JPS50161475A - - Google Patents

Info

Publication number
JPS50161475A
JPS50161475A JP7115674A JP7115674A JPS50161475A JP S50161475 A JPS50161475 A JP S50161475A JP 7115674 A JP7115674 A JP 7115674A JP 7115674 A JP7115674 A JP 7115674A JP S50161475 A JPS50161475 A JP S50161475A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7115674A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7115674A priority Critical patent/JPS50161475A/ja
Publication of JPS50161475A publication Critical patent/JPS50161475A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
JP7115674A 1974-06-20 1974-06-20 Pending JPS50161475A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7115674A JPS50161475A (enrdf_load_stackoverflow) 1974-06-20 1974-06-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7115674A JPS50161475A (enrdf_load_stackoverflow) 1974-06-20 1974-06-20

Publications (1)

Publication Number Publication Date
JPS50161475A true JPS50161475A (enrdf_load_stackoverflow) 1975-12-27

Family

ID=13452464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7115674A Pending JPS50161475A (enrdf_load_stackoverflow) 1974-06-20 1974-06-20

Country Status (1)

Country Link
JP (1) JPS50161475A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5718737A (en) * 1980-06-21 1982-01-30 Shin Etsu Chem Co Ltd Apparatus for continuous plasma treatment
JPS57195754A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Continuous vacuum treatment apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4884784A (enrdf_load_stackoverflow) * 1972-02-17 1973-11-10
JPS49126574A (enrdf_load_stackoverflow) * 1973-04-09 1974-12-04

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4884784A (enrdf_load_stackoverflow) * 1972-02-17 1973-11-10
JPS49126574A (enrdf_load_stackoverflow) * 1973-04-09 1974-12-04

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5718737A (en) * 1980-06-21 1982-01-30 Shin Etsu Chem Co Ltd Apparatus for continuous plasma treatment
JPS57195754A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Continuous vacuum treatment apparatus

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