AU5233400A - Method of fabricating a semiconductor device - Google Patents

Method of fabricating a semiconductor device

Info

Publication number
AU5233400A
AU5233400A AU52334/00A AU5233400A AU5233400A AU 5233400 A AU5233400 A AU 5233400A AU 52334/00 A AU52334/00 A AU 52334/00A AU 5233400 A AU5233400 A AU 5233400A AU 5233400 A AU5233400 A AU 5233400A
Authority
AU
Australia
Prior art keywords
fabricating
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU52334/00A
Inventor
Stephen Gerard Ayling
Richard Stuart Balmer
John Michael Heaton
Jessica Owens Maclean
Trevor Martin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qinetiq Ltd
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9913713.5A external-priority patent/GB9913713D0/en
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Publication of AU5233400A publication Critical patent/AU5233400A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/131—Integrated optical circuits characterised by the manufacturing method by using epitaxial growth
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12078—Gallium arsenide or alloys (GaAs, GaAlAs, GaAsP, GaInAs)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2304/00—Special growth methods for semiconductor lasers
    • H01S2304/10—CBE

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Optical Integrated Circuits (AREA)
AU52334/00A 1999-06-14 2000-06-02 Method of fabricating a semiconductor device Abandoned AU5233400A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GBGB9913713.5A GB9913713D0 (en) 1999-06-14 1999-06-14 Method of fabricating a semiconductor device
GB9913713 1999-06-14
GB9918097 1999-08-03
GBGB9918097.8A GB9918097D0 (en) 1999-06-14 1999-08-03 Method of fabricating a semiconductor device
PCT/GB2000/002145 WO2000077548A1 (en) 1999-06-14 2000-06-02 Method of fabricating a semiconductor device

Publications (1)

Publication Number Publication Date
AU5233400A true AU5233400A (en) 2001-01-02

Family

ID=26315661

Family Applications (1)

Application Number Title Priority Date Filing Date
AU52334/00A Abandoned AU5233400A (en) 1999-06-14 2000-06-02 Method of fabricating a semiconductor device

Country Status (6)

Country Link
EP (1) EP1185894A1 (en)
JP (1) JP2003502844A (en)
CN (1) CN1355892A (en)
AU (1) AU5233400A (en)
CA (1) CA2374942A1 (en)
WO (1) WO2000077548A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100404323B1 (en) * 2001-01-30 2003-11-03 한국전자통신연구원 The Method for Growing Semiconductor Epitaxial Layer to be different from among Growing Parts
JP4552821B2 (en) * 2005-09-27 2010-09-29 日立電線株式会社 Method for manufacturing spot size conversion waveguide
US20230002894A1 (en) * 2021-07-01 2023-01-05 Applied Materials, Inc. Shadow ring lift to improve wafer edge performance
CN117805968B (en) * 2024-02-29 2024-05-17 江苏南里台科技有限公司 Method and system for manufacturing photonic chip pattern structure

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4855255A (en) * 1988-03-23 1989-08-08 Massachusetts Institute Of Technology Tapered laser or waveguide optoelectronic method

Also Published As

Publication number Publication date
EP1185894A1 (en) 2002-03-13
JP2003502844A (en) 2003-01-21
WO2000077548A1 (en) 2000-12-21
CN1355892A (en) 2002-06-26
CA2374942A1 (en) 2000-12-21

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase