BE514927A - - Google Patents
Info
- Publication number
- BE514927A BE514927A BE514927DA BE514927A BE 514927 A BE514927 A BE 514927A BE 514927D A BE514927D A BE 514927DA BE 514927 A BE514927 A BE 514927A
- Authority
- BE
- Belgium
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02425—Conductive materials, e.g. metallic silicides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE307775X | 1952-01-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
BE514927A true BE514927A (fr) |
Family
ID=20307566
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE514927D BE514927A (fr) | 1952-01-22 |
Country Status (4)
Country | Link |
---|---|
BE (1) | BE514927A (fr) |
CH (1) | CH307775A (fr) |
FR (1) | FR1064045A (fr) |
GB (1) | GB732797A (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2850414A (en) * | 1955-06-20 | 1958-09-02 | Enomoto Masamichi | Method of making single crystal semiconductor elements |
US2963390A (en) * | 1955-09-26 | 1960-12-06 | Hoffman Electronics Corp | Method of making a photosensitive semi-conductor device |
US2964435A (en) * | 1957-03-27 | 1960-12-13 | Mc Graw Edison Co | Semiconductor devices and their manufacture |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1227433B (de) * | 1955-07-28 | 1966-10-27 | Siemens Ag | Verfahren zum Einbau definierter Stoerstellen in Metall- oder Halbleiterschichten |
DE1058634B (de) * | 1956-06-07 | 1959-06-04 | Ibm Deutschland | Gasdiffusionsverfahren zur Herstellung eines Transistors |
DE1098316B (de) * | 1957-06-26 | 1961-01-26 | Union Carbide Corp | Verfahren zum Herstellen einkristalliner UEberzuege aus dotierten Halbleitergrundstoffen durch Aufdampfen im Vakuum |
DE1071177B (fr) * | 1958-01-17 | |||
US3034924A (en) * | 1958-10-30 | 1962-05-15 | Balzers Patent Beteilig Ag | Use of a rare earth metal in vaporizing metals and metal oxides |
US3036933A (en) * | 1959-10-06 | 1962-05-29 | Ibm | Vacuum evaporation method |
US3063871A (en) * | 1959-10-23 | 1962-11-13 | Merck & Co Inc | Production of semiconductor films |
US3206322A (en) * | 1960-10-31 | 1965-09-14 | Morgan John Robert | Vacuum deposition means and methods for manufacture of electronic components |
US3172778A (en) * | 1961-01-03 | 1965-03-09 | Method for producing thin semi- conducting layers of semicon- ductor compounds | |
NL275889A (fr) * | 1961-03-14 | |||
NL291466A (fr) * | 1962-04-13 | |||
DE1237076B (de) * | 1962-06-19 | 1967-03-23 | Western Electric Co | Verfahren zum Herstellen eines epitaxial aufgewachsenen Siliciumfilms auf einer Halbleiterunterlage |
-
0
- BE BE514927D patent/BE514927A/xx unknown
-
1952
- 1952-09-26 CH CH307775D patent/CH307775A/de unknown
- 1952-09-29 GB GB24374/52A patent/GB732797A/en not_active Expired
- 1952-10-02 FR FR1064045D patent/FR1064045A/fr not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2850414A (en) * | 1955-06-20 | 1958-09-02 | Enomoto Masamichi | Method of making single crystal semiconductor elements |
US2963390A (en) * | 1955-09-26 | 1960-12-06 | Hoffman Electronics Corp | Method of making a photosensitive semi-conductor device |
US2964435A (en) * | 1957-03-27 | 1960-12-13 | Mc Graw Edison Co | Semiconductor devices and their manufacture |
Also Published As
Publication number | Publication date |
---|---|
FR1064045A (fr) | 1954-05-10 |
GB732797A (en) | 1955-06-29 |
CH307775A (de) | 1955-06-15 |