BE284991A - - Google Patents

Info

Publication number
BE284991A
BE284991A BE284991DA BE284991A BE 284991 A BE284991 A BE 284991A BE 284991D A BE284991D A BE 284991DA BE 284991 A BE284991 A BE 284991A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of BE284991A publication Critical patent/BE284991A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018Glow discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/34Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
BE284991D 1966-11-09 BE284991A (pt-PT)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1966J0032191 DE1275229B (de) 1966-11-09 1966-11-09 Verfahren zur UEberwachung des elektrischen Verhaltens einer stromstarken Glimmentladung fuer metallurgische Verfahren und Einrichtung dazu

Publications (1)

Publication Number Publication Date
BE284991A true BE284991A (pt-PT)

Family

ID=7204390

Family Applications (2)

Application Number Title Priority Date Filing Date
BE284991D BE284991A (pt-PT) 1966-11-09
BE705914D BE705914A (pt-PT) 1966-11-09 1967-10-31

Family Applications After (1)

Application Number Title Priority Date Filing Date
BE705914D BE705914A (pt-PT) 1966-11-09 1967-10-31

Country Status (8)

Country Link
AT (1) AT284991B (pt-PT)
BE (2) BE705914A (pt-PT)
CH (1) CH475366A (pt-PT)
DE (1) DE1275229B (pt-PT)
FR (1) FR1561958A (pt-PT)
GB (1) GB1202917A (pt-PT)
LU (1) LU54744A1 (pt-PT)
NL (1) NL6715171A (pt-PT)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2232832A1 (en) * 1973-06-06 1975-01-03 Radiotechnique Compelec Discharge control in cathodic sputtering - using voltage variation on auxiliary insulated electrode to adjust gas supply
US4115828A (en) * 1977-04-05 1978-09-19 Gte Sylvania Incorporated Arc detection and control apparatus
GB8404173D0 (en) * 1984-02-17 1984-03-21 Ti Group Services Ltd Controlling current density
DE19521548A1 (de) * 1995-06-13 1996-12-19 Ipsen Ind Int Gmbh Verfahren und Vorrichtung zur Steuerung der elektrischen Stromdichte über einem Werkstück bei der Wärmebehandlung im Plasma

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE569245A (pt-PT) * 1953-12-09
AT219733B (de) * 1954-11-06 1962-02-12 Berghaus Elektrophysik Anst Einrichtung zur Durchführung von Prozessen mittels elektrischer Glimmentladungen

Also Published As

Publication number Publication date
DE1275229B (de) 1968-08-14
GB1202917A (en) 1970-08-19
BE705914A (pt-PT) 1968-03-01
CH475366A (de) 1969-07-15
AT284991B (de) 1970-10-12
NL6715171A (pt-PT) 1968-05-10
LU54744A1 (pt-PT) 1968-01-29
FR1561958A (pt-PT) 1969-04-04

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