrichtung zur Steuerung der elektrischen Stromdichte über einem Werkstück bei der Wärmebehandlung im Plasma

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE569245A (enrdf_load_stackoverflow) * 1953-12-09
AT219733B (de) * 1954-11-06 1962-02-12 Berghaus Elektrophysik Anst Einrichtung zur Durchführung von Prozessen mittels elektrischer Glimmentladungen

Also Published As

Publication number Publication date
DE1275229B (de) 1968-08-14
FR1561958A (enrdf_load_stackoverflow) 1969-04-04
AT284991B (de) 1970-10-12
NL6715171A (enrdf_load_stackoverflow) 1968-05-10
CH475366A (de) 1969-07-15
LU54744A1 (enrdf_load_stackoverflow) 1968-01-29
GB1202917A (en) 1970-08-19
BE284991A (enrdf_load_stackoverflow)

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