BE630728A - - Google Patents
Info
- Publication number
- BE630728A BE630728A BE630728DA BE630728A BE 630728 A BE630728 A BE 630728A BE 630728D A BE630728D A BE 630728DA BE 630728 A BE630728 A BE 630728A
- Authority
- BE
- Belgium
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US187341A US3227133A (en) | 1962-04-13 | 1962-04-13 | Multiple layer coating and cleaning |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE630728A true BE630728A (US07714131-20100511-C00038.png) | 1963-11-04 |
Family
ID=22688579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE630728D BE630728A (US07714131-20100511-C00038.png) | 1962-04-13 | 1963-04-08 |
Country Status (10)
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3277865A (en) * | 1963-04-01 | 1966-10-11 | United States Steel Corp | Metal-vapor source with heated reflecting shield |
| US3467057A (en) * | 1966-07-27 | 1969-09-16 | Hitachi Ltd | Electron beam evaporator |
| CA997228A (en) * | 1972-06-27 | 1976-09-21 | Hans-Juergen C. Blume | Deposition of films |
| DE2917841A1 (de) * | 1979-05-03 | 1980-11-13 | Leybold Heraeus Gmbh & Co Kg | Verdampfer fuer vakuumaufdampfanlagen |
| DE3200848C2 (de) * | 1982-01-14 | 1984-09-27 | GfO Gesellschaft für Oberflächentechnik mbH, 7070 Schwäbisch Gmünd | Vorrichtung zum Beschicken von Verdampfern in Aufdampfanlagen |
| DE3316554C1 (de) * | 1983-05-06 | 1984-07-12 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Verdampfervorrichtung mit Strahlheizung zum Aufdampfen mehrerer Materialien |
| CH663037A5 (de) * | 1985-02-05 | 1987-11-13 | Balzers Hochvakuum | Dampfquelle fuer vakuumbeschichtungsanlagen. |
| GB8726639D0 (en) * | 1987-11-13 | 1987-12-16 | Vg Instr Groups Ltd | Vacuum evaporation & deposition |
| DE102004006849B4 (de) * | 2004-02-12 | 2011-06-01 | Ald Vacuum Technologies Ag | Vorrichtung zum Beschichten von Substraten |
| DE102010017896A1 (de) * | 2010-04-21 | 2011-10-27 | Ald Vacuum Technologies Gmbh | Vorrichtung und Verfahren zum Beschichten von Substraten nach dem EB/PVD-Verfahren |
| EP2868768B1 (en) | 2013-10-29 | 2021-06-16 | Oerlikon Surface Solutions AG, Pfäffikon | Shutter system |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE895086C (de) * | 1942-04-15 | 1953-10-29 | Siemens Ag | Verfahren zur Herstellung metallischer Niederschlaege durch thermische Verdampfung |
| DE882174C (de) * | 1942-10-07 | 1953-07-06 | Bosch Gmbh Robert | Verfahren zum Verdampfen von Stoffen im Vakuum mittels Elektronenstrahlen |
| US2482329A (en) * | 1946-05-27 | 1949-09-20 | Rca Corp | Apparatus for selective vapor coating |
| GB754102A (en) * | 1951-06-22 | 1956-08-01 | Edwards & Co London Ltd W | Improvements in or relating to a method and apparatus for vapourising materials, forexample, metal in vacuum |
| CH311812A (de) * | 1951-11-05 | 1955-12-15 | Zeiss Carl Fa | Aufdampfeinrichtung. |
| BE514927A (US07714131-20100511-C00038.png) * | 1952-01-22 | |||
| DE1072451B (de) * | 1955-07-06 | 1960-06-02 | English Electric Valve Company Limited, London | Vorrichtung zur Herstellung von Überzügen durch Vakuumaufdampfen |
| US2932588A (en) * | 1955-07-06 | 1960-04-12 | English Electric Valve Co Ltd | Methods of manufacturing thin films of refractory dielectric materials |
| DE1054802B (de) * | 1956-03-05 | 1959-04-09 | Westinghouse Electric Corp | Verfahren zur Verdampfung von Stoffen, insbesondere zur Erzeugung der UEbergangszonen (junctions) von Transistoren |
| US3046936A (en) * | 1958-06-04 | 1962-07-31 | Nat Res Corp | Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof |
-
0
- NL NL291466D patent/NL291466A/xx unknown
-
1962
- 1962-04-13 US US187341A patent/US3227133A/en not_active Expired - Lifetime
-
1963
- 1963-03-28 AT AT248863A patent/AT247097B/de active
- 1963-04-02 SE SE3631/63A patent/SE300173B/xx unknown
- 1963-04-02 GB GB13026/63A patent/GB979700A/en not_active Expired
- 1963-04-05 CH CH436763A patent/CH414303A/de unknown
- 1963-04-06 DE DET23798A patent/DE1298833B/de active Pending
- 1963-04-08 BE BE630728D patent/BE630728A/xx unknown
- 1963-04-10 DK DK173863AA patent/DK125169B/da unknown
- 1963-04-11 LU LU43540D patent/LU43540A1/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US3227133A (en) | 1966-01-04 |
| DE1298833B (de) | 1969-07-03 |
| GB979700A (en) | 1965-01-06 |
| NL291466A (US07714131-20100511-C00038.png) | |
| AT247097B (de) | 1966-05-25 |
| LU43540A1 (US07714131-20100511-C00038.png) | 1963-06-11 |
| DK125169B (da) | 1973-01-08 |
| CH414303A (de) | 1966-05-31 |
| SE300173B (US07714131-20100511-C00038.png) | 1968-04-08 |
