AU658561B2 - Semiconductor sensor - Google Patents

Semiconductor sensor

Info

Publication number
AU658561B2
AU658561B2 AU66171/90A AU6617190A AU658561B2 AU 658561 B2 AU658561 B2 AU 658561B2 AU 66171/90 A AU66171/90 A AU 66171/90A AU 6617190 A AU6617190 A AU 6617190A AU 658561 B2 AU658561 B2 AU 658561B2
Authority
AU
Australia
Prior art keywords
channel
semiconductor sensor
cmos
sensor
sensitivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU66171/90A
Other versions
AU6617190A (en
Inventor
Vincent Mosser
Ian Suski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schlumberger SA
Original Assignee
Schlumberger SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schlumberger SA filed Critical Schlumberger SA
Publication of AU6617190A publication Critical patent/AU6617190A/en
Application granted granted Critical
Publication of AU658561B2 publication Critical patent/AU658561B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0098—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means using semiconductor body comprising at least one PN junction as detecting element
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Pressure Sensors (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Debugging And Monitoring (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Surgical Instruments (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Emergency Alarm Devices (AREA)
  • Fire-Detection Mechanisms (AREA)

Abstract

The invention relates to field effect semiconductors sensors. The sensor according to the invention is comprised of a ring oscillator (3) consisting of an odd number of CMOS reversers and arranged in an area (2) which is sensitive to the physical magnitude to be measured. In order to increase the sensitivity of the sensor, for each CMOS reverser, the channel $i(n) of the NMOS transistor is arranged perpendicularly to the channel $i(p) of the PMOS transistor.
AU66171/90A 1989-10-13 1990-10-15 Semiconductor sensor Ceased AU658561B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR8913383 1989-10-13
FR898913383A FR2653271B1 (en) 1989-10-13 1989-10-13 SEMICONDUCTOR SENSOR.
PCT/FR1990/000736 WO1991006125A1 (en) 1989-10-13 1990-10-15 Semiconductor sensor

Publications (2)

Publication Number Publication Date
AU6617190A AU6617190A (en) 1991-05-16
AU658561B2 true AU658561B2 (en) 1995-04-27

Family

ID=9386356

Family Applications (1)

Application Number Title Priority Date Filing Date
AU66171/90A Ceased AU658561B2 (en) 1989-10-13 1990-10-15 Semiconductor sensor

Country Status (14)

Country Link
EP (1) EP0495899B1 (en)
KR (1) KR100200938B1 (en)
AT (1) ATE115771T1 (en)
AU (1) AU658561B2 (en)
BR (1) BR9007733A (en)
CA (1) CA2067180C (en)
DE (1) DE69015204T2 (en)
DK (1) DK0495899T3 (en)
ES (1) ES2065552T3 (en)
FR (1) FR2653271B1 (en)
HU (1) HUT62115A (en)
NO (1) NO921453L (en)
RU (1) RU2075796C1 (en)
WO (1) WO1991006125A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101268348A (en) * 2005-07-22 2008-09-17 意法半导体股份有限公司 Integrated pressure sensor with high full-scale value
WO2007032032A1 (en) * 2005-09-16 2007-03-22 Stmicroelectronics S.R.L. Pressure sensor having a high full-scale value with package thereof
RU2451270C1 (en) * 2011-04-05 2012-05-20 Валерий Анатольевич Васильев Semiconductor high-precision absolute pressure sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3492861A (en) * 1967-03-15 1970-02-03 Csf Strain gauge arrangement
US3761784A (en) * 1971-06-29 1973-09-25 Sescosem Soc Europ Semiconduct Semi-conductor strain gauge device with field effect transistor symmetrical pairs
EP0040795B1 (en) * 1980-05-22 1987-04-08 Siemens Aktiengesellschaft Semiconductor sensor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD133714A1 (en) * 1977-12-29 1979-01-17 Frank Loeffler SILICON BENDING PLATE WITH INTEGRATED PIEZORESISTIVAL SEMICONDUCTOR MEASURING ELEMENTS

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3492861A (en) * 1967-03-15 1970-02-03 Csf Strain gauge arrangement
US3761784A (en) * 1971-06-29 1973-09-25 Sescosem Soc Europ Semiconduct Semi-conductor strain gauge device with field effect transistor symmetrical pairs
EP0040795B1 (en) * 1980-05-22 1987-04-08 Siemens Aktiengesellschaft Semiconductor sensor

Also Published As

Publication number Publication date
NO921453L (en) 1992-06-11
AU6617190A (en) 1991-05-16
DK0495899T3 (en) 1995-05-15
NO921453D0 (en) 1992-04-10
HUT62115A (en) 1993-03-29
RU2075796C1 (en) 1997-03-20
CA2067180C (en) 2001-04-10
EP0495899B1 (en) 1994-12-14
DE69015204D1 (en) 1995-01-26
EP0495899A1 (en) 1992-07-29
FR2653271B1 (en) 1994-06-10
WO1991006125A1 (en) 1991-05-02
KR100200938B1 (en) 1999-07-01
CA2067180A1 (en) 1991-04-14
BR9007733A (en) 1992-07-21
ATE115771T1 (en) 1994-12-15
ES2065552T3 (en) 1995-02-16
FR2653271A1 (en) 1991-04-19
DE69015204T2 (en) 1995-05-04

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Legal Events

Date Code Title Description
MK14 Patent ceased section 143(a) (annual fees not paid) or expired