AU528708B2 - Monitoring crystal growth of monocrystalline materials - Google Patents

Monitoring crystal growth of monocrystalline materials

Info

Publication number
AU528708B2
AU528708B2 AU54786/80A AU5478680A AU528708B2 AU 528708 B2 AU528708 B2 AU 528708B2 AU 54786/80 A AU54786/80 A AU 54786/80A AU 5478680 A AU5478680 A AU 5478680A AU 528708 B2 AU528708 B2 AU 528708B2
Authority
AU
Australia
Prior art keywords
crystal growth
monocrystalline materials
monitoring crystal
monitoring
monocrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU54786/80A
Other languages
English (en)
Other versions
AU5478680A (en
Inventor
Emanual M. Sachs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott Solar CSP Inc
Original Assignee
Mobil Tyco Solar Energy Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mobil Tyco Solar Energy Corp filed Critical Mobil Tyco Solar Energy Corp
Publication of AU5478680A publication Critical patent/AU5478680A/en
Application granted granted Critical
Publication of AU528708B2 publication Critical patent/AU528708B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/34—Edge-defined film-fed crystal-growth using dies or slits
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/26—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1036—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die]
    • Y10T117/1044—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die] including means forming a flat shape [e.g., ribbon]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AU54786/80A 1979-01-15 1980-01-21 Monitoring crystal growth of monocrystalline materials Ceased AU528708B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/003,278 US4242589A (en) 1979-01-15 1979-01-15 Apparatus for monitoring crystal growth
US3278 1979-01-15

Publications (2)

Publication Number Publication Date
AU5478680A AU5478680A (en) 1980-08-21
AU528708B2 true AU528708B2 (en) 1983-05-12

Family

ID=21705049

Family Applications (1)

Application Number Title Priority Date Filing Date
AU54786/80A Ceased AU528708B2 (en) 1979-01-15 1980-01-21 Monitoring crystal growth of monocrystalline materials

Country Status (10)

Country Link
US (1) US4242589A (pt-PT)
JP (1) JPS55109294A (pt-PT)
AU (1) AU528708B2 (pt-PT)
CA (1) CA1128172A (pt-PT)
DE (1) DE3001259A1 (pt-PT)
FR (1) FR2446333A1 (pt-PT)
GB (1) GB2043482B (pt-PT)
IL (1) IL59154A (pt-PT)
IN (1) IN153555B (pt-PT)
NL (1) NL8000251A (pt-PT)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2923240A1 (de) * 1979-06-08 1980-12-18 Leybold Heraeus Gmbh & Co Kg Messverfahren und messanordnung fuer den durchmesser von einkristallen beim tiegelziehen
FR2556109B2 (fr) * 1983-08-29 1986-09-12 Comp Generale Electricite Dispositif pour deposer en regime continu une couche de silicium polycristallin sur un ruban de carbone
FR2551233B1 (fr) * 1983-08-29 1985-10-25 Comp Generale Electricite Dispositif pour deposer en regime continu une couche de silicium polycristallin sur un ruban de carbone
US4944925A (en) * 1985-06-10 1990-07-31 Sumitomo Electric Industries, Ltd. Apparatus for producing single crystals
JPS63269003A (ja) * 1987-04-27 1988-11-07 Shin Etsu Handotai Co Ltd 晶出界面位置検出装置
USRE34375E (en) * 1987-05-05 1993-09-14 Mobil Solar Energy Corporation System for controlling apparatus for growing tubular crystalline bodies
US4936947A (en) * 1987-05-05 1990-06-26 Mobil Solar Energy Corporation System for controlling apparatus for growing tubular crystalline bodies
JPS6483595A (en) * 1987-09-25 1989-03-29 Shinetsu Handotai Kk Device for measuring crystal diameter
JPH0774117B2 (ja) * 1989-10-20 1995-08-09 信越半導体株式会社 ヒータの温度パターン作成方法及びこの温度パターンを用いたＳｉ単結晶育成制御装置
US5246535A (en) * 1990-04-27 1993-09-21 Nkk Corporation Method and apparatus for controlling the diameter of a silicon single crystal
FI911857A (fi) * 1990-04-27 1991-10-28 Nippon Kokan Kk Foerfarande och apparat foer kontroll av diametern hos en enskild silikonkristall.
US5882402A (en) * 1997-09-30 1999-03-16 Memc Electronic Materials, Inc. Method for controlling growth of a silicon crystal
DE102006041736A1 (de) 2006-09-04 2008-03-20 Schott Solar Gmbh Verfahren und Anordnung zur Herstellung eines Rohres
CA2813423A1 (en) * 2010-10-01 2012-04-05 Evergreen Solar, Inc. Sheet wafer defect mitigation
KR20130110177A (ko) * 2010-10-01 2013-10-08 에버그린 솔라, 인크. 웨이퍼 중량의 함수로서의 시트 웨이퍼 처리
CN112281208B (zh) * 2019-07-22 2022-04-05 隆基绿能科技股份有限公司 一种液口距确定方法、装置及单晶炉

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3291650A (en) * 1963-12-23 1966-12-13 Gen Motors Corp Control of crystal size
JPS4850983A (pt-PT) * 1971-10-29 1973-07-18
US3870477A (en) * 1972-07-10 1975-03-11 Tyco Laboratories Inc Optical control of crystal growth
DE2349736A1 (de) * 1973-10-03 1975-04-24 Siemens Ag Ueberwachungseinrichtung fuer eine vorrichtung zum ziehen von kristallen aus der schmelze
JPS5424319B2 (pt-PT) * 1974-08-02 1979-08-20
US3958129A (en) * 1974-08-05 1976-05-18 Motorola, Inc. Automatic crystal diameter control for growth of semiconductor crystals
FR2310044A1 (fr) * 1975-04-29 1976-11-26 Commissariat Energie Atomique Procede et dispositif d'isolement de figures dans une image
US4059343A (en) * 1976-02-26 1977-11-22 The United States Of America As Represented By The Secretary Of The Air Force Prismatic anamorphic system for optical correlators

Also Published As

Publication number Publication date
IL59154A (en) 1982-12-31
FR2446333B1 (pt-PT) 1985-04-12
DE3001259A1 (de) 1980-07-24
NL8000251A (nl) 1980-07-17
US4242589A (en) 1980-12-30
JPS55109294A (en) 1980-08-22
IN153555B (pt-PT) 1984-07-28
JPH0329753B2 (pt-PT) 1991-04-25
IL59154A0 (en) 1980-05-30
GB2043482B (en) 1982-12-08
DE3001259C2 (pt-PT) 1992-09-10
GB2043482A (en) 1980-10-08
AU5478680A (en) 1980-08-21
FR2446333A1 (fr) 1980-08-08
CA1128172A (en) 1982-07-20

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