BE670311A - - Google Patents
Info
- Publication number
- BE670311A BE670311A BE670311A BE670311A BE670311A BE 670311 A BE670311 A BE 670311A BE 670311 A BE670311 A BE 670311A BE 670311 A BE670311 A BE 670311A BE 670311 A BE670311 A BE 670311A
- Authority
- BE
- Belgium
- Prior art keywords
- layers
- vaporization
- mask
- conductive
- source
- Prior art date
Links
- 238000009834 vaporization Methods 0.000 claims description 24
- 230000008016 vaporization Effects 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 12
- 239000003990 capacitor Substances 0.000 claims description 11
- 238000005507 spraying Methods 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 5
- 239000003989 dielectric material Substances 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 241000826860 Trapezium Species 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Semiconductor Integrated Circuits (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB3980564 | 1964-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE670311A true BE670311A (enExample) | 1966-03-29 |
Family
ID=10411601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE670311A BE670311A (enExample) | 1964-09-30 | 1965-09-29 |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE670311A (enExample) |
| DE (1) | DE1965296U (enExample) |
| ES (1) | ES317886A1 (enExample) |
| NL (1) | NL6512525A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2908467A1 (de) * | 1979-03-05 | 1980-09-11 | Siemens Ag | Regenerierfaehiger elektrischer schichtkondensator |
-
1965
- 1965-09-28 NL NL6512525A patent/NL6512525A/xx unknown
- 1965-09-28 DE DE1965N0017969 patent/DE1965296U/de not_active Expired
- 1965-09-28 ES ES0317886A patent/ES317886A1/es not_active Expired
- 1965-09-29 BE BE670311A patent/BE670311A/fr unknown
Also Published As
| Publication number | Publication date |
|---|---|
| NL6512525A (enExample) | 1966-03-31 |
| ES317886A1 (es) | 1966-05-01 |
| DE1965296U (de) | 1967-08-03 |
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