AU6508699A - Method and apparatus for automatically polishing magnetic disks and other substrates - Google Patents

Method and apparatus for automatically polishing magnetic disks and other substrates

Info

Publication number
AU6508699A
AU6508699A AU65086/99A AU6508699A AU6508699A AU 6508699 A AU6508699 A AU 6508699A AU 65086/99 A AU65086/99 A AU 65086/99A AU 6508699 A AU6508699 A AU 6508699A AU 6508699 A AU6508699 A AU 6508699A
Authority
AU
Australia
Prior art keywords
substrates
magnetic disks
automatically polishing
polishing magnetic
automatically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU65086/99A
Inventor
James R. Aven
Lindsey Hamilton
Michael J. Herrmann
Jeff Howard
Nathan Jones
Lawrence Lee
Jon F. Nystedt
Sean O'donnell
Matt Richardson
Leroy J. Serpa
Tarlochan Singh
Kevin Thompson
Mike Vantuyl
Roger O. Williams
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Exclusive Design Co Inc
Original Assignee
Exclusive Design Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Exclusive Design Co Inc filed Critical Exclusive Design Co Inc
Publication of AU6508699A publication Critical patent/AU6508699A/en
Abandoned legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/34Accessories
    • B24B37/345Feeding, loading or unloading work specially adapted to lapping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B24B37/107Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/27Work carriers
    • B24B37/30Work carriers for single side lapping of plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
AU65086/99A 1998-10-05 1999-10-05 Method and apparatus for automatically polishing magnetic disks and other substrates Abandoned AU6508699A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16765198A 1998-10-05 1998-10-05
US09167651 1998-10-05
PCT/US1999/023182 WO2000020167A2 (en) 1998-10-05 1999-10-05 Method and apparatus for automatically polishing magnetic disks and other substrates

Publications (1)

Publication Number Publication Date
AU6508699A true AU6508699A (en) 2000-04-26

Family

ID=22608233

Family Applications (1)

Application Number Title Priority Date Filing Date
AU65086/99A Abandoned AU6508699A (en) 1998-10-05 1999-10-05 Method and apparatus for automatically polishing magnetic disks and other substrates

Country Status (3)

Country Link
JP (1) JP2000187832A (en)
AU (1) AU6508699A (en)
WO (1) WO2000020167A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6573522B2 (en) 2001-06-27 2003-06-03 Applied Matrials, Inc. Locator pin integrated with sensor for detecting semiconductor substrate carrier
EP2149831B1 (en) 2008-07-31 2012-02-01 Siemens Aktiengesellschaft Control method for a composite of several multi-axle handling devices arranged behind or beside each other and data storage medium, control system and composite
TWI410527B (en) * 2010-05-06 2013-10-01 Taiwan Semiconductor Mfg Electroplating apparatus and method for plating conducting layer on substrate
CN109202600A (en) * 2018-08-30 2019-01-15 武汉力诚光学仪器有限公司 A kind of Hand modification machine being used to prepare optical mirror slip
CN109290927B (en) * 2018-10-16 2020-10-30 海盐创通技术服务有限公司 Line burnishing device
CN113182965A (en) * 2021-03-24 2021-07-30 浙江杭摩欧亿汽车零部件有限公司 Brake block processing is with surperficial burring mechanism
CN113159894B (en) * 2021-04-27 2023-04-14 杭州卓惟机械有限公司 Computer dress designing device
CN114779051B (en) * 2022-04-29 2023-06-20 深圳格芯集成电路装备有限公司 Chip press-testing device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100390293B1 (en) * 1993-09-21 2003-09-02 가부시끼가이샤 도시바 Polishing device
EP0786310B1 (en) * 1996-01-24 2002-12-04 Lam Research Corporation Wafer polishing head
US6312319B1 (en) * 1997-04-04 2001-11-06 Timothy J. Donohue Polishing media magazine for improved polishing

Also Published As

Publication number Publication date
JP2000187832A (en) 2000-07-04
WO2000020167A9 (en) 2000-09-14
WO2000020167A2 (en) 2000-04-13
WO2000020167A3 (en) 2007-05-24

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase