AU547901B2 - Treating with low temp. plasma - Google Patents

Treating with low temp. plasma

Info

Publication number
AU547901B2
AU547901B2 AU72046/81A AU7204681A AU547901B2 AU 547901 B2 AU547901 B2 AU 547901B2 AU 72046/81 A AU72046/81 A AU 72046/81A AU 7204681 A AU7204681 A AU 7204681A AU 547901 B2 AU547901 B2 AU 547901B2
Authority
AU
Australia
Prior art keywords
plasma
treating
low temp
temp
low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU72046/81A
Other languages
English (en)
Other versions
AU7204681A (en
Inventor
Kazuhiko Abe
Ysohitada Hata
Kenji Hatada
Kiyoshi Imada
Kenichi Kato
Hiroaki Kobayashi
Hirokazu Namura
Masaie Tohkai
Susumu Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Publication of AU7204681A publication Critical patent/AU7204681A/en
Application granted granted Critical
Publication of AU547901B2 publication Critical patent/AU547901B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/02—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements ultrasonic or sonic; Corona discharge
    • D06M10/025—Corona discharge or low temperature plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/002—Sealings comprising at least two sealings in succession
    • F16J15/006—Sealings comprising at least two sealings in succession with division of the pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/168—Sealings between relatively-moving surfaces which permits material to be continuously conveyed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • B29C2059/147—Low pressure plasma; Glow discharge plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2001/00—Use of cellulose, modified cellulose or cellulose derivatives, e.g. viscose, as moulding material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2001/00—Use of cellulose, modified cellulose or cellulose derivatives, e.g. viscose, as moulding material
    • B29K2001/08—Cellulose derivatives
    • B29K2001/12—Cellulose acetate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2007/00—Use of natural rubber as moulding material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2027/00—Use of polyvinylhalogenides or derivatives thereof as moulding material
    • B29K2027/06—PVC, i.e. polyvinylchloride
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2313/00—Use of textile products or fabrics as reinforcement
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M2101/00—Chemical constitution of the fibres, threads, yarns, fabrics or fibrous goods made from such materials, to be treated
    • D06M2101/16—Synthetic fibres, other than mineral fibres
    • D06M2101/18—Synthetic fibres consisting of macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • D06M2101/22—Polymers or copolymers of halogenated mono-olefins
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M2200/00—Functionality of the treatment composition and/or properties imparted to the textile material
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M2200/00—Functionality of the treatment composition and/or properties imparted to the textile material
    • D06M2200/35—Abrasion, pilling or fibrillation resistance

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Textile Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Chemical Vapour Deposition (AREA)
AU72046/81A 1980-06-21 1981-06-22 Treating with low temp. plasma Ceased AU547901B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP55-84923 1980-06-21
JP8492380A JPS5718737A (en) 1980-06-21 1980-06-21 Apparatus for continuous plasma treatment

Publications (2)

Publication Number Publication Date
AU7204681A AU7204681A (en) 1982-01-07
AU547901B2 true AU547901B2 (en) 1985-11-14

Family

ID=13844216

Family Applications (1)

Application Number Title Priority Date Filing Date
AU72046/81A Ceased AU547901B2 (en) 1980-06-21 1981-06-22 Treating with low temp. plasma

Country Status (12)

Country Link
JP (1) JPS5718737A (enrdf_load_stackoverflow)
KR (1) KR840000727B1 (enrdf_load_stackoverflow)
AU (1) AU547901B2 (enrdf_load_stackoverflow)
BE (1) BE889306A (enrdf_load_stackoverflow)
DE (1) DE3124280A1 (enrdf_load_stackoverflow)
DK (1) DK270081A (enrdf_load_stackoverflow)
FR (1) FR2485319A1 (enrdf_load_stackoverflow)
GB (1) GB2080611B (enrdf_load_stackoverflow)
IT (1) IT1136887B (enrdf_load_stackoverflow)
NL (1) NL8102964A (enrdf_load_stackoverflow)
NO (1) NO155990C (enrdf_load_stackoverflow)
SU (1) SU1039438A3 (enrdf_load_stackoverflow)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773026A (en) * 1980-10-27 1982-05-07 Shin Etsu Chem Co Ltd Apparatus for continuous plasma treatment
JPS57195750A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Vacuum treatment apparatus
JPS57195742A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Vacuum treatment apparatus
JPS58120860A (ja) * 1982-01-06 1983-07-18 株式会社山東鉄工所 シ−ト状物質の低温プラズマ処理装置
US4511419A (en) * 1982-04-23 1985-04-16 Firma Erwin Kampf Gmbh & Co. Method and device for laminating foils
JPS58210844A (ja) * 1982-06-01 1983-12-08 Sando Iron Works Co Ltd 低温プラズマ雰囲気中の被処理物温度制御方法及びその装置
JPS5953541A (ja) * 1982-09-20 1984-03-28 Shin Etsu Chem Co Ltd 有機高分子成形品の表面改質方法
JPS6040235A (ja) * 1983-08-15 1985-03-02 Idemitsu Petrochem Co Ltd 熱可塑性樹脂の連続プラズマ処理方法およびその処理装置
EP0130444B1 (en) * 1983-06-17 1987-09-23 Hitachi, Ltd. Continuous vacuum treating apparatus
JPS6019073A (ja) * 1983-07-11 1985-01-31 Nippon Kokan Kk <Nkk> 改質プレコ−ト鋼板の製造法
JPS62274080A (ja) * 1986-05-21 1987-11-28 Hitachi Ltd プラズマ処理方法
IT1223074B (it) * 1986-11-19 1990-09-12 Martin Processing Co Inc Parabrezza di sicurezza e metodo per fabbricarlo
KR910005158B1 (ko) * 1987-06-05 1991-07-23 가부시기가이샤 히다찌세이사꾸쇼 진공연속 처리장치
ATE125392T1 (de) * 1990-05-10 1995-08-15 Eastman Kodak Co Gerät zur plasmabehandlung eines durchgehenden materials.
AU644177B2 (en) * 1990-05-10 1993-12-02 Eastman Kodak Company Apparatus for-plasma treatment of continuous material
DE29600991U1 (de) * 1996-01-20 1997-05-22 Strämke, Siegfried, Dr.-Ing., 52538 Selfkant Plasmareaktor
AU3892899A (en) * 1998-05-08 1999-11-29 Asten, Inc. Structures and components thereof having a desired surface characteristic together with methods and apparatuses for producing the same
US6287687B1 (en) 1998-05-08 2001-09-11 Asten, Inc. Structures and components thereof having a desired surface characteristic together with methods and apparatuses for producing the same
WO1999058755A1 (en) * 1998-05-08 1999-11-18 Asten, Inc. Structures and components thereof having a desired surface characteristic together with methods and apparatuses for producing the same
WO2004101891A1 (en) * 2003-05-13 2004-11-25 Universitá Degli Studi Di Milano-Bicocca Method for plasma treating paper and cardboards
AT504466B1 (de) * 2006-10-25 2009-05-15 Eiselt Primoz Verfahren und vorrichtung zur entfettung von gegenständen oder materialien mittels oxidativer radikale
JP2009082796A (ja) * 2007-09-28 2009-04-23 Tokyo Institute Of Technology プラズマ処理装置及びプラズマ処理方法
CN108655115A (zh) * 2018-06-01 2018-10-16 江阴瑞兴科技有限公司 一种连续进出料式等离子清洗设备
CN110139457B (zh) * 2018-11-06 2024-05-24 南京苏曼等离子科技有限公司 亚真空低温等离子体在线连续材料处理装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1135112B (de) * 1956-04-10 1962-08-23 Hoerder Huettenunion Ag Glimmentladungsgefaess mit Wechselstrom-speisung fuer stromstarke Entladungen zur Behandlung von in das Gefaess eingebrachten Koerpern
DE2028862A1 (de) * 1970-06-11 1971-12-16 Steigerwald K Druckschleusensystem fur eine Kammer, in der ein vom Umgebungsdruck abweichender Druck herrscht
US3870610A (en) * 1972-03-09 1975-03-11 Grace W R & Co Cold plasma treatment of materials
JPS50161475A (enrdf_load_stackoverflow) * 1974-06-20 1975-12-27
JPS5385741A (en) * 1977-01-07 1978-07-28 Nippon Steel Corp Continuous evaporation plating method of steel band
FR2420401A1 (fr) * 1978-03-20 1979-10-19 Wentgate Engineers 1976 Ltd Dispositif d'alimentation en continu de pieces dans une enceinte etanche

Also Published As

Publication number Publication date
NO155990C (no) 1987-07-01
DK270081A (da) 1981-12-22
KR830006025A (ko) 1983-09-17
BE889306A (fr) 1981-10-16
FR2485319A1 (fr) 1981-12-24
NO812087L (no) 1981-12-22
FR2485319B1 (enrdf_load_stackoverflow) 1985-01-04
JPH0341496B2 (enrdf_load_stackoverflow) 1991-06-24
JPS5718737A (en) 1982-01-30
IT8122492A0 (it) 1981-06-22
IT1136887B (it) 1986-09-03
NL8102964A (nl) 1982-01-18
KR840000727B1 (ko) 1984-05-24
AU7204681A (en) 1982-01-07
SU1039438A3 (ru) 1983-08-30
GB2080611A (en) 1982-02-03
DE3124280A1 (de) 1982-05-27
GB2080611B (en) 1984-06-20
NO155990B (no) 1987-03-23

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